References
- Gordon, C. G., 1991, 'Generic Criteria for Vibration - Sensitive Equipment,' Proceedings of International Society for Optical Engineering (SPIE), San Jose, CA, November 4-6, Vol. 1619, pp. 71-85 https://doi.org/10.1117/12.56826
- Shan, X., Kuo, S., Zhang, J. and Menq, C., 2002, 'Ultra Precision Motion Control of a Multiple Degrees of Freedom Magnetic Suspension Stage,' IEEE/ASME Transactions on Mechatronics, Vol. 7, No. 1, pp. 67-78 https://doi.org/10.1109/3516.990889
- Physik Instrumente (PI) GmbH homepage, 2009, www.physikinstrumente.com, accessed March 23, 2009
- Yao, Q., Dong, J. and Ferreira, P. M., 2007, 'Design, Analysis, Fabrication and Testing of a Parallel- Kinematic Micropositioning XY Stage,' International Journal of Machine Tools & Manufacture, Vol. 47, pp. 946-961 https://doi.org/10.1016/j.ijmachtools.2006.07.007
-
Kang, D., Kim, K., Choi, Y., Gweon, D., Lee, S. and Lee, M., 2005, 'Design and Control of Flexure Based X Y
${\theta}_Z$ Stage,' Journal of Mechanical Science and Technology, Vol. 19, No. 11, pp. 2157-2164 https://doi.org/10.1007/BF02916513 - Paros, J. M. and Weisbord, L., 1965, 'How to Design Flexure Hinges,' Machine Design, Vol. 37, pp. 151-156
- Park, J. H., 2003, 'Development of the 6 DOF Ultra Precision Positioning System using the PZT Actuators and Elastic Hinges' , Ph.D Thesis for mechanical engineering, Seoul National University.
- Piezomechanik GmbH catalog, 2009, www. piezomechanik.com, accessed March 23, 2009
- Bashash, S. and Jalili N., 2007, 'Robust Multiple Frequency Trajectory Tracking Control of Piezoelectrically Driven Micro/Nanopositioning Systems,' IEEE Trans. on Control Systems Technology, Vol. 15, No. 5, pp. 867-878 https://doi.org/10.1109/TCST.2007.902949
- Kuhnen, K. and Janocha, H., 2001, 'Inverse Feedforward Controller for Complex Hysteretic Nonlinearities in Smart-Material Systems,' Control Intell. Syst., vol. 29, pp. 74-83
- Kuhnen, K. and Janocha, H., 2002, 'Complex Hysteresis Modeling of a Broad Class of Hysteretic Nonlinearities,' Proc. 8th Int. Conf. New Actuators, pp. 688-691
- Slotine, J. E. and Li, W., 1991, Applied Nonlinear Control, Prentice-Hall, pp. 157-187
- Bergen, A. R., Chua, L. O., Mees, A. I. and Szeto, E. W., 1982, 'Error Bounds for General Describing Function Problems,' IEEE Transactions on Circuits and Systems, Vol. CAS-29, No. 6, pp. 345-354 https://doi.org/10.1109/TCS.1982.1085166
- Cavallo, A., Natale, C., Pirozzi, S. and Visone, C., 2005, 'Limit Cycles in Control Systems Employing Smart Actuators with Hysteresis,' IEEE/ASME Trans. on Mechatronics, Vol. 10, No. 2, pp. 172-180 https://doi.org/10.1109/TMECH.2005.844711