• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.12
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• pp.1427-1430
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• 2014

A thermal barrier coating (TBC) prevents heat directly transferring from a high-temperature flame to a substrate. The TBC system comprises a top coating and bond coating. TBC technology reduces the substrate surface temperature by about $100{\sim}170^{\circ}C$. In the TBC system, internal stress is generated by the difference in thermal expansion coefficients of the substrate and coating. The internal stress also differs according to the shape and position of the blade. In this study, finite element analysis was performed for different curvatures of coin-shaped specimens, which are commonly used for thermal fatigue tests, and the changes in internal stress of the TBC system were compared. Based on the results, the curvature at which the minimum stress occurs was derived, and the thermal stress was confirmed to increase with the difference between a given curvature and the curvature with the minimum stress.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.47 no.8
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• pp.61-67
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• 2010

A characterization procedure for analyzing symmetric coupled MIS(Metal-Insulator-Semiconductor) transmission line is used the same procedure as a general single layer symmetric coupled line with perfect dielectric substrate from the extraction of the characteristic impedance and propagation constant for even- and odd-mode. In this paper, an analysis for a new substrate shielding symmetric coupled MIS structure consisting of grounded crossbar at the interface between Si and SiO2 layer using the Finite-Difference Time-Domain (FDTD) method is presented. In order to reduce the substrate effects on the transmission line characteristics, a shielding structure consisting of grounded crossbar lines over time-domain signal has been examined. Symmetric coupled MIS transmission line parameters for even- and odd-mode are investigated as the functions of frequency, and the extracted distributed frequency-dependent transmission line parameters and corresponding equivalent circuit parameters as well as quality factor for the new MIS crossbar embedded structure are also presented. It is shown that the quality factor of the symmetric coupled transmission line can be improved without significant change in the characteristic impedance and effective dielectric constant.

• Tribology and Lubricants
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• v.32 no.2
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• pp.61-66
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• 2016

Total thickness variation (TTV), BOW, and surface roughness are essential characteristics for high quality sapphire substrates. Many researchers have attempted to increase removal rate by controlling the key process parameters like pressure and velocity owing to the high cost of consumables in sapphire chemical mechanical polishing (CMP). In case of the pressure approach, increased pressure owing to higher deviation of pressure over the wafer leads to significant degradation of the TTV. In this study, the authors focused on reducing TTV under the high-pressure conditions. When the production equipment polishes multiple wafers attached on a carrier, higher loads seem to be concentrated around the leading edge of the head; this occurs because of frictional force generated by the combination of table rotation and the height of the gimbal of the polishing head. We believe the skewed pressure distribution during polishing to be the main reason of within-wafer non-uniformity (WIWNU). The insertion of a hub ring between the polishing head and substrate carrier helped reduce the pressure deviation. Adjusting the location of the hub ring enables tuning of the pressure distribution. The results indicated that the position of the hub ring strongly affected the removal profile, which confirmed that the position of the hub ring changes the pressure distribution. Furthermore, we analyzed the deformation of the head via finite element method (FEM) to verify the pressure non-uniformity over the contact area Based on experiment and FEM results, we determined the optimal position of hub ring for achieving uniform polishing of the substrate.

• Journal of the Institute of Electronics and Information Engineers
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• v.50 no.3
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• pp.16-22
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• 2013

A general characterization procedure based on the extraction of a 2n-port admittance matrix corresponding to n uniform coupled lines on the multi-layered substrate using the Finite-Difference Time-Domain (FDTD) technique is presented. In this paper, the frequency-dependent normal mode parameters are obtained from the 2n-port admittance matrix to analyze multi-layered asymmetric coupled line structure, which in turn provides the frequency-dependent propagation constant, effective dielectric constant, and line-mode characteristic impedances. To illustrate the technique, several practical coupled line structures on multi-layered substrate have been simulated. Especially, embedded conductor structures have been simulated. Comparisons with Spectral Domain Method are given, and their results agree well. It is shown that the FDTD based time domain characterization procedure is an excellent broadband simulation tool for the design of multiconductor coupled lines on multilayered PCBs as well as thick or thin hybrid structures.

• Journal of Electrical Engineering and Technology
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• v.5 no.4
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• pp.640-645
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• 2010

This paper describes the power generating property of hydrothermally grown ZnO nanorods on a flexible polyethersulfone (PES) substrate. The piezoelectric currents generated by the ZnO nanorods were measured when bending the ZnO nanorod by using I-AFM, and the measured piezoelectric currents ranged from 60 to 100 pA. When the PtIr coated tip bends a ZnO nanorod, piezoelectrical asymmetric potential is created on the nanorod surface. The Schottky barrier at the ZnO-metal interface accumulates elecntrons and then release very quickly generating the currents when the tip moves from tensile to compressed part of ZnO nanorod. These ZnO nanorods were grown almost vertically with the length of 300-500 nm and the diameter of 30-60 nm on the Ag/Ti/PES substrate at $90^{\circ}C$ for 6 hours by hydrothermal method. The metal-semiconductor interface property was evaluated by using a HP 4145B Semiconductor Parameter Analyzer and the piezoelectric effect of the ZnO nanorods were evaluated by using an I-AFM. From the measured I-V characteristics, it was observed that ZnO-Ag and ZnO-Au metal-semiconductor interfaces showed an ohmic and a Schottky contact characteristics, respectively. ANSYS finite element simulation was performed in order to understand the power generation mechanism of the ZnO nanorods under applied external stress theoretically.

• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.14-20
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• 2023

The electrostatic chuck is a technology that uses electroadhesion to attach objects and is widely used in semiconductor and display processes. This research conducted Maxwell by varying parameters to examine the distribution and variations of chucking force in a bipolar-type ESC. The parameters that were changed include the material properties of the dielectric layer and attachment substrate, applied voltage to the electrode, and the gap and width between the electrodes. The analysis results showed that as the relative permittivity of the dielectric layer and substrate increased, the chucking force also increased, with the relative permittivity of the substrate having a greater impact on the chucking force. And increasing the applied voltage led to an increase in both the chucking force and its rate of change. Lastly, as the gap between the electrodes increased, the chucking force rapidly decreased until a certain distance, after which the decrease became less significant. On the contrary, increasing the electrode width resulted in a rapid increase in the chucking force until a certain width, beyond which the increase became less pronounced, eventually converging to a chucking force of 1700 Pa. This paper is expected to have high potential for the development and research of ESC for OLED deposition.

• Structural Engineering and Mechanics
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• v.16 no.5
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• pp.519-531
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• 2003

Piezoelectric actuators have long been recognised for use in aerospace structures for control of structural shape. This paper looks at active control of the swept shock wave/turbulent boundary layer interaction using smart flap actuators. The actuators are manufactured by bonding piezoelectric material to an inert substrate to control the bleed/suction rate through a plenum chamber. The cavity provides communication of signals across the shock, allowing rapid thickening of the boundary layer approaching the shock, which splits into a series of weaker shocks forming a lambda shock foot, reducing wave drag. Active control allows optimum control of the interaction, as it would be capable of positioning the control region around the original shock position and unimorph tip deflection, hence mass transfer rates. The actuators are modelled using classical composite material mechanics theory, as well as a finite element-modelling program (ANSYS 5.7).

• Journal of Industrial Technology
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• v.22 no.A
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• pp.185-192
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• 2002

The performance of old and the new concrete construction depends upon bond strength between old and the new concrete. Current adhesive and strength measurement method ignores the effect of stress concentration from shape of specimens. Therefore, this research calculates stress concentration coefficient as the ratio of drilling depth to drilling diameter($h_s/D$), the ratio of overlay thickness to drilling diameter($h_0/D$), the ratio of steel disk thickness to drilling diameter(t/D), the ratio of overlay elastic modulus to substrate modulus($E_1/E_0$), the distance from core to corner border(L_$_{corner}$) and the distance between cores(L_$_{coic}$) vary. The finite element method is adapted to analysis The results from 'the F.E.M analysis are as follows. The stress concentration effects can be minimized when the ratio of drilling depth to drilling diameter($h_s/D$) is 0.20~0.25, the elastic modulus ratio($E_1/E_0$) is 06~1.0, and the ratio of steel disk thickness to drilling diameter(t/D) is 3.0. The overlay thickness, the distance from specimens to corner border(L_$_{corner}$), the distance between cores(L_$_{coic}$) almost do not affect to the stress concentration.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.5
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• pp.270-275
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• 2017

Current progress in the development of semiconductor technology in applications involving high electron mobility transistors (HEMT) and power devices is hindered by the lack of adequate ways todissipate heat generated during device operation. Concurrently, electronic devices that use gallium nitride (GaN) substrates do not perform well, because of the poor heat dissipation of the substrate. Suggested alternatives for overcoming these limitations include integration of high thermal conductivity material like diamond near the active device areas. This study will address a critical development in the art of GaN on diamond (GOD) structure by designing for ideal heat dissipation, in order to create apathway with the least thermal resistance and to improve the overall ease of integrating diamond heat spreaders into future electronic devices. This research has been carried out by means of heat transfer simulation, which has been successfully demonstrated by a finite-element method.

• 한국신재생에너지학회:학술대회논문집
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• 2011.05a
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• pp.116.2-116.2
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• 2011

연성 CIGS 태양전지를 제작하기 위해서는 휘어지는 연성 기판재의 적용이 반드시 필요하다. 상용되는 연성 기판재로는 플라스틱, 폴리이미드, 금속재가 있다. 그러나 플라스틱과 폴리이미드는 고효율의 CIGS 흡수층을 제조하기 위한 $500{\sim}600^{\circ}C$의 공정에 접합하지 못하다. 금속 기판재의 경우는 몰리브데늄, 알루미늄, 티타늄, 크롬강, 스테인레스강, 합금재 등이 있다. 이러한 금속 기판재 중에서 Fe-Ni 합금재는 Ni 함량의 변화에 따라 기계적, 자기적, 열팽창 특성이 다르게 나타나는 것으로 알려져 있다. 선행 연구에서 CIGS 태양전지의 기판재로 열팽창 계수가 박막층과 유사한 SUS400번 계열과 Fe-52Ni이 적합하다는 것을 확인 하였다. 따라서 본 연구에서는 유한요소해석(Finite element analysis) 프로그램인 Algor를 이용하여 CIGS solar cell을 설계하고 Fe-52Ni 기판재와 절연층인 SiO2, 흡수층인 CIGS의 두께에 따른 Cell의 잔류응력을 해석하였다.