• Title/Summary/Keyword: Film stress

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Electrical performance and improvement of stability in ultra thin amorphous IGZO TFT on flexible substrate of surface roughness (Flexible한 기판 표면 거칠기에 따른 초박형 비정질 IGZO TFT의 전기적 특성 및 안정성 개선)

  • Sin, Dae-Yeong;Jeong, Seong-Hyeon;Jo, Hyeong-Gyun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.126-126
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    • 2018
  • 최근 차세대 디스플레이인 flexible 하고 transparent 한 디스플레이 개발이 진행 중 이며, 이러한 디스플레이가 개발 되기 위해 백 플레인으로 사용되는 Thin Film Transistor (TFT) 또한 차세대 디스플레이 못지 않게 연구가 진행 되고 있다. 기존의 무기물을 기반으로 하고 Rigid한 TFT는 현재 많은 곳에 적용이 되어 사람들이 사용 하고 있다. 하지만 이미 시장은 포화상태이며 차세대 디스플레이 컨셉인 flexible 하고 투명한 것과 맞지 않는다. 그래서 유연하며 투명한 특성을 가진 TFT에 대한 연구가 활발히 진행 되고 있으며 많은 성과를 이루었다. 이러한 소자를 이용하여 훗날 Electronic-skin(e-skin)이라 부르는 전자 피부를 활용하여 실시간 모니터링 할 수 있는 헬스 케어 분야 등에 활용 가치 또한 높다. 현재 유연하며 투명한 기판 및 물질 개발에 많은 연구 개발이 진행 되고 있다. 하지만 유연한 기판을 사용하여 TFT를 제작한 후 stress나 bending에 대한 내구성과 안정성, 신뢰성 등이 무기물을 기반으로 한 TFT에 비해 좋지 않은 실정이다. 따라서 유연하며 투명한 기판을 사용한 TFT에 대한 안정성, 신뢰성 등을 확보하여야 한다. 본 연구 에서는 유연한 기판을 사용하여 TFT를 제작 한 후, TFT특성과 안정성을 확보하는 것을 목표로 실험을 진행하였다. 우리는 Mo전극과 Parylene 기판을 사용하여 유연한 TFT소자를 탑 게이트 구조로 제작 하였고 Rigid한 Glass기판 위에 Floating Process를 진행하기 위해 PVA층을 코팅 후 그 위에 Parylene을 CVD로 증착 하고 IGZO를 Sputter를 사용해 증착했다. Parylene은 DI Water 70도에서 Floating 공정을 통해 Rigid 기판에서 탈착 시켰다. 유연한 기판 위에 TFT를 제작 후 bending에 대한 특성 변화 및 안정성에 대한 측정을 실시하였다. Bending에 대한 특성 변화는 우수한 결과가 나왔지만 안정성 측정 중 Negative Bias Stress(NBS) 상에서 비정상적인 On Current Drop 현상이 발생 되었다. Parylene과 Channel층 사이 interface roughness로 인해 charge trap이 되고 이로 인해 On Current Drop 이라는 현상으로 나타났다. 그래서 우리는 Parylene 기판과 Channel 층간의 surface roughness를 개선하기 위한 방법으로 UV Treatment를 사용하였고 시간을 다르게 하여 surface 개선을 진행했다. Treatment 시간을 증가 시킴에 따라 Surface roughness가 많이 좋아 졌으며, Surface를 개선하고자 비정상적인 On Current Drop 현상이 없어졌으며 위 실험으로 Polymer의 surface roughness에 따라 TFT에 대한 안정성에 대한 신뢰성이 확보 될 수 있는 것을 확인 하였다.

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Blazed $GxL^{TM}$ Device for Laser Dream Theatre at the Aichi Expo 2005

  • Ito, Yasuyuki;Saruta, Kunihiko;Kasai, Hiroto;Nshida, Masato;Yamaguchi, Masanari;Yamashita, Keitaro;Taguchi, Ayumu;Oniki, Kazunao;Tamada, Hitoshi
    • Journal of Information Display
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    • v.8 no.2
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    • pp.10-14
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    • 2007
  • A blazed $GxL^{TM}$ device is described as having high optical efficiency (> 70% for RGB lasers), and high contrast ratio (> 10,000:1), and that is highly reliable when used in a large-area laser projection system. It has a robust design and precise stress control technology to maintain a uniform shape (bow and tilt) of more than 6,000 ribbons, a $0.25-{\mu}m$ CMOS compatible fabrication processing and planarization techniques to reduce fluctuation of the ribbons, and a reliable Al-Cu reflective film that provided protection against a high-power laser. No degradation in characteristics of the GxL device is observed after operating a 5,000- lumen projector for 2,000 hours and conducting 2,000 temperature cycling tests at $-20^{\circ}C$ and $+80^{\circ}C$. At the 2005 World Exposition in Aichi, Japan the world's largest laser projection screen with a size of 2005 inches (10 m ${\times}$ 50 m) and 6 million pixels (1,080 ${\times}$ 5,760) was demonstrated.

Design of a Simply Structured High-efficiency Polarization-independent Multilayer Dielectric Grating for Spectral Beam Combining (SBC 시스템 구성을 위한 단순한 구조를 가지는 고효율 무편광 유전체 다층박막 회절격자 설계)

  • Cho, Hyun-Ju;Kim, Gwan-Ha;Kim, Dong Hwan;Lee, Yong-Soo;Kim, Sang-In;Cho, Joonyoung;Kim, Hyun Tae;Kwak, Young-seop
    • Korean Journal of Optics and Photonics
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    • v.31 no.4
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    • pp.169-175
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    • 2020
  • We design a polarization-independent dielectric multilayer thin-film diffraction grating for a spectral-beam-combining (SBC) system with a simple grating structure and low aspect ratio. To maintain the high quality of the SBC beam, we propose a multilayer mirror structure in which the wavefront distortion due to stress accumulation is minimized. Moreover, to prevent light absorption from contamination, an optimized design to minimize the grating thickness was performed. The optimally designed diffraction grating has 99.36% diffraction efficiency for -1st-order polarization-independent light, for incidence at the Littrow angle and 1055-nm wavelength. It is confirmed that the designed diffraction grating has sufficient process margin to secure a polarization-independent diffraction efficiency of 96% or greater.

Effects of High Temperature-moisture on Corrosion and Mechanical Properties for Sn-system Solder Joints (고온고습환경이 Sn계 무연솔더의 부식 및 기계적 특성에 미치는 영향)

  • Kim, Jeonga;Park, Yujin;Oh, Chul Min;Hong, Won Sik;Ko, Yong-Ho;Ahn, Sungdo;Kang, Namhyun
    • Journal of Welding and Joining
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    • v.35 no.3
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    • pp.7-14
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    • 2017
  • The effect of high temperature-moisture on corrosion and mechanical properties for Sn-0.7Cu, Sn-3.0Ag-0.5Cu (SAC305) solders on flexible substrate was studied using Highly Accelerated Temperature/Humidity Stress Test (HAST) followed by three-point bending test. Both Sn-0.7Cu and SAC305 solders produced the internal $SnO_2$ oxides. Corrosion occurred between the solder and water film near flexible circuit board/copper component. For the SAC305 solder with Ag content, furthermore, octahedral corrosion products were formed near Ag3Sn. For the SAC305 and Sn-0.7Cu solders, the amount of internal oxide increased with the HAST time and the amount of internal oxides was mostly constant regardless of Ag content. The size of the internal oxide was larger for the Sn-0.7Cu solder. Despite of different size of the internal oxide, the fracture time during three-point bending test was not significantly changed. It was because the bending crack was always initiated from the three-point corner of the chip. However, the crack propagation depended on the oxides between the flexible circuit board and the Cu chip. The fracture time of the three-point bending test was dependent more on the crack initiation than on the crack propagation.

A Study on the Shape-Decision Technique of Membrane Structures According to the Design Process and Shape Analysis (건축 설계프로세스와 형상해석을 통한 막 구조물의 형상결정 방안에 관한 연구)

  • Park, Sun-Woo;Kim, Seung-Deog;Shon, Su-Deok;Jeong, Eul-Seok
    • Journal of Korean Association for Spatial Structures
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    • v.7 no.2 s.24
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    • pp.115-124
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    • 2007
  • The initial shape is arrived at by a self-formation process, which accomplishes a form in the natural world, or is determined analytically by considering the equilibrium of initial stress only. Therefore, the self-formation process, which accomplishes a form in the natural world is grasped and the types of modeling techniques available to find the shapes of soft structures are well investigated and classified. To establish a form-finding modeling techniques, the models of string, soap film, fabric, rubber, plaster, and etc. are used. These modeling techniques can be used as a method of understanding the characteristics of structures when the material of model shows similar characteristics. Generally, the model test confirms the structure based on numerical analysis, at the same time it is important preceding process to develop such a program. With the above process, the relationship between model test and numerical analysis becomes a feedback process. Therefore, in this study, two examples which have been accomplished from such a technique are investigated and considered according to modeling process.

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Size-dependent analysis of functionally graded ultra-thin films

  • Shaat, M.;Mahmoud, F.F.;Alshorbagy, A.E.;Alieldin, S.S.;Meletis, E.I.
    • Structural Engineering and Mechanics
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    • v.44 no.4
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    • pp.431-448
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    • 2012
  • In this paper, the first-order shear deformation theory (FSDT) (Mindlin) for continuum incorporating surface energy is exploited to study the static behavior of ultra-thin functionally graded (FG) plates. The size-dependent mechanical response is very important while the plate thickness reduces to micro/nano scales. Bulk stresses on the surfaces are required to satisfy the surface balance conditions involving surface stresses. Unlike the classical continuum plate models, the bulk transverse normal stress is preserved here. By incorporating the surface energies into the principle of minimum potential energy, a series of continuum governing differential equations which include intrinsic length scales are derived. The modifications over the classical continuum stiffness are also obtained. To illustrate the application of the theory, simply supported micro/nano scaled rectangular films subjected to a transverse mechanical load are investigated. Numerical examples are presented to present the effects of surface energies on the behavior of functionally graded (FG) film, whose effective elastic moduli of its bulk material are represented by the simple power law. The proposed model is then used for a comparison between the continuum analysis of FG ultra-thin plates with and without incorporating surface effects. Also, the transverse shear strain effect is studied by a comparison between the FG plate behavior based on Kirchhoff and Mindlin assumptions. In our analysis the residual surface tension under unstrained conditions and the surface Lame constants are expected to be the same for the upper and lower surfaces of the FG plate. The proposed model is verified by previous work.

Effect of cavitation for electrochemical characteristics in seawater for austenitic 304 stainless steel (오스테나이트계 STS 304강의 해수 내 전기화학적 특성에 미치는 캐비테이션의 영향)

  • Kim, Seong-Jong;Lee, Seung-Jun;Chong, Sang-Ok
    • Journal of Advanced Marine Engineering and Technology
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    • v.37 no.5
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    • pp.484-492
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    • 2013
  • With the industrial acceleration in a lot of countries of the world, the demand for anti-corrosion and anti-abrasion material increases continuously. Particularly, stainless steel with the fine surface and excellent corrosion resistance is widely used in various industrial fields including ship, offshore structures tidal power plant, and etc. In marine environment, however, it is easy to generate by the corrosion damage by $Cl^-$ ion and cavitation damage due to high rotation speed on stainless steel. Therefore, in this research, the cavitation erosion-corrosion test (Hybrid test) was performed for 304 stainless steel specimen used in the high flow rate seawater environment. And the cavitation damage behavior in the corrosive environment was analyzed overall. The high hardness was shown due to the formation of compressive residual stress by the water cavitation peening effect in cavitation condition. However, high current density in the potentiodynamic polarization experiment presented with the breakdown of the passive film caused by physical impact. Therefore, both electrochemical characteristics and mechanical properties must be taken into account to improve the cavitation resistance in seawater.

Deposition Behavior and Microstructure of Fe-based Amorphous Alloy Fabricated by Vacuum Kinetic Spraying Process (진공 저온 분사 공정을 통해 형성된 Fe계 비정질 재료의 적층거동 및 미세구조 변화 관찰)

  • Kwon, Juhyuk;Park, Hyungkwon;Lee, Illjoo;Lee, Changhee
    • Korean Journal of Materials Research
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    • v.24 no.1
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    • pp.60-65
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    • 2014
  • Fe-based amorphous coatings were fabricated on a soda-lime glass substrate by the vacuum kinetic spray method. The effect of the gas flow rate, which determines particle velocity, on the deposition behavior of the particle and microstructure of the resultant films was investigated. The as-fabricated microstructure of the film was studied by field emission scanning electron microscopy (FE-SEM) and high resolution transmission electron microscopy (HR-TEM). Although the activation energy for transformation from the amorphous phase to crystalline phase was lowered by severe plastic deformation and particle fracturing under a high strain rate, the crystalline phases could not be found in the coating layer. Incompletely fractured and small fragments 100~300 nm in size, which are smaller than initial feedstock material, were found on the coating surface and inside of the coating. Also, some pores and voids occurred between particle-particle interfaces. In the case of brittle Fe-based amorphous alloy, particles fail in fragmentation fracture mode through initiation and propagation of the numerous small cracks rather than shear fracture mode under compressive stress. It could be deduced that amorphous alloy underwent particle fracturing in a vacuum kinetic spray process. Also, it is considered that surface energy caused by the formation of new surfaces and friction energy contributed to the bonding of fragments.

Characteristics of Sputtered Ta films by Statistical Method (통계적 실험 방법에 의한 Ta 박막의 증착 특성 연구)

  • Seo, Yu-Seok;Park, Dae-Gyu;Jeong, Cheol-Mo;Kim, Sang-Beom;Son, Pyeong-Geun;Lee, Seung-Jin;Kim, Han-Min;Yang, Hong-Seon;Park, Jin-Won
    • Korean Journal of Materials Research
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    • v.11 no.6
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    • pp.492-497
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    • 2001
  • We report the characteristics and the dependence of sputter-deposited Ta films on the process parameters. The properties of as-deposited Ta films such as deposition rate, resistivity, Rs uniformity, reflectivity, and stress were investigated and analyzed as a function of process parameter using a statistical experimental method. The functional relationships between the independent and dependent variables were predicted by surface response. The optimal deposition condition of DC magnetron sputtered Ta films was obtained at the chamber pressure of 2 mTorr, power density of 8 W/$\textrm{cm}^2$, and substrate temperature of 2$0^{\circ}C$ by means of resistivity and Rs uniformity. The fitness value for quadratic model as evaluated by the R- square was 0.85~ 0.9 without pooling. The as-deposited Ta films exhibited the resistivity of ~180$\mu$$\Omega$cm with Rs uniformity of ~2%. The transmission electron microscopy and x-ray diffractometry identified that the phase of as-deposited film was $\beta$-Ta having the grain size of 100~200.

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FLIP CHIP ON ORGANIC BOARD TECHNOLOGY USING MODIFIED ANISOTROPIC CONDUCTIVE FILMS AND ELECTROLESS NICKEL/GOLD BUMP

  • Yim, Myung-Jin;Jeon, Young-Doo;Paik, Kyung-Wook
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.2
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    • pp.13-21
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    • 1999
  • Flip chip assembly directly on organic boards offers miniaturization of package size as well as reduction in interconnection distances resulting in a high performance and cost-competitive Packaging method. This paper describes the investigation of alternative low cost flip-chip mounting processes using electroless Ni/Au bump and anisotropic conductive adhesives/films as an interconnection material on organic boards such as FR-4. As bumps for flip chip, electroless Ni/Au plating was performed and characterized in mechanical and metallurgical point of view. Effect of annealing on Ni bump characteristics informed that the formation of crystalline nickel with $Ni_3$P precipitation above $300^{\circ}C$ causes an increase of hardness and an increase of the intrinsic stress resulting in a reliability limitation. As an interconnection material, modified ACFs composed of nickel conductive fillers for electrical conductor and non-conductive inorganic fillers for modification of film properties such as coefficient of thermal expansion(CTE) and tensile strength were formulated for improved electrical and mechanical properties of ACF interconnection. The thermal fatigue life of ACA/F flip chip on organic board limited by the thermal expansion mismatch between the chip and the board could be increased by a modified ACA/F. Three ACF materials with different CTE values were prepared and bonded between Si chip and FR-4 board for the thermal strain measurement using moire interferometry. The thermal strain of ACF interconnection layer induced by temperature excursion of $80^{\circ}C$ was decreased with decreasing CTEs of ACF materials.

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