• Journal of KIISE:Databases
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• v.34 no.2
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• pp.99-108
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• 2007

In this paper, we design and implement the Film Defect Inspection System (FDIS) that detects film defects and determines their types which can be used for producing polarized films of TFT-LCD. The proposed system is designed to detect film defects from polarized film images using image segmentation techniques and to determine defect types through the image analysis of detected defects. To determine defect types, we extract features such as shape and texture of defects, and compare those features with corresponding features of referential images stored in a template database. Experimental results using FDIS show that the proposed system detects all defects of test images effectively (Precision 1.0, Recall 1.0) and efficiently (within 0.64 second in average), and achieves the considerably high correctness in determining defect types (Precision 0.96 and Recall 0.95 in average). In addition, our system shows the high robustness for rotated transformation of images, achieving Precision 0.95 and Recall 0.89 in average.

• Journal of Korea Multimedia Society
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• v.19 no.3
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• pp.633-641
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• 2016

Automatic defect inspection system is composed of the step in the pre-processing, defect candidate detection, and classification. Polarizing films containing various defects should be minimized over-detection for classifying defect blobs. In this paper, we propose a defect detection algorithm using a skewness of histogram for minimizing over-detection. In order to detect up defects with similar to background pixel, we are used the characteristics of the local region. And the real defect pixels are distinguished from the noise using the probability density function. Experimental results demonstrated the minimized over-detection by utilizing the artificial images and real polarizing film images.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.55-61
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• 2021

In this paper, we proposed and implemented defect detection methods of polarized film with half-wave phase retardation plates. We investigated the principles of phase retardation compensation and optical principle of half-wave phase retardation plates. We analyzed of samples of polarized film with half-wave phase retardation plates. The optical defect detection methods are proposed and the performance is validated with experiments.

• Journal of Korea Multimedia Society
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• v.13 no.8
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• pp.1115-1127
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• 2010

In order to increase the productivity in manufacturing TFT-LCD(thin film transistor-liquid crystal display), it is essential to classify defects that occur during the production and make an appropriate decision on whether the product with defects is scrapped or not. The decision mainly depends on classifying the defects accurately. In this paper, we present an effective classification method for film defects acquired in the panel production line by analyzing the intensity distribution and shape feature of the defects. We first generate a binary image for each defect by separating defect regions from background (non-defect) regions. Then, we extract various features from the defect regions such as the linearity of the defect, the intensity distribution, and the shape characteristics considering intensity, and construct a referential image database that stores those feature values. Finally, we determine the type of a defect by matching a defect image with a referential image in the database through the matching cost function between the two images. To verify the effectiveness of our method, we conducted a classification experiment using defect images acquired from real TFT-LCD production lines. Experimental results show that our method has achieved highly effective classification enough to be used in the production line.

• Journal of the Korean Chemical Society
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• v.54 no.4
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• pp.380-386
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• 2010

We have investigated the growth kinetics of Al oxide film by anodization in sulfuric acid solution and the electronic properties of this film using electrochemical impedance spectroscopy. Al oxide film consisted $Al_2O_3$ was grown based on the point defect model and shown the eclctronic properties of n-type semiconductor.

• Proceedings of the Safety Management and Science Conference
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• 2009.04a
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• pp.523-529
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• 2009

The ACF(Anisotropic Conductive Film) is used for bonding Drive IC and OLED display device panel. If ACF bonding process is problem, a malfunction of line defect can occur. Because electric resistance increase between the panel and drive IC after a period of time, drive IC can not supply enough current to the panel. This paper is studied on a method of test for line defect.

• Journal of the Korean Institute of Intelligent Systems
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• v.19 no.6
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• pp.743-748
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• 2009

In this paper, we propose an effective method to extract background components in automated vision inspection system for polarized film used in TFT LCD display panels. The test image signals are typically composed of three components such as ununiform background, random noises and target defect signals. It is important to analyze the background signal for accurate extraction of defect components. Two dimensional continuous wavelets with first derivative gaussian is used. This methods can be applied for reliable extraction of defect signal by elimination of the background signal from the original image. The proposed method outperforms over conventional FFT methods.

• Journal of Integrative Natural Science
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• v.11 no.4
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• pp.209-211
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• 2018

A zinc oxide thin film doped with aluminum was deposited by RF sputtering. The deposition temperature of the sputter chamber was kept constant at $350^{\circ}C$, the power supplied to the chamber was 75 W, the oxygen flow rate was changed to 10 sccm and 20 sccm, and the thin film deposition time was changed to 120 and 180 minutes. The structures of the deposited zinc oxide thin films were analyzed by van der Waals method using an X-ray diffractometer. As a result of X-ray diffraction, the amount of oxygen supplied to the zinc oxide thin film increased, and the surface growth of the (002), (400), (110), and (103) planes showed a change with increasing deposition time. Moreover, as the amount of oxygen supplied to the zinc oxide thin film increased, their shape was observed to be coarse, and the thin film' s particles shape was correlated with the oxygen chemical defect introduced.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.235-238
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• 2004

본 연구는 반도체소자 제조공정에 적용되는 CMP공정 중 LPP(Landing Plug Poly) Contact간의 소자 분리를 위해 진행되는 LPP CMP의 후 세정 과정에서 유발되는 방사형 Defect 제거에 관한 내용이다. 방사형 Defect은 LPP CMP 후에 노출되는 BPSG, Poly, Nitride Film과 연마재로 사용되는SiO2 입자, 후 세정과정에서 적용되는 SC-1, DHF, $NH_4OH$ Chemical과 Brush와의 상호작용에 의해 발생되며, Cleaning시의 산성 분위기 하에서 각 물질간의 pH와 Zeta Potential의 차이에서 기인한다. 이 Defect을 제거하기 위해 LPP CMP후에 Film 표면에 노출되는 각 물질의 표면 특성과 CMP 후 오염입자의 흡착과 재 흡착에 영향을 미치는 Electrostatic force와 Van der Waals force, PVA Brush에 의한 Mechanical force의 상호작용을 고려하여 최적 후 세정 조건을 제시 하였다.

• Journal of the Korean Solar Energy Society
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• v.39 no.1
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• pp.1-9
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• 2019

Light induced degradation is one of the major research challenges of hydrogenated amorphous silicon related thin film silicon solar cells. Amorphous silicon shows creation of metastable defect states, originating from elevated concentration of dangling bonds during light exposure. The metastable defect states work as recombination centers, and mostly affects quality of intrinsic layer in solar cells. In this paper we present results of light induced degradation in thin film silicon solar cells and discussion on physical origin, mechanism and practical solutions of light induced degradation in thin film silicon solar cells. In-situ light-soaking IV measurement techniques are presented. We also present thin film silicon material with silicon nano-quantum dots embedded within amorphous matrix, which shows superior stability during light-soaking. Our results suggest that solar cell using silicon nano-quantum dots in abosrber layer shows superior stability under light soaking, compared to the conventional amorphous silicon solar cell.