• Title/Summary/Keyword: Field emission scanning electron microscopy

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Controlled Synthesis of Hexagonal Boron Nitride on Cu Foil Using Chemical Vapor Deposition

  • Han, Jaehyun;Lee, Jun-Young;Kwon, Heemin;Yeo, Jong-Souk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.630-630
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    • 2013
  • Recently, atomically smooth hexagonal boron nitride(h-BN) known as a white graphene has drawn great attention since the discovery of graphene. h-BN is a III-V compound and has a honeycomb structure very similar to graphene with smaller lattice mismatch. Because of strong covalent sp2bonds like graphene, h-BN provides a high thermal conductivity and mechanical strength as well as chemical stability of h-BN superior to graphene. While graphene has a high electrical conductivity, h-BN has a highly dielectric property as an insulator with optical band gap up to 6eV. Similar to the graphene, h-BN can be applied to a variety of field, such as gate dielectric layers/substrate, ultraviolet emitter, transparent membrane, and protective coatings. However, up until recently, obtaining and controlling good quality monolayer h-BN layers have been too difficult and challenging. In this work, we investigate the controlled synthesis of h-BN layers according to the growth condition, time, temperature, and gas partial pressure. h-BN is obtained by using chemical vapor deposition on Cu foil with ammonia borane (BH3NH3) as a source for h-BN. Scanning Transmission Electron Microscopy (STEM, JEOL-JEM-ARM200F) is used for imaging and structural analysis of h-BN layer. Sample's surface morphology is characterized by Field emission scanning electron microscopy (SEM, JEOL JSM-7100F). h-BN is analyzed by Raman spectroscopy (HORIBA, ARAMIS) and its topographic variations by Atomic force microscopy (AFM, Park Systems XE-100).

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Evaluation of Mechanical Properties and Microstructure Depending on Sintering Heating Rate of IN 939 W Alloy (IN 939 W 합금의 소결 승온 속도에 따른 물리적 특성과 미세조직 분석)

  • Jeon, Junhyub;Lee, Junho;Seo, Namhyuk;Son, Seung Bae;Jung, Jae-Gil;Lee, Seok-Jae
    • Journal of Powder Materials
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    • v.29 no.5
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    • pp.399-410
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    • 2022
  • Changes in the mechanical properties and microstructure of an IN 939 W alloy according to the sintering heating rate were evaluated. IN 939 W alloy samples were fabricated by spark plasma sintering. The phase fraction, number density, and mean radius of the IN 939 W alloy were calculated using a thermodynamic calculation. A universal testing machine and micro-Vickers hardness tester were employed to confirm the mechanical properties of the IN 939 W alloy. X-ray diffraction, optical microscopy, field-emission scanning electron microscopy, Cs-corrected-field emission transmission electron microscopy, and energy dispersive X-ray spectrometry were used to evaluate the microstructure of the alloy. The rapid sintering heating rate resulted in a slightly dispersed γ' phase and chromium oxide. It also suppressed the precipitation of the η phase. These helped to reinforce the mechanical properties.

반도체 산업용 나노기공 함유 유기실리카 박막

  • 차국헌;윤도영;이진규;이희우
    • Proceedings of the Korea Crystallographic Association Conference
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    • 2002.11a
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    • pp.48-48
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    • 2002
  • It is generally accepted that ultra low dielectric interlayer dielectric materials (k < 2.2) will be necessary for ULSI advanced microelectronic devices after 2003, according to the International Technology Roadmap for Semiconductors (ITRS) 2000. A continuous reduction of dielectric constant is believed to be possible only by incorporating nanopores filled with air (k = 1.0) into electrically insulating matrices such as poly(methyl silsesquioxane) (PMSSQ). The nanopo.ous low dielectric films should have excellent material properties to survive severe mechanical stress conditions imposed during the advanced semiconductor processes such as chemical mechanical planarization process and multilayer fabrication. When air is incorporated into the films for lowering k, their mechanical strength has inevitably to be sacrificed. To minimize this effect, the nanopores are controlled to exist in the film as closed cells. The micromechanical properties of the nanoporous thin films are considered more seriously than ever, particularly for ultra low dielectric applications. In this study, three approaches were made to design and develop nanoporous low dielectric films with improved micromechanical properties: 1) wall density increase of nanoporous organosilicate film by copolymerization of carbon bridged comonomers; 2) incorporation of sacrificial phases with good miscibility; 3) selective surface modification by plasma treatment. Nanoporous low-k films were prepared with copolymerized PMSSQ and star-shaped sacrificial organic molecules, both of which were synthesized to control molecular weight and functionality. The nanoporous structures of the films were observed using field emission scanning electron microscopy, cross-sectional transmission electron microscopy, atomic force microscopy, and positronium annihilation lifetime spectroscopy(PALS). Micromechanical characterization was performed using a nanoindentor to measure hardness and modulus of the films.

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Properties of Carbon Pastes Prepared with Mixing Ratios of Nano Carbon and Graphite Flakes

  • Kim, Kwangbae;Song, Ohsung
    • Korean Journal of Materials Research
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    • v.28 no.11
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    • pp.615-619
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    • 2018
  • To produce carbon electrodes for use in perovskite solar cells, electrode samples are prepared by mixing various weight ratios of 35 nm nano carbon(NC) and $1{\mu}m$ graphite flakes(GF), GF/(NC+GF) = 0, 0.5, 0.7, and 1, in chlorobenzene(CB) solvent with a $ZrO_2$ binder. The carbon electrodes are fabricated as glass/FTO/carbon electrode devices for microstructure characterization using transmission electron microscopy, optical microscopy, and a field emission scanning electron microscopy. The electrical characterization is performed with a four-point probe and a multi tester. The microstructure characterization shows that an electrode with excellent attachment to the substrate and no surface cracks at weight ratios above 0.5. The electrical characterization results show that the sheet resistance is <$70{\Omega}/sq$ and the interface resistance is <$70{\Omega}$ at weight ratios of 0.5 and 0.7. Therefore, a carbon paste electrode with microstructure and electrical properties similar to those of commercial carbon electrodes is proposed with an appropriate mixing ratio of NC and GF containing a CB solvent and $ZrO_2$.

Synthesis of Titanate Nanotubes Via A Hydrothermal Method and Their Photocatalytic Activities

  • Kim, Ye Eun;Byun, Mi Yeon;Lee, Kwan-Young;Lee, Man Sig
    • Clean Technology
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    • v.28 no.2
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    • pp.147-154
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    • 2022
  • Titanate nanotubes (TNTs) were synthesized via alkaline hydrothermal treatment using commercial TiO2 nanoparticles (P25). The TNTs were prepared at various TiO2/NaOH ratios, hydrothermal temperatures, and hydrothermal times. The synthesized catalysts were characterized by X-ray diffraction, field-emission scanning electron microscopy, N2 adsorption-desorption isotherms, field-emission transmission electron microscopy, and ultraviolet-visible spectroscopy. TNTs were generated upon a decrease in the TiO2/NaOH ratio due to the dissolution of TiO2 in the alkaline solution and the generation of new Ti-O-Ti bonds to form titanate nanoplates and nanotubes. The hydrothermal treatment temperature and time were important factors for promoting the nucleation and growth of TNTs. The TNT catalyst with the largest surface area (389.32 m2 g-1) was obtained with a TiO2/NaOH ratio of 0.25, a hydrothermal treatment temperature of 130 ℃, and a hydrothermal treatment time of 36 h. Additionally, we investigated the photocatalytic activity of methyl violet 2B (MV) over the TNT catalysts under UV irradiation and found that the degradation efficiencies of the TNTs were higher than that of P25. Among the TNT catalysts, the TNT catalyst that was hydrothermally synthesized for 36 h (TNT 36 h) exhibited a 96.9% degradation efficiency and a degradation rate constant that was 4.8 times higher than P25 due to its large surface area, which allowed for more contact between the MV molecules and TNT surfaces and facilitated rapid electron transfer. Finally, these results were correlated with the specific surface area.

Characterization of Au-MWNT nanocomposite in thin films (다중벽 탄소나노튜브와 금나노입자를 사용한 나노박막의 특성연구)

  • Kim, Jung-Soo;Bae, Jong-Seong;Ko, Chang-Hyun;Oh, Won-Tea
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.49-49
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    • 2009
  • Nanocomposites of gold nanoparticles and multi-walled carbon nanotubes (MWNTs) were prepared by electrostatic interaction. Gold nanopartic1es were stabilized by polyvinylpyrrolidone (PVP), sodium dodecyl sulfate (SDS) and poly(sodium-4-styrenesulfonate) (PSS) in aqueous medium, and MWNTs were modified by poly(diallyldimethylammonium)chloride (PDDA) in water. The as-perpared Au-MWNT nanocomposites were structurally and electrically characterized by transmission electron microscopy (TEM), field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), UV/Vis spectroscopy, X-ray photoelectron spectroscopy (XPS) and cyclo voltammetry (CV). UV/Vis spectra of Au-MWNT nanocomposites showed the characteristic surface plasmon bands in the range of ~515nm, depending on the stabilizers. There is only slight change on the band shape with variation of stabilizing agents for gold nanoparticles. Through FE-SEM and TEM images, the distribution of gold, nanoparticles on the sidewalls of MWNTs was deliberately investigated on Au-MWNT nanocomposites treated with different stabilizers. XPS and CV showed redistribution of electron densities and changes in the binding energy states of nanopartic1es in nanocomposite respectively.

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Effect of FTO coated on stainless steel bipolar plate for PEM fuel cells

  • Park, Ji-Hun;Jang, Won-Yeong;Byeon, Dong-Jin;Lee, Jung-Gi
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.05a
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    • pp.55.2-55.2
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    • 2009
  • A polymer electrolyte membrane (PEM) fuel cell has been getting large interest as a typical issue in useful applications. The PEMFC is composed of a membrane, catalyst and the bipolar plate. SnOx:F films on SUS316 stainless steel were prepared as a function of substrate with using electron cyclotron resonance-metal organic chemical vapor deposition (ECR-MOCVD) in order to achieve the corrosion-resistant and low contact resistance bipolar plates for PEM fuel cells. The SnOx:F films coated on SUS316 substrate at surface plasma treatment for excellent stability, before/after heat treatment for good crystalline structure and microwave power for were characterized by X-ray diffraction (XRD), auger electron microscopy (AES) and field emission-scanning electron microscopy (FE-SEM). The SnOx:F film coated on SUS316 substrate with various process parameters were able to observe optimum interfacial contact resistance (ICR) and corrosion resistance. It can be concluded that fluorine-doping content plays an important function in electrical property and characteristic of corrosion-protective film.

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Effects of electrochemical oxidation of carbon fibers on interfacial shear strength using a micro-bond method

  • Kim, Dong-Kyu;An, Kay-Hyeok;Bang, Yun Hyuk;Kwac, Lee-Ku;Oh, Sang-Yub;Kim, Byung-Joo
    • Carbon letters
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    • v.19
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    • pp.32-39
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    • 2016
  • In this work, we studied the effects of electrochemical oxidation treatments of carbon fibers (CFs) on interfacial adhesion between CF and epoxy resin with various current densities. The surface morphologies and properties of the CFs before and after electrochemical-oxidation-treatment were characterized using field emission scanning electron microscopy, atomic force microscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, and single-fiber contact angle. The mechanical interfacial shear strength of the CFs/epoxy matrix composites was investigated by using a micro-bond method. From the results, electrochemical oxidation treatment introduced oxygen functional groups and increased roughness on the fiber surface. The mechanical interfacial adhesion strength also showed higher values than that of an untreated CF-reinforced composite.

Preparation and Characterization of Ultra Thin TaN Films Prepared by RF Magnetron Sputtering

  • Reddy, Akepati Sivasankar;Jo, Hyeon-Cheol;Lee, Gi-Seon
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.10a
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    • pp.32.1-32.1
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    • 2011
  • Ultra thin tantalum nitride (TaNx) films with various thicknesses (10 nm to 40 nm) have been deposited by rf magnetron sputtering technique on glass substrates. The as deposited films were systematically characterized by several analytical techniques such as X-ray diffraction, X-ray photoelectron spectroscopy, field emission scanning electron microscopy, atomic force microscopy, UV-Vis-NIR double beam spectrophotometer and four point probe method. From the XRD results, the as deposited films are in amorphous nature, irrespective of the film thicknesses. The films composition was changed greatly with increasing the film thickness. SEM micrographs exhibited the densely pack microstructure, and homogeneous surface covered by small size grains at lower thickness deposited films. The surface roughness of the films was linearly increases with increasing the films thickness, consequently the transmittance decreased. The absorption edge was shifted towards higher wavelength as the film thickness increases.

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Improve the sintering property of copper inks. (구리 잉크의 소성 특성 향상)

  • Song, Young-Ah;Kim, Dong-Hun;Kim, Sung-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.66-66
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    • 2010
  • 잉크젯용 저온 Cu ink의 소성 특성을 향상 시키기 위해 소성 분위기롤 조절 하였다. 일반적으로 Cu는 산화가 잘되는 물질로 환원 분위기에서 소성이 이루어져야만 하기 때문에 acid, alcohol, aldehyde, ether와 같은 환원제를 소성시 사용하였다. 또한 1종의 환원제가 아닌 2종의 환원제롤 일정 비율로 섞음으로써 환원력를 조절하여 소성 품질을 향상 시킬 수 있었으며, 이러한 환원 분위기 조절을 통하여 300도 이하 저온에서 소성이 가능하였다. 또한 optical microscopy와 field emission scanning electron microscopy를 통해 막 품질과 미세조직의 치밀도를 확인하였고 배선 재료로써의 적용을 위해 resistance를 측정 비교하였다.

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