• 제목/요약/키워드: Exposure Device

검색결과 429건 처리시간 0.032초

HEMT 소자 공정 연구 (Part 1. 금속박막 형성을 위한 Lift-off 공정연구) (A Study on HEMT Device Process (Part I. Lift-off Process for the Metallization))

  • 이종람;박성호;김진섭;마동성
    • 대한전자공학회논문지
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    • 제26권10호
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    • pp.1535-1544
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    • 1989
  • The overhang structure of photoresist in optical lithography was studied for the metallization of GaAs-related devices throughout lift-off method. Optical contact aligner with a dose of 8.5 m J/cm\ulcornerand with a wavelength of 300mm was used for ultraviolet exposure of single layer of S1400-27 photoresist. The overhang thickness shows a linear relationship with the soaking time in monochlorobenzene, which its magnitude becomes high at elevated softbake temperature. Such process conditions as a low softbake temperature, a long monochlorohbenzene soaking time and a little exposed energy make the development rate of photoresist lower. The optimum process conditions to obtain a target line-width, which include an appropriate overhang structure such as complete separation between the sidewall of photoresist pattern and the deposited metal edge, are determined as the softbake temperature of 64-74\ulcornerC, the monochlorobenzene soaking time of 10-15min, the ultraviolet exposure time of 70-100sec and the development time of 50-80sec.

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LCD 표면의 렌즈 스캔 얼룩 검출 기법 (Detection of Lens Scan Alluk on LCD Surface)

  • 신지영;김정태
    • 대한전기학회논문지:시스템및제어부문D
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    • 제55권12호
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    • pp.547-549
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    • 2006
  • We have proposed a novel algorithm for detecting scan alluk on the surface of a TFT-LCD device that is generated by non-uniform exposure during fabrication. The scan alluk is known to have similar intensity values on paths that are determined by the shape of lens for light exposure. Based on the observation, the proposed algorithm inspects the uniformity on the paths using 1D projection image of 2D LCD image and 2D backprojection image of the 1D image. We have shown the usefullness of the proposed method by theoretical analysis and experimental results.

AsGeSeS 박막의 광학적 조건에 따른 저항변화 특성에 대한 연구

  • 남기현;정홍배
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.248-248
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    • 2010
  • We have demonstrated new functionalities of Ag-doped chalcogenide glasses based on their capabilities as solid electrolytes. The influence of silver on the properties of the newly formed materials is regarded in terms of diffusion kinetics, and Ag saturation is related to the composition of the hosting material. Silver saturated in chalcogenide glass has been used in the formation of solid electrolyte, which is the active medium in the programmable metallization cell (PMC) device. In this paper, we investigated the optical properties of Ag-doped chalcogenide thin film by He-Ne laser beam exposure, which is concerned with the Ag-doping effect of PMCs before or after annealing. Chalcogenide bulk glass was fabricated by a conventional melt quenching technique. Amorphous chalcogenide and Ag thin films were prepared by e-beam evaporation at a deposition rate of about $4\;{\AA}/sec$. As a result of resistance change with laser beam exposure, the resistance abruptly dropped from the initial value of $1.4\;M{\Omega}$ to the saturated value of $400\;{\Omega}$.

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동적 패턴 생성기를 이용한 3차원 미세 구조물의 경화특성 (Curing Characteristics for 3D Micro-structures Fabrication using Dynamic Pattern Generator)

  • 하영명;최재원;안대건;이석희;하창식
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.514-517
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    • 2005
  • Microstereolithography(MSL) has evolved from the stereolithography technique, and is also based on a light-induced layer-stacking fabrication. Although integral MSL allows the manufacture of a complete layer by one irradiation only, there is a problem related with shape precision due to the light-intensity distribution of focused image. In this study, we developed the integral MSL apparatus using Digital Micromirror Device ($DMD^{TM})$, Texas Instruments) as dynamic pattern generator. It is composed of Xenon-Mecury lamp, optical devices, pattern generator, precision stage, controllers and the control program. Also, we have studied curing depth and width of photocurable resin according to the change of exposure energy.

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Biological Monitoring of Human Exposure to Volatile Halogenated Hydrocarbons Using Urinalysis with Capillary GC-ECD

  • Jung, Won-Tae;Sohn, Dong-Hun
    • Archives of Pharmacal Research
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    • 제15권2호
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    • pp.109-114
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    • 1992
  • For the risk assessment of human exposure to volatile halogenated hydrocarbons, a dynamic purge trap/on-column cryofocusing method using capillary gas chromatograph-$^{63}Ni$ electron capture detector and thermal desorption unit was applied to analyze the free forms, metabolites of 1, 1, 2-trichloroethylene and 1, 1, 2, 2-tetrachloroethylene. The urine sample was diluted with distilled water, hydrolyzed and sealed. Then the inert gas was infused to purge out free 1, 1, 2-trichloroethylene, free 1, 1, 2, 2-tetrachloroethylene and urichloroethanol. These compounds were trapped to $Tenax^R$ / GC-gas trap device throughout clean up tube. Being undertectable to gas chromatograph directly, trichloroacetic acid was methyl esterificated and trapped in the manner above mentioned. The optimal incubation time to get best recovery of methyl ester was 4 hours at $60^circ$C. The concentrations of free volatile halogenated hydrocarbons and their metabolites in urine were obtained of free volatile halogenated hydrocarbons and their metabolites in urine were obtained from 5 healthy volunteers. This analytical method is expected to make the biological monitoring more precise and convenient.

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원형 접착 절연형의 복합 복층형 노출 방수제와 탈기관을 결합한 옥상 방수 공법에 관한 고찰 (A look at rooftop waterproofing methods that combine a circular adhesive insulated composite duplex exposure repellent with a airvent)

  • 김영석;전상훈
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2021년도 가을 학술논문 발표대회
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    • pp.236-237
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    • 2021
  • In the waterproofing of the rooftop of reinforced concrete buildings, it is difficult to solve perfectly according to the proficiency of waterproofing materials, methods, and mechanics. Therefore, this study applies a Tricot Fabric Mesh to the behavior of the bottom concrete. In addition, it responds to the behavior of the concrete cracking, and the waterproofing and protective layer has developed a method to provide convenience for rooftop floor use by adhesion between the base and the waterproof layer with the use of high viscosity urethane to effectively move the surface deformation and surface vapor and install a airvent device on the wall.

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일반촬영 자동노출제어장치 사용 시 잔존 CT 조영제와 MRI 조영제에 따른 면적선량의 상관성 연구 (A Study of The Correlation of The Area Dose with Residual CT Contrast Media and MRI Contrast Media during The Use of General Imaging Automatic Exposure Control System)

  • 홍찬우;박진훈;이정민;서영득
    • 한국방사선학회논문지
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    • 제10권8호
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    • pp.619-627
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    • 2016
  • 본 연구에서는 일반촬영에서 자동노출제어장치를 이용하여 검사할 때 체내에 잔존하는 CT 조영제와 MRI 조영제가 면적선량에 미치는 영향에 대해 알아보고자 한다. 복부 두께의 파라핀 팬텀 중앙에 사각형의 홀을 만든 후 CT 조영제, MRI 조영제를 각각 식염수 대 조영제 희석 비율, 10:0, 9:1, 8:2, 7:3, 6:4, 5:5, 4:6, 3:7, 2:8, 1:9, 0:10 %의 비율로 희석하였다. 각 실험은 KUB 촬영의 적정 조건인 78kVp, 320mA로 설정 후 자동노출제어장치를 이용하여 희석 비율 당 총 30회씩의 검사를 하였고, 각 조영제의 희석 비율에 따른 면적선량, 노출지수에 대해 평균 비교와 상관분석을 하였다. 그 결과, CT 조영제와 MRI 조영제는 희석 비율에 따라 면적선량이 다르게 나타났고(p<0.05), 희석 비율이 증가함에 따라 CT 조영제와 MRI 조영제는 면적선량이 증가하는 것으로 나타났다(p<0.05). 각 검사에서 노출지수는 제조사 권고 사항인 200-800 EI값을 나타냈으며, 노출지수와 면적선량은 면적선량이 증가할수록 노출지수도 증가하였다(p<0.05). 결론적으로 CT 조영제와 MRI 조영제는 모두 자동노출제어장치를 사용하는 일반촬영 검사에서 면적선량을 증가시키는 것을 확인하였다. 따라서 CT와 MRI 검사에서 조영제를 사용한 후 일반촬영 검사를 할 때에는 조영제가 충분히 배설된 후 시행하여야 할 것으로 사료된다.

관심 영역 기반의 자동 노출 조절 알고리즘을 적용한 다중 노출 차량용 스마트 카메라의 설계 및 구현 (Design and Implementation of Multi Exposure Smart Vehicular Camera Applying Auto Exposure Control Algorithm Based on Region of Interest)

  • 전용수;박희진;윤영섭;백윤주
    • 한국통신학회논문지
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    • 제42권1호
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    • pp.181-192
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    • 2017
  • 최근 첨단 운전자 보조 시스템에 대한 활발한 연구가 이루어지고 있으며 특히 도로 영상을 활용한 도로 상황 분석에 대한 연구가 활발히 진행되고 있다. 도로 상황 분석 성능을 높이기 위해 좋은 품질의 영상이 필요하고, 이를 위해 적절한 노출 시간으로 영상을 획득할 필요가 있다. 본 논문에서는 온보드 카메라와 다양한 센서들로 주변의 정보를 습득하고 분석하여 운전자에게 정보를 제공해 줄 수 있는 다중 노출 차량용 스마트 카메라를 설계 및 구현하였다. 그리고 도로 환경에 적합한 자동 노출 조절 알고리즘을 고안하여 영상 처리 성능을 높이고자 하였다. 추가적으로 임베디드 장치의 제한된 계산 성능을 보완할 뿐만 아니라 영상 분석의 성능을 더 높일 수 있는 기존 관심 영역 기법을 응용한 관심 영역 전환 기법에 대한 연구를 수행하였다. 제안한 다중 노출 차량용 스마트 카메라의 프로토타입을 구현하여 실제 도로 환경에서 노출 조절 알고리즘과 관심 영역 전환 기법의 성능을 평가하였으며 실험을 통해 제안하는 노출 조절 알고리즘과 관심 영역 전환 기법을 사용하였을 때, 영상 인식의 정확도가 평균 13.45% 증가함을 확인하였다.

GPS를 이용한 택배서비스업 근로자의 미세먼지 노출 평가 (Exposure Assessment of Particulate Matter among Door-to-door Deliverers Using GPS Devices)

  • 이가현;김승원
    • 한국산업보건학회지
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    • 제27권1호
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    • pp.13-22
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    • 2017
  • Objectives: The objective of this study was to evaluate the exposure levels of door-to-door deliverers to fine particulate matter (PM2.5). Another objective was to confirm the general working patterns of door-to-door deliverers via survey. Methods: In the city of Daegu, ten door-to-door deliverers who wished to join the study were recruited. The general working characteristics of door-to-door deliverers were surveyed using self-reported questionnaires. In the cabin of each car driven by a deliverer, a real-time PM2.5 sampler (Sidepak, Model AM510, TSI Inc., MN, USA) and a GPS device (GPS 741, Ascen, Korea) were installed. Each deliverer was monitored for four days per week so that each day could be monitored at least four times. Results: A total of 40 measurements of PM2.5 concentrations were taken during delivery of parcels. The average exposure levels of door-to-door deliverers to PM2.5 was $44.62{\mu}g/m^3$ ($7-9443{\mu}g/m^3$. Exposure levels to PM2.5 according to the day of the week and coverage areas were not significantly different (p>0.05). Door-to-door deliverers using trucks with older diesel engines manufactured before 2006 had significantly higher exposure levels to PM2.5 than in the case of trucks with diesel engines manufactured after 2006 (p<0.05). Many of the door-to-door deliverers reported the status of having windows open during the delivery task. During delivery services, the working hours spent in residential areas were higher than on roadsides, but exposure levels to PM2.5 in residential areas and on roadsides were $46.17{\mu}g/m^3$ and $49.90{\mu}g/m^3$, respectively. Real-time PM2.5 exposure levels were significantly different between roadways and residential areas (p<0.001). Conclusions: PM2.5 exposure levels of door-to-door deliverers were found to be affected by higher vehicle emissions from the roadsides near their vehicle during deliveries and while driving to other locations compared to by PM2.5 from the diesel engines of their own trucks. Particle concentrations from roadsides and emissions from nearby vehicles through open windows were the main source of PM2.5.

광조형 공정시 휨에 의한 변형을 개선하기 위한 역설계 시스템의 적용 (Application of Reverse Engineering System for Improvement of Curl Distortion in Stereolithography Process)

  • 제우성
    • 반도체디스플레이기술학회지
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    • 제8권4호
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    • pp.7-13
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    • 2009
  • The slender device(long length and thin width) manufactured by stereolithography process suffers from large curl distortion. This paper adapts two control parameters such as a critical exposure and a penetration depth. The measurement of the test parts dimension are carried out by reverse engineering method with the optical 3-dimensional measurement equipment. We investigate how each parameter contributes to the part accuracy and estimates the optimal set of parameters which minimizes the dimensional error of the test parts. Finally, As being an the RAM slot as being an example of the slender device, the RAM slot is made with the optimal values of control parameter and the results are investigated

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