• 전자공학회논문지A
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• 제31A권12호
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• pp.115-121
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• 1994

Aluminum films were chemically vapor deposited for the metallization of the integrated circuits and the spiking characteristics of the direct CVD Al/Si contacts were investigated. When the aluminum was formed by CVD uniform consumption of the substrate silicon was observed, which is quite different from the phenomena observed in sprttered Al. Silicon consumption occured during the deposition of CVD Al and the erosion depth of the silicon was several hundred $\AA$ when the continuous films were formed on the substrate while much less erosion of the silicon occured when the Al were formed in islands. When the submicron contacts were selectively plugged, contact resistances were very low and the erosion depth of the silicon was trivial.

• Transactions on Electrical and Electronic Materials
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• 제5권1호
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• pp.11-14
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• 2004

An rf triode magnetron sputtering system is designed and installed its construction in vacuum chamber. In order to calibrate the rf triode magnetron sputtering for thin films deposition processes, the effects of different glow discharge conditions were investigated in terms of the deposition rate measurements. The basic parameters for calibrating experiment in this sputtering system are rf power input, gas pressure, plasma current, and target-to-substrate distance. Because a knowledge of the deposition rate is necessary to control film thickness and to evaluate optimal conditions which are an important consideration in preparing better thin films, the deposition rates of copper as a testing material under the various sputtering conditions are investigated. Furthermore, a triode sputtering system designed in our team is simulated by the SIMION program. As a result, it is sure that the simulation of electron trajectories in the sputtering system is confined directly above the target surface by the force of E${\times}$B field. Finally, some teats with the above 4 different sputtering conditions demonstrate that the deposition rate of rf triode magnetron sputtering is relatively higher than that of the conventional sputtering system. This means that the higher deposition rate is probably caused by a high ion density in the triode and magnetron system. The erosion area of target surface bombarded by Ar ion is sputtered widely on the whole target except on both magnet sides. Therefore, the designed rf triode magnetron sputtering is a powerful deposition system.

• 한국항해항만학회지
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• 제43권1호
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• pp.64-71
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• 2019

낙동강 하구의 지형변화 메커니즘을 파악하는 것은 하구의 관리방안과 처리방법 연구에 매우 중요하다. 본 연구에서는 낙동강 하구의 지형변화에 관여하는 강우, 하천유량, 유사량과 같은 육역으로부터 영향과 조석, 조류, 파랑, 표층퇴적물 등과 같은 해역으로부터의 영향을 조사 분석하였다. 분석된 자료에 근거하여 지형변화 실험을 수행하고, 지형변화와 외력조건별 기여도를 분석하였다. 수치실험 결과 지형변화는 하굿둑 방류 영향을 직접적으로 받는 수로부를 중심으로 침식이, 간접 영향권인 간석지를 중심으로 퇴적이 우세하게 나타났다. 수로부를 따라 이동되는 퇴적물이 파랑에 의해 분급, 배분되면서 울타리선 전면부에는 퇴적이 우세하였다. 지형변화 실험결과인 퇴적 우세현상과 비교하여, 외력조건별로 침식의 기여도가 크게 나타나고 있으나 각 외력조건의 복합적인 영향은 퇴적이 우세하게 나타나고 있다. 따라서, 낙동강 하구의 지형변화는 여러 복합적인 외력인자의 결과로 판단된다. 또한, 각 외력조건별 영향은 구역별로 상이한 기여도를 보이므로 하구관리방안 수립시 이러한 결과를 고려해야 하고, 반드시 복합적인 상호작용의 결과로 이해하고 있어야 할 것으로 사료된다.

• 한국재료학회지
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• 제28권2호
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• pp.75-81
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• 2018

An ultra-high temperature ceramic, tantalum carbide, has received much attention for its favorable characteristics: a superior melting point and chemical compatibility with carbon and other carbides. One drawback is the high temperature erosion of carbon/carbon (C/C) composites. To address this drawback, we deposited TaC on C/C with silicon carbide as an intermediate layer. Prior to the TaC deposition, the $TaCl_5-C_3H_6-H_2$ system was thermodynamically analyzed with FactSage 6.2 and compared with the $TaCl_5-CH_4-H_2$ system. The results confirmed that the $TaCl_5-C_3H_6-H_2$ system had a more realistic cost and deposition efficiency than $TaCl_5-CH_4-H_2$. A dense and uniform TaC layer was successfully deposited under conditions of Ta/C = 0.5, $1200^{\circ}C$ and 100 torr. This study verified that the thermodynamic analysis is appropriate as a guide and prerequisite for carbide deposition.

• 한국토양비료학회지
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• 제41권4호
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• pp.235-238
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• 2008

토양침식을 예측하는 WEPP(Water Erosion Prediction Project)모델은 연방 정부기관이 토양과 물 보전 및 환경을 계획하고 평가하는데 활용하고자 1985년 8월 차세대 물에 의한 토양침식을 예측하기 위해 만들어졌다. 미농무성 농업연구소에 의해 개발된 WEPP 모델은 경험적인 침식 예측을 위한 도구로써 침투, 유거수, 강우와 물에 의한 토양입자의 분리, 침전물의 이동, 퇴적, 작물의 생장 및 수확 후 잔여물의 분해 등을 포함한 토양 침식과 관련된 많은 중요한 물리적 과정을 모의한다. WEPP 모델은 모델을 구성하는 모듈의 입력자료와 모델을 시험하기 위해서 필요한 자료를 경작지, 초지, 산림 등 광대한 현장 실험 결과들로부터 얻었다. 미국내 여러 농업연구소와 협력 대학 등 수 많은 연구소의 큰 노력으로 모델을 만들 수 있었다. WEPP 모델은 경사지 혹은 작은 유역 규모에 적용이 가능하며, 물리적 모델이기 때문에 미국과 다른 여러 나라에서 중요한 자연자원을 효과적으로 평가할 수 있다. 최근 들어 DOS프로그램으로 만들어진 초기 WEPP모델을 윈도우 인터페이스와 GIS프로그램을 통합하여 향상시켰다. 또한, 바람과 물에 의한 침식을 통합 예측하는 시스템을 쉽게 이용할 수 있도록 구축 중에 있다.

• Fisheries and Aquatic Sciences
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• 제13권2호
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• pp.167-181
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• 2010

To predict changes in the marine environment of the Beolgyo Stream Estuary in Jeonnam Province, South Korea, where cohesive tidal flats cover a broad area and a large bridge is under construction, this study conducted numerical simulations involving tidal flow and cohesive sediment transport. A wetting and drying (WAD) technique for tidal flats from the Princeton Ocean Model (POM) was applied to a large-scale-grid hydrodynamic module capable of evaluating the flow resistance of structures. Derivation of the eddy viscosity coefficient for wakes created by structures was accomplished through the explicit use of shear velocity and Chezy's average velocity. Furthermore, various field observations, including of tide, tidal flow, suspended sediment concentrations, bottom sediments, and water depth, were performed to verify the model and obtain input data for it. In particular, geologic parameters related to the evaluation of settling velocity and critical shear stresses for erosion and deposition were observed, and numerical tests for the representation of suspended sediment concentrations were performed to determine proper values for the empirical coefficients in the sediment transport module. According to the simulation results, the velocity variation was particularly prominent around the piers in the tidal channel. Erosion occurred mainly along the tidal channels near the piers, where bridge structures reduced the flow cross section, creating strong flow. In contrast, in the rear area of the structure, where the flow was relatively weak due to the formation of eddies, deposition and moderated erosion were predicted. In estuaries and coastal waters, changes in the flow environment caused by artificial structures can produce changes in the sedimentary environment, which in turn can affect the local marine ecosystem. The numerical model proposed in this study will enable systematic prediction of changes to flow and sedimentary environments caused by the construction of artificial structures.

• 한국항만학회지
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• 제14권4호
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• pp.451-461
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• 2000

The design and maintenance of navigation channel and water facilities of an harbor which is located at the mouth of river or at the estuary area are difficult due to the complexity of estuarial water and sediment circulation. Effects of deepening navigable waterways, of changing coastline configurations, or of discharging dredged material to the open sea are necessary to be investigated and predicted in terms of water quality and possible physical changes to the coastal environment. A borad analysis of the transport mechanism in the estuary area was made in terms of sediment property, falling velocity, concentration and flow characteristics. In order to simulate the transport processes, a two-dimensional finite element model is developed, which includes erosion, transport and deposition mechanism of suspended sediments. Galerkin’s weighted residual method is used to solve the transient convection-diffusion equation. The fluid domain is subdivided into a series of triangular elements in which a quadratic approximation is made for suspended sediment concentration. Model could deal with a continuous aggregation by stipulating the settling velocity of the flocs in each element. The model provides suspended sediment concentration, bed shear stress, erosion versus deposition rate and bed profile at the given time step.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2005년도 제28회 학술발표회 초록집
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• pp.76-76
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• 2005

• 한국측량학회지
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• 제34권3호
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• pp.309-317
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• 2016

토석류는 태풍이나 집중호우 등에 의해 산사태가 일어나 토석이 물과 함께 하류로 밀려 떠내려가는 현상을 의미한다. 특히 우리나라는 지형학적 특성상 전체 국토의 약 70%가 산지로 구성되어 있고 매년 6~8월 집중적으로 태풍이나 집중호우가 발생하여 이 시기에 발생한 산사태 및 대규모 토석류로 인한 인명피해는 전체 재난 사망자의 약 20%에 이르고 있다. 따라서 이러한 토석류의 발생 규모를 예측하기 위한 핵심적인 부분은 복잡한 3차원 지형에서의 토석류 거동, 침식 및 퇴적 메커니즘을 이해하여야 한다. 본 연구에서는 강원도 평창군의 실제 규모 토석류 실험 전후에 나타난 지형적인 변화 및 변화가 발생한 지역에서의 지형학적 특성 등의 정량적 변화 분석 등을 수행하였으며, 이를 위해 발생 전후의 정량적 변화를 관측할 수 있는 GSD 10cm LiDAR DEM 데이터를 조사에 활용하였다.

• 한국연안방재학회지
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• 제5권4호
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• pp.183-192
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• 2018

In recent years, coastal areas have been suffering from coastal erosion, such as destruction of coastal roads and military facilities. In this study, the Delft3D model was used to analyze the sediment transport pattern due to seasonal characteristics of summer and winter waves in Anmok beach of the East coast. Typhoon and high waves are mainly are coming from ENE direction in the summer season and the flows occur in the northward. In winter, high waves are incident from NE and the flows occur in the southward. These seasonal patterns were simulated by using Delft3D model. As for model input, reanalysis wave data of the past 38 years were used, and the seasonal patterns were analyzed by dividing the whole year into summer and winter season. The grid point of the 38 year reanalysis data is far from the Anmok beach, so the three model grid systems (wide grid -> intermediate grid -> detailed grid) are constructed. Most of the flows in the NW direction occurred in summer, but erosion and deposition was alternated along the coastline. In winter, sediment was deposited near Gangnung Port due to the southern flow and the southern port. Strong winter waves compared to summer tend to cause deposition around Gangnung Port throughout the year.