• Journal of Power System Engineering
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• v.5 no.2
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• pp.36-42
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• 2001

This paper deals with finite element analyses of residual stresses causing popping up which are induced in micromachining processes of a microaccelerometer sensors. The paddle of the micro accelerometer sensor is designed symmetric with respect to the direction of the beam. After heating the tunnel gap up to 100 degree and get it through the cooling process and the additional beam up to 80 degree and get it through the cooling process. We learn the thermal internal stresses of each shape and compare the results with each other, after heating the tunnel gap up to 400 degree during the Pt deposition process. Finally we find the optimal shape which is able to minimize the internal stresses of microaccelerometer sensor. We want to seek after the real cause of this pop up phenomenon and diminish this by change manufacturing processes of microaccelerometer sensor by electrostatic force.

• Journal of the Korean Ceramic Society
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• v.20 no.1
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• pp.70-78
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• 1983

This paper discusses the application of Si-Borosilicate glass sealing to a new sealing method which utilizes a large electrostatic field to pormote bound formation at relatively low temperature. Bonding mechanism and the effect of bonding time bonding temperature glass thickness and surface roughness on the bond strength were investigated. Application of a de voltage across bonded specimen gradually produced a layer of glass adjacent silicon which was depleted of mobile ions. As a consequence a n increasingly larger fraction of the applied voltage appeared across the depleted region and very large electric field resulted This field accompanyed by large electrostatic force acted as driving force the of strong bond. And stronger bond was formed with increasing bonding time and temperature. A low temperature preoxidation is advantageous for the Si surface having a rougher surface finish that 1 microinch.

• Structural Engineering and Mechanics
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• v.76 no.5
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• pp.619-629
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• 2020

In current study, surface/interface effects for pull-in voltage and viscous fluid velocity effects on dimensionless natural frequency (DNF) of fluid-conveying piezoelectric nanosensor (FCPENS) subjected to direct electrostatic voltage DC with nonlinear excitation, harmonic force and also viscoelastic foundation (visco-pasternak medium and structural damping) are investigated using Gurtin-Murdoch surface/interface (GMSIT) theory. For this analysis, Hamilton's principles, the assumed mode method combined with Lagrange-Euler's are used for the governing equations and boundary conditions. The effects of surface/interface parameters of FCPENS such as Lame's constants (λI,S, μI,S), residual stress (τ0I,S), piezoelectric constants (e31psk,e32psk) and mass density (ρI,S) are considered for analysis of dimensionless natural frequency respect to viscous fluid velocity u̅f and pull-in voltage V̅DC.

• Proceedings of the Korean Fiber Society Conference
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• 2007.11a
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• pp.10-12
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• 2007

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• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.755-756
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• 2012

• Proceedings of the Materials Research Society of Korea Conference
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• 1999.05a
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• pp.44-44
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• 1999

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.246-250
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• 2003

In this study, two new types of micro-grippers in which micro-fingers are actuated by piezoelectric multi-layer benders and stacks are introduced for the manipulation of micrometer-sized objects. First, we constructed a 3-chopstick-mechanism tungsten gripper, which is composed of three chopsticks: two are designed to grip micro-objects, and tile third is used to help grasp and release the objects through overcoming especially electrostatic force among some surface effects including electrostatic, van der Waals forces and surface tension. Second, a 2-chopstick-mechanism silicon micro-gripper that uses an integrated force sensor to control the gripping force was developed. The micro-gripper is composed of a piezoelectric multilayer bender for actuating the gripper fingers, silicon fingertips fabricated by use of silicon-based micromachining, and supplementary supports. The micro-gripper is referred to as a hybrid-type micro-gripper because it is composed of two main components; micro-fingertips fabricated using micromachining technology to integrate a very sensitive force sensor for measuring the gripping force, and piezoelectric gripper finger actuators that are capable of large gripping forces and moving strokes. The gripping force signal was found to have a sensitivity of 667 N/V. To the design of each of components of both of the grippers. a systematic design approach was applied, which made it possible to establish the functional requirements and design parameters of the micro-grippers. The micro-grippers were installed on a manual manipulator to assess its performance in tasks such as moving micro-objects from one position to a desired position. The experiment showed that the micro-grippers function effectively.

• Journal of Mechanical Science and Technology
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• v.17 no.10
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• pp.1485-1495
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• 2003

We investigate the triboelectrostatic separation of polyvinylchloride (PVC) from mixed plastics in the laboratory scale triboelectrostatic separation system. The flow and electric fields in the precipitator are obtained from the numerical solution of finite volume method. Using these flow and electric fields, we solved the particle motion equation considering the inertia, drag, gravity and electrostatic forces acted on the particles. The particle trajectories are obtained using a Lagrangian method as a function of different important variables such as Reynolds number, Stokes number, electrostatic force, electric charge and electric field distribution, inclined angle of plane electrodes, particle rebounding, particle charge decay rate after impact on the electrode surface, etc., in order to determine the optimal design conditions. The present predicted results for the cumulative yield represent well the experimental ones.

• 제어로봇시스템학회:학술대회논문집
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• 1988.10b
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• pp.964-968
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• 1988

In mechanical systems in which the dynamics of armatures is dominated by electrostatic forces, motions will generally be unstable. This paper deals with the control problems of this kind of micro electrostatic device systems. In these systems, the mass of micro mechanical parts is so small that the inertia term in the equation of motion is negligible. However, nonlinear terms, such as friction and driving force, become dominant. The purpose of this paper is to realize the stable motion without delay and, overshoot etc. A micro-mechanical system used in this paper consists of a plane wafer with striped electrodes converted with an insulation layer and thin cylindrical roller is placed over on it. The performance of motions is confirmed by some simulations.

• Journal of the Korean Society of Industry Convergence
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• v.7 no.1
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• pp.115-120
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• 2004

An indoor air cleaner consisting of a dielectric barrier discharge system and an electrostatic precipitator (ESP) was experimentally investigated. The function of the dielectric barrier discharge is to precharge particles by producing nonthermal plasma before indoor air enters ESP, leading to an enhancement in dust collection efficiency. The dependence of particle size distribution on the plasma discharge was examined to understand the mechanism of the particle precharging. The plasma discharge was found to increase the electrical force of the particles, rather than agglomerate them. Coarse particles in the range of 0.5 to $5.0{\mu}m$ were observed to be easily collected by this indoor air cleaner, and the present study laid emphasis on the removal of fine particles of $0.3{\mu}m$. The collection efficiency of the fine particles was largely enhanced by the plasma discharge.