Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2012.04a
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- Pages.755-756
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- 2012
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- 1598-2548(pISSN)
Vibration Analysis of MEMS Accelerometer Undertaking Electrostatic Force
정전기력을 고려한 MEMS 가속도계 진동해석
- Published : 2012.04.26
Abstract
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