• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.546-546
• /
• 2008

Copper (Cu) Chemical mechanical polishing (CMP) has been an essential process for Cu wifing of DRAM and NAND flash memory beyond 45nm. Copper has been employed as ideal material for interconnect and metal line due to the low resistivity and high resistant to electro-migration. Damascene process is currently used in conjunction with CMP in the fabrication of multi-level copper interconnects for advanced logic and memory devices. Cu CMP involves removal of material by the combination of chemical and mechanical action. Chemicals in slurry aid in material removal by modifying the surface film while abrasion between the particles, pad, and the modified film facilitates mechanical removal. In our research, we emphasized on the role of chemical effect of slurry on Cu CMP, especially on the effect of amine functional group on removal rate selectivity between Cu and Tantalum-nitride (TaN) film. We investigated the two different kinds of complexing agent both with amine functional group. On the one hand, Polyacrylamide as a polymer affected the stability of abrasive, viscosity of slurry and the corrosion current of copper film especially at high concentration. At higher concentration, the aggregation of abrasive particles was suppressed by the steric effect of PAM, thus showed higher fraction of small particle distribution. It also showed a fluctuation behavior of the viscosity of slurry at high shear rate due to transformation of polymer chain. Also, because of forming thick passivation layer on the surface of Cu film, the diffusion of oxidant to the Cu surface was inhibited; therefore, the corrosion current with 0.7wt% PAM was smaller than that without PAM. the polishing rate of Cu film slightly increased up to 0.3wt%, then decreased with increasing of PAM concentration. On the contrary, the polishing rate of TaN film was strongly suppressed and saturated with increasing of PAM concentration at 0.3wt%. We also studied the electrostatic interaction between abrasive particle and Cu/TaN film with different PAM concentration. On the other hand, amino-methyl-propanol (AMP) as a single molecule does not affect the stability, rheological and corrosion behavior of the slurry as the polymer PAM. The polishing behavior of TaN film and selectivity with AMP appeared the similar trend to the slurry with PAM. The polishing behavior of Cu film with AMP, however, was quite different with that of PAM. We assume this difference was originated from different compactness of surface passivation layer on the Cu film under the same concentration due to the different molecular weight of PAM and AMP.

• Journal of the Korean Institute of Gas
• /
• v.21 no.2
• /
• pp.32-40
• /
• 2017

Safety Instrumented Systems (SIS) have wide application area. They are of vital importance at process plants to detect the onset of hazardous events, for instance, a release of some hazardous material, and for mitigating their consequences to humans, material assets, and the environment. The integrated safety systems, where electrical, electronic, and/or programmable electronic (E/E/PE) devices interact with mechanical, pneumatic, and hydraulic systems are governed by international safety standards like IEC 61508. IEC 61508 organises its requirements according to a Safety Life Cycle (SLC). Fulfilling these requirements following the SLC can be complex without the aid of SIS supporting tools. This paper presents simple SIS support tool which can greatly help the user to implement the design phase of the safety lifecycle. This tool is modelled in the form of Android application which can be integrated with a Web-based data reading and modifying system. This tool can reduce the computation time spent on the design phase of the SLC and reduce the possible errors which can arise in the process. In addition, this paper presents an optimization approach to SISs based on cost measures. The multi-objective genetic algorithm has been used for the optimization to search for the best combinations of solutions without enumeration of all the solution space.

• The Journal of the Korea institute of electronic communication sciences
• /
• v.6 no.5
• /
• pp.673-681
• /
• 2011

Among the network information services combined with a number of security technologies and required security policies, Infrastructure as a Service, a hardware plat-form service of Cloud Computing, has been provided since 2011. It is more or less similar to the existing central concentration method services, in terms of the specifications and technical aspects for given hardware category, but it is entirely different from them in that it overcomes the spatial limitations of specific network and targets the public network. Information security technology has also been prospering so that it could ensure the stability of offered hardware plat-forms. As currently supported hardware, Internet Data Center has been provided by virtualizing the previously offered servers and discs (backup discs), but the hardware plat-forms offered are somewhat limited. Meanwhile, the areas of security fields for offered services are confined to the center or include the TCP/IP-based SSL (Secure Sockets Layer) for the public network connected with clients, which shows that microscopic access security policies have been used. Therefore, this study was aimed to provide a realistic security mechanism for realizing defense policy, by expanding service areas into security devices and suggesting Diskless and Stateless security policy based high-speed synchronous network infrastructure.

• The Journal of the Korea institute of electronic communication sciences
• /
• v.8 no.7
• /
• pp.1017-1023
• /
• 2013

Datacommunications transmit the source codes that are coded in information devices, such as computer to the transmission line by means of the line coded signal. AMI method is applied to the line coding method to transmit the signal for long distance. The disadvantage of the AMI method is to loss the bit synchronization when consecutive binary bit '0' over 4ea is coming into line coder. The scrambling technique is used to overcome the problem. The HDB-3 scrambling method is used in Korea standard which standard in ITU-T. When the HDB-3 technology is used. the method should convert the consecutive bit '0' over 4ea to certain bits format. As a result, when there are many such kind of '0' bit stream in source codes, data transmission efficiency will be decreased to treat in line coder, etc. This paper is directed to study the Roman character code system in $KS{\times}1001$, Korea standard for information exchange code in datacommunication systems. Based on the study result, this paper proposed the maximum optimized Roman character code system. In the study, Character coding rule for $4{\times}4$bits and the statistical data for roman character using frequency were considered to simulate. The paper shows the result that when the proposed new roman character coding system is applied to use, the data transmission efficiency could be increased to about 134% compared to existing code system.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.25 no.10
• /
• pp.805-810
• /
• 2012

Transparent conducting oxides (TCOs) have wide range of application areas in transparent electrode for display devices, Transparent coating for solar energy heat mirrors, and electromagnetic wave shield. $SnO_2$ is intrinsically an n-type semiconductor due to oxygen deficiencies and has a high energy-band gap more than 3.5 eV. It is known as a transparent conducting oxide because of its low resistivity of $10^{-3}{\Omega}{\cdot}cm$ and high transmittance over 90% in visible region. In this study, co-doping effects of Al and Y on the properties of $SnO_2$ were investigated. The addition of Y in $SnO_2$ was tried to create oxygen vacancies that increase the diffusivity of oxygen ions for the densification of $SnO_2$. The addition of Al was expected to increase the electron concentration. Once, we observed solubility limit of $SnO_2$ single-doped with Al and Y. $\{(x/2)Al_2O_3+(x/2)Y_2O_3\}-SnO_2$ was used for the source of Al and Y to prevent the evaporation of $Al_2O_3$ and for the charge compensation. And we observed the valence changes of aluminium oxide because generally reported of valence changes of aluminium oxide in Tin - Aluminium binary system. The electrical properties, solubility limit, densification and microstructure of $SnO_2$ co-doped with Al and Y will be discussed.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.10 no.11
• /
• pp.1960-1972
• /
• 2006

In this thesis, GPS and the electronic mapping were used to realize such a system by recognizing license plate numbers and identifying the location of objects that move at synchronous times with simulated movement in the electronic map. As well, throughout the study, a camera attached to a PDA, one of the mobile devices, automatically recognized and confirmed acquired license plate numbers from the front and back of each cu. Using this mobile technique in a wireless network searches for specific plate numbers and information about the location of the car is transmitted to a remote sewer. The use of such a GPS-based system allows for the measurement of topography and the effective acquisition of a car's location. The information is then transmitted to a central controlling center and stored as text to be reproduced later in the form of diagrams. Getting positional information through GPS and using image-processing with a PDA makes it possible to estimate the correct information of a car's location and to transmit the specific information of the car to a control center simultaneously, so that the center will get information such as type of the cu, possibility of the defects that a car might have, and possibly to offer help with those functions. Such information can establish a mobile system that can recognize and accurately trace the location of cars.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2010.05a
• /
• pp.609-611
• /
• 2010

IPTV(Internet Protocol Television)is the point in commercial and broadcast content from the numerous channels that are growing exponentially, Many people with mobile devices anywhere, anytime you want to use IPTV, demand will increase. Numerous channels for collecting information about EPG (Electronic Program Guide) service, IP (Internet Protoco) communications using a fast search of content for broadcast EPG is time to take advantage of the service. Using the current wired network, the Android-based IPTV services to take advantage of the EPG in the mobile environment to provide an environment being studied, and Country of the European digital broadcast standard DVB-MHP standard is followed by subsequent research and development of the EPG service is required. In this study, using the existing wired network, IPTV EPG service information of the channel in a mobile environment user-friendly as possible by providing channels for EPG service information to users quickly and easily search for content to provide an environment and Android-based mobile IPTV environment to take advantage of the EPG service channels of broadcast channels with in the EPG service for users to gather information retrieval system is proposed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2007.06a
• /
• pp.41-41
• /
• 2007

For use in spintronic materials, dilute magnetic semiconductors (DMS) are under consideration as spin injectors for spintronic devices[l]. $TiO_2$-based DMS doped by a cobalt, iron, and manganese et al. was recently reported to show ferromagnetic properties, even at temperatures above 300K and the magnetic ordering was explained in terms of carrier-induced ferromagnetism, as observed for a III-V based DMS. An anomalous Hall effect (AHE) and co-occurance of superparamagnetism in reduced Co-doped rutile $TiO_{2-\delta}$ films have also been reported[2]. Metal segregation in the reduced metal-doped rutile $TiO_2-\delta$ films still remains as problems to solve the intrinsic DMS properties. Superlattice films have been proposed to get dilute magnetic semiconductor (DMS) with intrinsicroom-temperature ferromagnetism. For a $TiO_2$-based DMS superlattice structure, each layer was alternately doped by two different transition metals (Fe and Mn) and deposited to a thickness of approximately $2.7\;{\AA}$ on r-$Al_2O_3$(1102) substrates by pulsed laser deposition. The r-$Al_2O_3$(1102) substrates with atomic steps and terrace surface were obtained by thermal annealing. Samples of $Ti_{0.94}Fe_{0.06}O_2$(TiFeO), $Ti_{0.94}Mn_{0.06}O_2$(TiMnO), and $Ti_{0.94}(Fe_{0.03}Mn_{0.03})O_2$ show a low remanent magnetization and coercive field, as well as superparamagnetic features at room temperature. On the other hand, superlattice films (TiFeO/TiMnO) show a high remanent magnetization and coercive field. An anomalous Hall effect in superlattice films exhibits hysisteresis loops with coercivities corresponding to those in the ferromagnetic Hysteresis loops. The superlattice films composed of alternating layers of $Ti_{0.94}Fe_{0.06}O_2$ and $Ti_{0.94}Mn_{0.06}O_2$ exhibit intrinsic ferromagnetic properties for dilute magnetic semiconductor applications.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.19 no.2
• /
• pp.272-278
• /
• 2015

This paper analyzed interference impact between wireless headset and Wireless Fidelity which get a high possibility of simultaneously operating in the Industry Science Medical(ISM) bands. Analysis methods of Minimum Coupling Loss(MCL) and Monte Carlo(MC) were applied by using the characters and parameters referenced to Institute of Electrical and Electronic Engineers(IEEE) 802.11b. The protection distance between interferer (WiFi transmitter) and victim (Wireless headset receiver) was calculated through the MCL. The protection distance was obtained for the case of single interferer, and the maximum allowable number of multiple interferers was computed according to the cell radius of a victim system to meet 5 % below of interference probability by using a statistical analysis based on the MC method. The analysis results are expected to be used as a guideline to coexist the wireless headset and low power devices in the ISM band.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2004.07a
• /
• pp.138-141
• /
• 2004

[ $MnO_2$ ]가 첨가된 $0.9Pb(Zr_{0.5}Ti_{0.5})O_3-0.2Pb[(Zn_{0.8}Ni_{0.2})_{1/3}Nb_{2/3}]O_3$(0.8PZT-0.2PZNN) 세라믹스는 그 압전특성과 유전특성이 뛰어나지만 $1000^{\circ}C$ 이하의 낮은 소결 온도에서는 소결되지 않는다. $1000^{\circ}C$이하의 낮은 소결온도에서 소결하기 위해 CuO를 첨가한 결과, 소결온도 $920^{\circ}C$에서 소결성은 우수하였으나 그 압전 특성의 저하가 두드러졌다. 이는 XRD에서 확인한 결과에 따르면 CuO의 첨가가 우수한 MPB 조성으로 판명된 $MnO_2$ 가 첨가된 0.8PZT-0.2PZNN 세라믹스의 결정구조를 Rhombohedral 구조로 바꾸기 때문인 것으로 보였으며 이러한 문제는 PZNN의 비율을 조절하여 0.875PZT-0.125PZNN 세라믹스를 선택함으로 인해 해결할 수 있었다. 그러나 여전히 낮은 $Q_m$값을 높이기 위해서 $Al_2O_3$를 첨가하였고 그 결과 시편의 tetragonality 감소와 $Q_m$값의 증가를 확인할 수 있었으나 그 첨가량이 0.2wt% 이상일 경우에는 밀도의 감소로 인한 압전특성의 저하가 나타났다. 밀도의 향상을 위해 Zn and Ni excess 조성을 선택하였고 그 결과 0.5wt% $MnO_2$와 0.2wt% CuO 그리고 0.3wt% $Al_2O_3$를 첨가한 0.875PZT-0.125PZNN 세라믹스(Zn and Ni excess 조성)를 $920^{\circ}C$에서 소결한 경우 $k_p=0.581,\;Q_m=809,\;d_{33}=345\;pC/N\;and\;{\varepsilon}_{33}/{\varepsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.