The Characteristics of Ti-O Buffer Layered Ta/Ta2O5Capacitors on the Al2O3 substrate (Al2O3 기판위에 형성된 Ti-O 완충층을 가진 Ta/Ta2O5커패시티의 특성)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.16 no.9
- /
- pp.807-811
- /
- 2003