• 제목/요약/키워드: Electron lens control

검색결과 21건 처리시간 0.026초

열전자방사형 주사전자 현미경 전자광학계의 유한요소해석 (Finite Element Analysis for Electron Optical System of a Thermionic SEM)

  • 박근;정현우;김동환;장동영
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회A
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    • pp.1288-1293
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    • 2007
  • The present study covers the design and analysis of a thermionic scanning electron microscope (SEM) column. The SEM column contains an electron optical system in which electrons are emitted and moved to form a focused beam, and this generates secondary electrons from the specimen surfaces, eventually making an image. The electron optical system mainly consists of a thermionic electron gun as the beam source, the lens system, the electron control unit, and the vacuum unit. In the design process, the dimension and capacity of the SEM components need to be optimally determined with the aid of finite element analyses. Considering the geometry of the filament, a three-dimensional (3D) finite element analysis is utilized. Through the analysis, the beam emission characteristics and relevant trajectories are predicted from which a systematic design of the electron optical system is enabled. The validity of the proposed 3D analysis is also discussed by comparing the directional beam spot radius. As a result, a prototype of a thermionic SEM is successfully developed with a relatively short time and low investment costs, which proves the adoptability of the proposed 3D analysis.

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주사 전자현미경의 이미지 해상도 향상을 위한 방안 및 실험적 검증 (Methodologies and Verifications for Enhancing Resolution of a Scanning Electron Microscopy)

  • 김동환;김영대;박만진;장동영;박근
    • 한국공작기계학회논문집
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    • 제16권5호
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    • pp.122-128
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    • 2007
  • The electric part of thermal SEM(Scanning Electron Microscopy) consists of high voltage generation, lens control, and image processing. Several methodologies for enhancing SEM image are addressed and those results are verified through analyses and experiments. The controller employes a DSP(Digital Signal Processing), making the system more flexible and convenient than the classical analogue based controller. In some parts based the analog circuit, there are inevitable sources of noise and image distortion. The experimental investigation is provided along with analytical proof to enhance the SEM image.

Finishing 용 전자빔 집속 장치의 성능 실험 (Performance Experiment of Electron Beam Convergence Instrument)

  • 임선종
    • 한국레이저가공학회지
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    • 제18권3호
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    • pp.6-8
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    • 2015
  • Finishing process includes deburring, polishing and edge radiusing. It improves the surface profile of specimen and eliminates the alien substance on surface. Deburring is the elimination process for debris of edges. Polishing lubricates surfaces by rubbing or chemical treatment. There are two types for electron finishing. The one is using pulse beam. The other is using the convergent and scanning electron beam. Pulse type device appropriates the large area process. But it does not control the beam dosage. Scanning type device has advantages for dosage control and edge deburring. We design the convergence and scan type. It has magnetic lenses for convergence and scan device for scanning beam. Magnetic lenses consist of convergent and objective lens. The lenses are designed by the specification(beam size and working distance). In this paper, we evaluate the convergence performance by pattern process. Also, we analysis the results and important factors for process. The important factors for process are beam size, pressure, stage speed and vacuum. These results will be utilized into systematizing pattern shape and the factors.

구면과 비구면 RGP 렌즈 장기 착용시 각막 상피, 내피에 미치는 영향-주사전자현미경적 관찰 (Spherical and Aspherical RGP Lens Fitting to Epithelium and Endothelium of Rabbit's Cornea -Scanning Electron Microscopy)

  • 김인숙;류근창;채수철;전창진
    • Applied Microscopy
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    • 제36권3호
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    • pp.227-234
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    • 2006
  • 구면과 비구면 RGP렌즈 장용시 효과를 비교하기 위하여 3주간 실험토끼 눈의 각막에 콘택트렌즈를 착용 시켜 조사하였다. 8마리의 흰 실험토끼 눈 중 4마리의 우안은 구면 RGP렌즈, 4마리의 우안은 비구면 RGP렌즈를 착용 하였다. 왼눈은 대조군으로 사용하였다. 콘택트렌즈착용 3주 후 안구를 적출하여 형태변화를 주사전자현미경으로 관찰하였으며 RGP렌즈를 착용시 각막 상피 세포증식률을 조사하였다. 구면 RGP렌즈를 착용 후, 상피층은 비구면에 비하여 손상을 받았고 상피층은 심하게 벗겨져 나갔으며 세포 크기는 비정상으로 변하였다. 구면과 비구면 렌즈 두 군 모두 많은 박테리아가 보였으며 렌즈의 후면은 양치류 모양의 형태를 발견하였다. 비구면 렌즈의 원재료는 구면렌즈보다는 다소 정형적으로 보였다. 이러한 형태는 대기로부터 산소 전달을 방해함으로 인하여 구면렌즈를 착용한 군에서 각막을 변화시킨 것으로 생각된다. 이 논문은 구면 렌즈보다는 비구면 렌즈가 생리적으로 각막 세포에 덜 영향을 미쳐 더 적합한 것을 제시한다.

안경용 초음파세척기에 의한 소프트콘택트렌즈의 단백질 침전물 세척효과 (The Effects of Ultrasonic Cleaner for Eye Glasses on Protein Deposits and Parameters in Soft Contact Lens)

  • 주은희;이군자;임현성
    • 한국안광학회지
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    • 제15권3호
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    • pp.227-234
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    • 2010
  • 목적: 안경용 초음파세척기를 이용하여 소프트콘택트렌즈의 단백질 침전물 세척 효과와 콘택트렌즈의 변수에 미치는 영향을 조사하였다. 방법: 단백질을 오염시킨 etafilcon A 재질의 소프트콘택트렌즈를 다목적용액에 넣어 안경용 초음파세척기와 콘택트렌즈용 초음파세척기를 사용하여 세척하고 대조군의 콘택트렌즈는 다목적용액으로 세척한 후 콘택트렌즈에 남아있는 단백질을 추출하여 정량하였고 콘택트렌즈의 전체지름, 베이스커브, 중심두께, 도수 및 함수율의 변화를 측정하였으며 주사전자현미경(scanning electron microscope)으로 콘택트렌즈 표면을 관찰하였다. 결과: 단백질을 오염시킨 etafilcon A 재질의 콘택트렌즈는 다목적용액에 의해 6.08%의 세척효과를 보였고, 다목적용액에 콘택트렌즈를 넣고 초음파세척기로 세척한 경우에는 시간에 따라 안경용 초음파세척기에서는 23.73~33.92%, 콘택트렌즈용 초음파세척기에서는 0~12.99%의 세척효과를 보였다. 결론: 안경용 초음파세척기로 세척한 콘택트렌즈에서 변수 및 표면 변화는 관찰되지 않았다. 결론: 안경원에서 사용하는 안경용 초음파세척기는 소프트콘택트렌즈의 단백질 침전물 제거에 효과적이고 변수 변화를 유발하지 않아 안경원에서 진단용 소프트렌즈의 세척에 활용될 수 있을 것으로 사료된다.

알루미나 세라믹 소재의 초단파 레이저 어블레이션량 연구 (Ablation rate study using short pulsed laser subjected to Alumina medium)

  • 김경한;박진호
    • 한국레이저가공학회지
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    • 제18권4호
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    • pp.17-22
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    • 2015
  • In this paper, ablation rate of $Al_2O_3$ ceramics by femtosecond laser fluence is derived with experimental method. The automatic three axis linear stage makes laser optics to move with high spatial resolution. With 10 times objective lens, minimal pattern width of $Al_2O_3$ is measured in the focal plane. Ablated surface area is shown as linear tendency increasing number of machining times with various laser power conditions. Machining times is most sensitive condition to control $Al_2O_3$ pattern width. Also, the linear increment of pattern width with laser power change is investigated. In high machining speed, the ablation volume rate is more linear with fluence because pulse overlap is minimized in this condition. Thermal effect to surrounding medium can be minimized and clean laser process without melting zone is possible in high machining speed. Ablation volume rate decelerates as increasing machining times and multiple machining times should be considered to achieve proper ablation width and depth.

산화막 식각 기구 연구를 위한 QMF Ion Beam 장치의 제작 (QMF Ion Beam System Development for Oxide Etching Mechanism Study)

  • 주정훈
    • 한국표면공학회지
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    • 제37권4호
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    • pp.220-225
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    • 2004
  • A new ion beam extraction system is designed using a simple ion mass filter and a micro mass balance and a QMS based detecting system. A quadrupole Mass Filter is used for selective ion beam formation from inductively coupled high density plasma sources with appropriate electrostatic lens and final analyzing QMS. Also a quartz crystal microbalance is set between a QMF and a QMS to measure the etching and polymerization rate of the mass selected ion beam. An inductively coupled plasma was used as a ion/radical source which had an electron temperature of 4-8 eV and electron density of $4${\times}$10^{11}$#/㎤. A computer interfaced system through 12bit AD-DA board can control the pass ion mass of the qmf by setting RF/DC voltage ratio applied to the quadrupoles so that time modulation of pass ion's mass is possible. So the direct measurements of ion - surface chemistry can be possible in a resolution of $1\AA$/sec based on the qcm's sensitivity. A full set of driving software and hardware setting is successfully carried out to get fundamental plasma information of the ICP source and analysed $Ar^{+}$ beam was detected at the $2^{nd}$ QMS.

블랙 렌틸콩 추출물 첨가 약과의 품질 특성 (Quality Characteristics of Yakgwa added with Ethanol Extract from Black Lentil (Lens culinaris))

  • 오지연;심기현
    • 동아시아식생활학회지
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    • 제27권2호
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    • pp.114-123
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    • 2017
  • This study added black lentil ethanol extract to Yakgwa at ratios of 0%, 0.5%, 1.0%, and 2.0%, and its quality characteristics were compared to those of the synthetic antioxidant BHT added to Yakgwa. Yakgwa with black lentil extract had lower moisture content than Yakgwa with BHT (3.98%) but higher content than the control group (5.72%). Higher black lentil extract resulted in less moisture content (p<0.001) as well as a faster expansion rate and oil absorption rate (p<0.001). Scanning Electron Microscopy (SEM) showed that as black lentil extract content increased, pores merged and collapsed, whereas the number of pores decreased and pore size became larger. For chromaticity, all L, a, and b values of the group containing black lentil extract were higher compared to the control group and group with BHT (p<0.001). For texture, as amount of added black lentil extract increased, hardness (p<0.001) and gumminess (p<0.01) increased while cohesiveness (p<0.01) decreased compared to the control group. For sensory characteristics, Yakgwa with 1.0% black lentil extract showed the best preference for all items except for off-flavor. Thus, 1.0% black lentil added to Yakgwa was the best in terms of functionality including preference.

소프트 콘택트렌즈용 다목적용액(MPS)의 Clone 1-5C-4 세포주에 대한 세포독성 및 가토 각막에 미치는 영향 (Cytotoxicity of Clone 1-5C-4 Cell Lines and Effect on Rabbit Cornea by Soft Contact Lens Multi-Purpose Solution (MPS))

  • 고은경;나명석;이종빈
    • 한국안광학회지
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    • 제12권3호
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    • pp.19-25
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    • 2007
  • 현재 시중에서 유통되고 있는 소프트 콘택트렌즈 관리용액인 다목적용액(Multi Purpose Solution, MPS)이 결막세포주(Clone 1-5C-4 cell line)에 미치는 증식저해정도와 가토안의 각막상피 및 내피조직에 미치는 손상정도를 비교 관찰하고자 시행하였다. MPS는 $ReNu^{(R)}$ (Baush & Lomb, USA), Opti-free $express^{(R)}$ (Alcon, USA), Free-sol $plus^{(R)}$ (Hanamedicon, Korea)를 사용하였다. 세포증식 저해율은 결막세포주를 배양 한 후 MTT assay로 검정하였고, 형태학적으로는 광학현미경으로 Hematoxylin & Eosin staining 표본을 제작하여 관찰하였다. In vivo 실험은 백색 가토 9마리(18안)를 3군으로 분류하여 실험군인 좌안(9안)에는 각 MPS제품을, 대조군인 우안(9안)에는 보존제가 포함되지 않은 멸균생리식염수를 접안하였다. 일정기간 접안 후, 가토안의 각막표변을 Rose bengal로 염색하여 관찰하였고 각막상피 및 내피조직의 변화는 주사전자현미경(Scanning Electron Microscopy, SEM)으로 비교 관찰하였다.

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