Laser Solutions (한국레이저가공학회지)

Korean Society of Laser Processing (한국레이저가공학회)
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Ablation rate study using short pulsed laser subjected to Alumina medium

알루미나 세라믹 소재의 초단파 레이저 어블레이션량 연구

  • Kim, Kyunghan (Department of Laser & Electron-beam Application, Korea Institute of Machinery & Materials) ;
  • Park, Jinho (Department of Laser & Electron-beam Application, Korea Institute of Machinery & Materials)
  • 김경한 (한국기계연구원 광응용기계연구실) ;
  • 박진호 (한국기계연구원 광응용기계연구실)
  • Received : 2015.12.14
  • Accepted : 2015.12.28
  • Published : 2015.12.31
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Abstract

In this paper, ablation rate of $Al_2O_3$ ceramics by femtosecond laser fluence is derived with experimental method. The automatic three axis linear stage makes laser optics to move with high spatial resolution. With 10 times objective lens, minimal pattern width of $Al_2O_3$ is measured in the focal plane. Ablated surface area is shown as linear tendency increasing number of machining times with various laser power conditions. Machining times is most sensitive condition to control $Al_2O_3$ pattern width. Also, the linear increment of pattern width with laser power change is investigated. In high machining speed, the ablation volume rate is more linear with fluence because pulse overlap is minimized in this condition. Thermal effect to surrounding medium can be minimized and clean laser process without melting zone is possible in high machining speed. Ablation volume rate decelerates as increasing machining times and multiple machining times should be considered to achieve proper ablation width and depth.

Keywords

References

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