Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2008.06a
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- Pages.561-562
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- 2008
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- 2005-8446(pISSN)
Beam Current Control in
주사 전자 현미경에서 빔 전류의 제어
Abstract
Keywords
- Scanning Electron Microscopy;
- Condenser lens;
- Focal length;
- Crossover;
- Beam current control;
- Beam blanking