• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.77-77
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• 1998

Present silicon dioxide (SiOz) 떠m as intennetal dielectridIMD) layers will result in high parasitic c capacitance and crosstalk interference in 비gh density devices. Low dielectric materials such as f f1uorina뼈 silicon oxide(SiOF) and f1uoropolymer IMD layers have been tried to s이ve this problem. I In the SiOF ftlm, as fluorine concentration increases the dielectric constant of t뼈 film decreases but i it becomes unstable and wa않r absorptivity increases. The dielectric constant above 3.0 is obtain어 i in these ftlms. Fluoropolymers such as polyte$\sigma$따luoroethylene(PTFE) are known as low dielectric c constant (>2.0) materials. However, their $\alpha$)Or thermal stability and low adhesive fa$\pi$e have h hindered 야1리ru뚱 as IMD ma따"ials. 1 The concept of a plasma processing a찌Jaratus with 비gh density plasma at low pressure has r received much attention for deposition because films made in these plasma reactors have many a advantages such as go여 film quality and gap filling profile. High ion flux with low ion energy in m the high density plasma make the low contamination and go어 $\sigma$'Oss피lked ftlm. Especially the h helicon plasma reactor have attractive features for ftlm deposition 야~au똥 of i앙 high density plasma p production compared with other conventional type plasma soun:es. I In this pa야Jr, we present the results on the low dielectric constant fluorocarbonated-SiOF film d밑JOsited on p-Si(loo) 5 inch silicon substrates with 00% of 0dFTES gas mixture and 20% of Ar g gas in a helicon plasma reactor. High density 띠asma is generated in the conventional helicon p plasma soun:e with Nagoya type ill antenna, 5-15 MHz and 1 kW RF power, 700 Gauss of m magnetic field, and 1.5 mTorr of pressure. The electron density and temperature of the 0dFTES d discharge are measUI벼 by Langmuir probe. The relative density of radicals are measured by optic허 e emission spe따'Oscopy(OES). Chemical bonding structure 3I피 atomic concentration 따'C characterized u using fourier transform infrared(FTIR) s야3띠"Oscopy and X -ray photonelectron spl:’따'Oscopy (XPS). D Dielectric constant is measured using a metal insulator semiconductor (MIS;AVO.4 $\mu$ m thick f fIlmlp-SD s$\sigma$ucture. A chemical stoichiome$\sigma$y of 야Ie fluorocarbina$textsc{k}$영-SiOF film 따~si야영 at room temperature, which t the flow rate of Oz and FTES gas is Isccm and 6sccm, res야~tvely, is form려 야Ie SiouFo.36Co.14. A d dielec$\sigma$ic constant of this fIlm is 2.8, but the s$\alpha$'!Cimen at annealed 5OOt: is obtain려 3.24, and the s stepcoverage in the 0.4 $\mu$ m and 0.5 $\mu$ m pattern 킹'C above 92% and 91% without void, res야~tively. res야~tively.

• The Journal of the Petrological Society of Korea
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• v.14 no.4 s.42
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• pp.195-211
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• 2005

The Kusandong Tuff, known as a representative key bed in the Cretaceous Gyeongsang Basin, is a crystal-rich tuff of pyroclastic flow and surge origin. It is 1-4 m thick and laterally extends for more than 200 km intercalated in the upper part of the Hayang Croup. Observations and analyses of the feldspar crystals in the tuff, using polarizing microscopes, EPMA, and BSE images, reveal that the plagioclase crystals in the tuff were completely albitized (>$97\%$ Ab) whereas those in the southernmost localities where the tuff is rich in fine ash matrix are unaltered or partly albitized. K-feldspars are partly albitized at all localities, irrespective of the matrix content of the tuff, Perthitic textures, chessboard twinning, albitization along micro-fractures and cleavages, and the relationship between matrix content and the degree of albitization suggest that feldspars in the Kusandong Tuff were albitized by Na-rich fluid after burial. Albitization is interpreted to start preferentially along micro-fractures and cleavages and be hampered in matrix-rich tuffs with a low permeability. Original composition of the plagioclases in the Kusandong Tuff is also interpreted to have ranged between oligoclase and andesine ($Ab_{62.5}-Ab_{83.3}$) before the albitization.

• Korean Journal of Veterinary Research
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• v.39 no.2
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• pp.247-256
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• 1999

A disease of young Holstein calves characterized by recurrent pneumonia, ulcerative and granulomatous stomatitis, enteritis with bacterial overgrowth, periodontitis, delayed wound healing, persistent neutrophilia and death at an early age had been originally described in 1983 and again in 1987. Most of these calves had stunted growth and a persistent, progressive neutrophilia (often exceeding 100,000/ml). By investigation of pedigrees, all of the affected calves have now been traced to a common sire and confirmed by polymerase chain reaction (PCR) diagnostic DNA testing to be homozygous carriers of a defective allele for bovine CD18. Neutrophils from these calves have several functional deficits and, most importantly, fail to adhere in a ${\beta}_2$-integrin dependent manner. The ${\beta}_2$-integrins represent a family of glycoproteins which participate in various leukocyte adhesion reactions during host defense. The presence or absence of ${\beta}_2$-integrin molecules can be demonstrated on the surface of neutrophils, monocytes and lymphocytes from normal or affected calves using specific monoclonal antibodies and flow cytometry, or by colloidal gold immunolabeling and scanning electron microscopy in backscatter mode. Deficiency of the ${\beta}_2$-integrins on all leukocyte types in Holstein calves is analogous to leukocyte adhesion deficiency (LAD) seen in humans. Neutrophils in bovine (BLAD) and human LAD patients are unable to adhere to the endothelial lining of the cardiovascular system thus interrupting egression of neutrophils into infected tissues. Other leukocytes, while still deficient in expression of the ${\beta}_2$-integrins, are still able to efficiently egress from the blood stream due to interactions of other adhesion molecules that are not as highly expressed on neutrophils. Both BLAD cattle and LAD children (who do not receive bone marrow transplants) often die at an early age as a result of the failure of neutrophils to extravasate into infected tissues. In 1991, Shuster, et $al^{27}$, identified two point mutations within the alleles encoding bovine CD18 in a Holstein calf afflicted with leukocyte adhesion deficiency. One mutation causes an aspartic acid to glycine substitution at amino acid 128 (D128G) in an extracellular region of this adhesion glycoprotein that is highly conserved (> 95% identity) between humans, cattle and mice. The other mutation is silent. Numerous calves with clinical symptoms of leukocyte adhesion deficiency have since been tested and all have been found homozygous for the D128G allele. In addition, calves homozygous far the D128G allele have been identified during widespread DNA testing in the United States. All cattle with the mutant allele are related to one bull, who through artificial insemination (A.I.), sired many calves in the 1950's and 1960's. The carrier frequency of the D128G CD18 allele among U.S. Holstein cattle had reached approximately 15% among active A.I. bulls and 8% among cows. By 1993, the organization of the dairy industry and the diagnostic test developed to genotype cattle, enabled virtually complete eradication of bovine leukocyte adhesion deficiency among current and future A.I. bulls.

• Applied Chemistry for Engineering
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• v.17 no.1
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• pp.106-110
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• 2006

If drugs are made from nanoparticles, their formulations can be more effective than the conventional ones. Especially, water insoluble drugs having low absorption rates into our body could show improvement in their adsorption and bioavailability by decreasing their particle sizes to nanometers. In this study, polyvinylpyrrolidone (PVP) and various sugars were employed as stabilizers for the nanoparticles of a water insoluble drug, Itraconazole. Nanoparticles were successfully produced by the wet slurry process for five days. Then, spray drying converted the aqueous dispersions into dry powders, and the redispersibility of dried nanoparticles into water was investigated. The effects of temperature, pressure, and flow rate were studied to understand the importance of processing variables on redispersibility. It was found in particle size analysis that nanoparticles containing sugars have better redispersibility than those without sugars. Additionally, the mainly spherical morphology of dried nanoparticles was identified by SEM (Scanning Electron Microscopy) and AFM (Atomic Force Microscopy).

• Korean Journal of Materials Research
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• v.19 no.8
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• pp.421-426
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• 2009

We report on the capacitively coupled O2 plasma etching of PMMA and polycarbonate (PC) with a diffusion pump. Plasma process variables were process pressure and CCP power at 5 sccm $O_2$ gas flow rate. Characterization was done in order to analyze etch rate, etch selectivity, surface roughness, and morphology using stylus surface profilometry and scanning electron microscopy. Self bias decreased with increase of process pressure in the range of 25$\sim$180 mTorr. We found an important result for optimum pressure for the highest etch rate of PMMA and PC, which was 60 mTorr. PMMA and PC had etch rates of 0.46 and 0.28 ${\mu}m$/min under pressure conditions, respectively. More specifically, etch rates of the materials increased when the pressure changed from 25 mTorr to 60 mTorr. However, they reduced when the pressure increased further after 60 mTorr. RMS roughnesses of the etched surfaces were in the range of 2.2$\sim$2.9 nm. Etch selectivity of PMMA to a photoresist was $\sim$1.5:1 and that of PC was $\sim$0.9:1. Etch rate constant was about 0.04 ${\mu}m$/minW and 0.02 ${\mu}m$/minW for PMMA and PC, respectively, with the CCP power change at 5 sccm $O_2$ and 40 mTorr process pressure. PC had more erosion on the etched sidewall than PMMA did. The OES data showed that the intensity of the oxygen atomic peak (777.196 nm) proportionally increased with the CCP power.

• Korean Journal of Materials Research
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• v.9 no.11
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• pp.1129-1136
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• 1999

TIN films were prepared on Si(100) substrate by ICP-CVD(inductive1y coupled plasma enhanced chemical vapor deposition) using TEMAT(tetrakis ethylmethamido titanium : Ti$[\textrm{N}\textrm{(CH)}_{3}\textrm{C}_{2}\textrm{H}_{5}]_{4}$) precursor at various deposition conditions. Phase, microstructure, and the electrical properties of TIN films were characterized by x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), high resolution transmission electron microscopy (HRTEM) and electrical measurements. Polycrystalline TiN films with B1 structure were grown at temperatures over $200^{\circ}C$. Preferentially oriented along TiN(111) films were obtained at temperatures over $300^{\circ}C$ with the flow rates of 10, 5, and 5 sccm for TEMAT, $\textrm{N}_{2}$ and Ar gas. The TiN/Si(100) interface was flat and no chemical reaction between TIN and $\textrm{SiO}_2$ was found. The resistivity, carrier concentration and the carrier mobility for the TiN sample prepared at $500^{\circ}C$ are 21 $\mu\Omega$cm, 9.5$\times\textrm{10}^{18}\textrm{cm}^{-3}$ and $462.6\textrm{cm}^{2}$/Vs, respectively.

• Journal of the Microelectronics and Packaging Society
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• v.8 no.3
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• pp.49-53
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• 2001

Vortical etching experiments of ($SrBi_2Ta_2O_9$)/Si thin films have been performed by using the inductively coupled plasma reactive ion etching (ICP-ME) apparatus. The purposes of these experiments are to get the effective area of vertical surface. Because this technology is very important to get good qualities of ferroelectric gate structure, capacitor and the minimum parasitic effects related to the excellent performances of the FRAM (Ferroelectric Random Access Memory) device. The reacting gases were Ar and $Cl_2$gases, and various $Ar/C1_2$flow ratios were used. The etching experiments were carried out at various RF powers such as 700, 700, 500W and at various DC powers such as 200, 150, 100, 50W, respectively. The maximum etch rate of $SrBi_2Ta_2O_9$/Si thin films was 1050 A/min at the $Ar/C1_2$ gas ratio of 20/16, RF power of 700 W and DC power of 200 W. From the SEM (scanning electron microscopy) image of the SBT thin films, the wall angle was as good as about $82^{\circ}$.

• Journal of the East Asian Society of Dietary Life
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• v.22 no.1
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• pp.109-119
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• 2012

This study analyzed the antibacterial activity of the ethanol extract of Schizandra chinensis Baillon against food pathogenic microorganisms to determine its capabilities as a natural antimicrobial agent. A paper disc diffusion test, minimum inhibitory concentration (MIC) determination, and time-kill assay showed that the ethanol extract strongly inhibits the growth of Listeria monocytogenes, Bacillus cereus, Escherichia coli O157:H7, and Pseudomonas aeruginosa. Release of cytoplasmic ${\beta}$-galactosidase was detected in E. coli, E. coli O157:H7, S. aureus, and P. aeruginosa treated with the ethanol extract. An increase of outer membrane permeability caused by the ethanol extract was also observed. An outward flow of cell constituents was detected in the Gram negative strains treated with the ethanol extract. These results imply that the inner and outer membranes of cells were partially destroyed and cell constituents were released by the treatment of the S. chinensis Baillon ethanol extract. The results of this study indicate that ethanol extract of S. chinensis Baillon evidences a fairly good antibacterial effect.

• Elastomers and Composites
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• v.46 no.1
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• pp.45-53
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• 2011

The effect of the silane coupling agent, bis(triethoxysilypropyl)tetrasulfide (TESPT), on mechanical properties of a silica-filled NBR compound for oilseal was investigated. Curing behavior and crosslinking density of the compounds were measured using ODR (oscillating disk rheometer) and swelling ratio in toluene. UTM (universal testing machine) and shore A hardness tester were used in order to study the characteristics of mechanical properties of original vulcanizates and aged ones with heated air and ASTM No. 3. oil. Recovery of elasticity which influences the performance and service life of oilseal was investigated by giving bending deformation to vulcanizates in aging condition. After bending aging test, recovery distance was measured and calculated angle of recovery from it. TR (temperature retraction) test was performed on these vulcanizates to determine the low temperature recovery behavior. Wear resistance was measured by Taber type abrasion tester. In addition, SEM was used to characterize the morphology of the worn surface of vulcanizates. The result showed that addition of TESPT into silica-filled compound improves not only compound flow-ability, interaction between NBR and silica and crosslinking density, but also hardness, 100% modulus, recovery of elasticity, wear resistance, heat resistance and ASTM No.3 oil resistance of vulcanizates.

• Elastomers and Composites
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• v.45 no.1
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• pp.51-57
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• 2010

Cellulose nanowhiskers (CNW) gamered increasing interest for their remarkable reinforcement of polymer composites. In this work, we were to produce cellulose whiskers from commercially available microcrystalline cellulose (MCC) by acid hydrolysis with sulfuric and hydrochloric acids. Electron microscopy found that each acid produced sililar cellulose crystals of diameters ranging from 20 to 30 nm and lengths ranging from 200 to 300 nm. Moreover, all samples showed remarkable flow birefringence through crossed polarization filters. Conductometric titration of CNW suspensions revealed that the sulfuric acid treated sample had a surface charge of between 140.00 mmol/kg and 197.78 mmol/kg due to sulfate groups, while that of the hydrochloric acid treated sample was undetectable. Thermogravimetric analysis showed that the thermal decomposition temperature and apparent activation energy (evaluated by Broido's method at different stages of thermal decomposition.) of H1-CNW - prepared by hydrolysis with hydrochloric acid - was higher than those of S1-CNW and S2-CNW - prepared by hydrolyzing MCC with sulfuric acid.