• Transactions on Electrical and Electronic Materials
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• v.13 no.2
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• pp.78-84
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• 2012

An in-situ optical monitoring method for real-time process monitoring of electrochemical copper deposition (CED) is presented. Process variables to be controlled in achieving desired process results are numerous in the CED process, and the importance of the chemical bath conditions cannot be overemphasized for a successful process. Conventional monitoring of the chemical solution for CED relies on the pH value of the solution, electrical voltage level for the reduction of metal cations, and gravity measurement by immersing sensors into a plating bath. We propose a nonintrusive optical monitoring technique using three types of optical sensors such as chromatic sensors and UV/VIS spectroscopy sensors as potential candidates as a feasible optical monitoring method. By monitoring the color of the plating solution in the bath, we revealed that optically acquired information is strongly related to the thickness of the deposited copper on the wafers, and that the chromatic information is inversely proportional to the ratio of $Cu$ (111) and {$Cu$ (111)+$Cu$ (200)}, which can used to measure the quality of the chemical solution for electrochemical copper deposition in advanced interconnection technology.

• Bulletin of the Korean Chemical Society
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• v.23 no.1
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• pp.71-74
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• 2002

The apparent barrier height for charge transfer through an interfacial water layer between a Pt/Ir tip and a gold surface has been measured using STM technique. The average thickness of the interfacial water layer inside an STM junction was controlled by the amount of moisture. A thin water layer on the surface was formed when relative humidity was in the range of 10 to 80%. In such a case, electron tunneling through the thin water layer became the majority of charge transfers. The value of the barrier height for the electron tunneling was determined to be 0.95 eV from the current vs. distance curve, which was independent of the tip-sample distance. On the other hand, the apparent barrier height for charge transfer showed a dependence on tip-sample distance in the bias range of 0.1-0.5 V at a relative humidity of approximately 96%. The non-exponentiality for current decay under these conditions has been explained in terms of electron tunneling and electrochemical processes. In addition, the plateau current was observed at a large tip-sample distance, which was caused by electrochemical processes and was dependent on the applied voltage.

• Journal of the Korean Chemical Society
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• v.58 no.3
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• pp.289-296
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• 2014

Electrochemical copolymerization of o-chlorophenol (oCP) with o-hydroxyphenol (oHP) was carried out in aqueous $H_2SO_4$ by using cyclic voltammetry (CV) technique. In addition, CV was used to evaluate the differences in electrochemical characteristics of the copolymer in comparison with the corresponding homopolymers, poly(o-chlorophenol) (PoCP) and poly(o-hydroxyphenol) (PoHP). The variation of peak currents with respect to sweep rates was compared between copolymer and homopolymers, PoCP and PoHP, films. Further support for copolymer characterization was obtained by recording UV-visible, IR spectra and elemental analysis. The mechanism of the electrochemical polymerization has been discussed. The monomer reactivity ratios ($r_1$ and $r_2$) were calculated using Fineman-R$\ddot{o}$ss method and was found to be 0.4 and 1.3 repetitivelly and the copolymer structure is a block structure and more rich in oHP units.

• Journal of Environmental Science International
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• v.18 no.11
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• pp.1225-1234
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• 2009

The aim of this research was to apply experimental design methodology in the optimization condition of electrochemical oxidation of Rhodamine B(RhB). The reactions of electrochemical oxidation were mathematically described as a function of parameters amounts of current, NaCl dosage, pH and time being modeled by the use of the central composite design, which was used for fitting quadratic response surface model. The application of response surface methodology using central composite design(CCD) technique yielded the following regression equation, which is an empirical relationship between the removal efficiency of RhB and test variable in actual variables: RhB removal (%) = 3.977 + 23.279$\cdot$Current + 49.124$\cdot$NaCI - 5.539$\cdot$pH - 8.863$\cdot$time - 22.710$\cdot$Current$\cdot$NaCl + 5.409$\cdot$Current$\cdot$time + 2.390$\cdot$NaCl$\cdot$time + 1.061$\cdot$pH$\cdot$time - $0.570{\cdot}time^2$. The model predicted also agree with the experimentally observed result($R^2$ = 91.9%).

• Journal of the Korean institute of surface engineering
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• v.28 no.1
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• pp.34-45
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• 1995

An amphiphilic nitroxide radical(2,2'6,6'-tetramethyl-4-octadecyioxy-1-piperidinyloxyl, TEMOPO) or mixture of TEMOPO and arachidic acid(Icosanoic acid, AA), was spread on water surface by the Langmuir-Blodgett(LB) method and surface pressure-area curve was measured. Such monolayer films of TEMOPO were transferred onto surfaces of photo transferable tin oxide electrodes(PTTO) by the LB method under various surface pressure with the transfer ratio of larger than 0.95 at the surface pressure higher than 15mN/m. The electrochemical effect of functional nitroxy radical monolayer onto semi-conductive electrode to electrolyte have been investigated by using LB method. Cyclic voltammetry technique was used for the electrochemical behavior measurement of TEMOPO monolayer onto the PTTO in 0.18 mo1/$dm^3$ $H_2SO_4$ solutions. The shape of voltammograms was found to change from one electrode to another. The amount of charge for the oxidation and the re-reduction of the cation to TEMOPO were evaluated from graphical integration. The amounts of charge were always smaller than those predicted from the $\pi$-$\sigma$ curves though the transfer ratio was unity. The poor reproducibility of the cyclic voltammograms was improved by the mixing with AA. Structure and arrangement of monomolecular layer on water surface and electrode were studied. Characteristics of monolayer film applied for the mediation reaction was also discussed by electrochemical method.

• Corrosion Science and Technology
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• v.9 no.6
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• pp.325-330
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• 2010

Many surface protection methods have been developed to apply for constructional steels used under severe corrosive environment. Thermal spray coating has been known to be an attractive technique due to its relatively high coating speed. Furthermore high corrosion resistance of coated film with thermal spray is required to expand its application. Four types of coated films(DFT:300 um) such as pure zinc, pure aluminum and two Al-Zn alloy (Al:Zn=85:15 and Al:Zn=95:5) onto the carbon steel (SS401) were prepared with arc spray, and the corrosion behavior of their samples were evaluated by electrochemical method in this study. Pure aluminum sample showed high corrosion resistance behavior exposed to sea water solution and pure zinc and alloy (Al:Zn=95:5) samples followed pure aluminum sample. The other alloy(Al:Zn=85:15) so called galvalume coated onto the carbon steel ranks the 4th corrosion resistance in this study. The results of porosity ratio of those samples by observation are well matched with the electrochemical data.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.1184-1187
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• 2003

Electrochemical capacitors are becoming attractive energy storage systems particularly for applications involving high power requirements such as hybrid systems consisting of batteries and electrochemical capacitors for electric vehicle propulsion. A new type electric double layer capacitor (EDLC) was constructed by using carbon nanofibers (CNFs) and DAAQ(1,5-diaminoanthraquinone) electrode. Carbonaceous materials are found in variety forms such as graphite, diamond, carbon fibers etc. While all the carbon nanofibers include impurities such as amorphous carbon, nanoparticles, catalytic metals and incompletely grown carbons. We have eliminated of Ni particles and some carbonaceous particles in nitric acid. Nitric acid treated CNFs could be covered with very thin DAAQ oligomer from the results of CV and TG analyses and SEM images. DAAQ oligomer film exhibited a specific capacity as 45-50 Ah/kg in 4M $H_2SO_4$. We established Process Parameters of the technique for the formation of nano-structured materials. Furthermore, improved the capacitive properties of the nano structured CNFs electrodes using controlled solution chemistry. As a result, CNFs coated by DAAQ composite electrode showed relatively good electrochemical behaviors in acidic electrolyte system with respect to specific capacity and scan rate dependency.

• Journal of IKEEE
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• v.13 no.2
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• pp.126-131
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• 2009

To overcome short channel effects, wrap-around field effect transistors have drawn a great deal of attention for their superior electrostatic coupling between the channel and the surrounding gate electrode. In this paper, we introduce a bottom-up technique to fabricate a wrap-around field effect transistor using silicon nanowires as the conduction channel. Device fabrication was consisted mainly of electron-beam lithography, dielectrophoresis to accurately align the nanowires, and the formation of gate electrode using electrochemical deposition. The electrolyte for electrochemical deposition was made up of non-toxic organic-based solution and liquid nitrogen was used as a method of maintaining the shape of polymethyl methacrylate(PMMA) during the process of electrochemical deposition. Patterned PMMA can be used as a nano-template to produce wrap-around gate nano-structures.

• Journal of Microbiology and Biotechnology
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• v.18 no.1
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• pp.145-152
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• 2008

A cell-based in vitro exposure system was developed to determine whether oxidative stress plays a role in the cytotoxic effects of volatile organic compounds (VOCs) such as benzene, toluene, xylene, and chlorobenzene, using human epithelial HeLa cells. Thin films based on cysteine-terminated synthetic oligopeptides were fabricated for immobilization of the HeLa cells on a gold (Au) substrate. In addition, an immobilized cell-based sensor was applied to the electrochemical detection of the VOCs. Layer formation and immobilization of the cells were investigated with surface plasmon resonance (SPR), cyclic voltammetry (CV), and electrochemical impedance spectroscopy (EIS). The adhered living cells were exposed to VOCs; this caused a change in the SPR angle and the VOC-specific electrochemical signal. In addition, VOC toxicity was found to correlate with the degree of nitric oxide (NO) generation and EIS. The primary reason for the marked increase in impedance was the change of aqueous electrolyte composition as a result of cell responses. The p53 and NF-${\kappa}B $ downregulation were closely related to the magnitude of growth inhibition associated with increasing concentrations of each VOC. Therefore, the proposed cell immobilization method, using a self-assembly technique and VOC-specific electrochemical signals, can be applied to construct a cell microarray for onsite VOC monitoring.

• Resources Recycling
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• v.16 no.6
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• pp.52-60
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• 2007

Denitrification from aqueous solution was investigated through patent analysis and electrochemical denitrification experiment. Among several candidates, biological treatment and oxidation/reduction method are mainly discussed. Recently, patent pending concerning to electrochemical treatment is increasing. Based on basic electrochemical study, total nitrogen was removed up 47% by 1-hour galvanostatic electrolysis with Fe cathode and Pt anode. More applicable technique to industry could be mentioned combination of two or more technologies suitable to waste water characteristics. In the case of small and concentrate effluent, combination of chemical and electrochemical treatment would be recommendable because nitrate could be easily converted to nitrite by chemical treatment, and in that case denitrification by electrolysis becomes more efficient and metal ions from chemical treatment can be recovered during electrolysis.