• Design & Manufacturing
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• v.13 no.1
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• pp.13-18
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• 2019

The size and prospects of the domestic semiconductor equipment market are increasing every year. In the case of various parts used inside semiconductor equipments, high durability such as high strength and abrasion resistance is demanded. Particularly, the gases used in semiconductor production processes are toxic. In order to prevent such toxic gas leakage, a precision processing technique and a surface treatment technique for preventing corrosion are required. Electro-polishing is an electro-chemical method of polishing a metal surface to make it smooth and polished. Electro-polishing is mainly used in the finishing process of metal surface. Unlike mechanical polishing, electro-polishing is used in many fields, such as fine chemical etching equipment, since no damaged layer or burr, fine polishing groove and particles are generated. However, in order to withstand the gas used in the semiconductor equipment, the parts must have high corrosion resistance. However, the surface hardness generally become lowered through electro-polishing. Therefore, in this study, surface hardness were experimentally observed before and after electro-polishing. Then, a method of improving hardness by preparing a nitrided layer by plasma ion nitriding treatment.

• Journal of Technologic Dentistry
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• v.34 no.2
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• pp.145-153
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• 2012

Purpose: The purpose of this study was to investigate to effect of the electro-polishing condition according to electrolyte temperature and current and polishing time on surface morphology and composition by scanning electron microscopy(SEM) and energy dispersive X-ray spectrometer(EDS) in dental casting Co-Cr-Mo alloys. Methods: 16 specimens were divided into 4 groups which have each 4 specimens. The size of specimens were 10mm wide and 5mm height. the electro-polishing of specimens are by polishing solution temperature and times in Co-Cr-Mo alloy by SEM and EDS analysis. Results: The results shows that most smooth surface is obtained when electro-polishing is performed at $49^{\circ}C$ for 30-40sec with electro gap of 10mm and 8 voltage. Conclusion: The morphologies of specimens after electro-polishing were scratch absent and significant between at $40^{\circ}C$ for 45sec and at $49^{\circ}C$ for 45sec.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.3
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• pp.266-272
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• 2012

This paper has aims to share fundamental knowledge for magnetic abrasive polishing and to mainly introduce recent research results. In order to enhance a magnetic flux density for nonferrous materials, advanced magnetic abrasive polishing system which is called 2nd generation system was established by electro-magnet array table, and the effectiveness of the electromagnet array table was evaluated in real polishing experiments. To increase adhesiveness of the abrasives in high speed polishing, a silicone gel agent was proposed and carbon nanotube particles as new magnetic abrasives were applied in the magnetic abrasive polishing. In addition, a strategy for optimal step-over determination by heuristic algorithm was introduced for applying large size workpiece. Curved surfaces having a uniform radius were simulated and tested with installed electro-magnet array table.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.410-410
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• 2012

The continuous monolayer graphene was synthesized on electro-polished copper foil. Electro-polishing sticks off the coating layer of copper foil, which prevents the continuous graphene growth. The quality of continuous graphene is dependent on roughness of copper foil. Copper foil roughness could be controlled by changing polishing condition. The effects of working voltage (4-6 V) and time (30-70 sec) for electro-polishing were systematically examined. The change of surface roughness was checked with AFM.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.38-42
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• 2002

In the recent, electro-rheological fluid has been used for micro polishing of the 3-dimensional micro-aspherical lens and some sectional parts with defects on the wide flat wafer. The ER fluid has the properties that its viscosity has drastic changed under some electric fields. Therefore, ER fluid can be applicable to the micro polishing fur some parts using these properties. In this paper, the experimental device has been constructed using the precision milling machine in order to micro polishing far some sectional parts of a 4 inches wafer It is consisted of a small steel electrode, a wafer fixture, DC10mA and 5KV power supply unit, and a controller unit. Using the ER experimental device, possibility of amending for wide flat wafer and micro polishing of some micro part has been analyzed.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.27-33
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• 2004

Electro-theological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields. micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4inches in size and other workpiece. was made on a precision polishing system. It consisted of a steel electrode. a wafer fixture. l0㎃ current and DC 5㎸ power supply unit, and a controller unit. From the Experiments. the ER fluid is applicable for micro polishing of small parts.

• Journal of Surface Science and Engineering
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• v.41 no.1
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• pp.38-42
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• 2008

316L stainless steel welding tube was electrolytically polished and the inner surface characteristics of the tube were tested. Electro-polishing variables such as current, voltage, concentration of electrolyte and electropolishing time were changed to seek for optimum condition. These makes a optimum conditions for the electro-polishing as 4000 A, 9 V, 1.7 specific gravity of electrolyte, and 30 minute of electro-polishing time. It makes the surface roughness as Ra < $0.25{\mu}m$. XPS test resulted as the ratio of CrO/FeO equals or more to 3/1. AES test resulted as the thickness of CrO film of $38{\AA}$. DTA test resulted as the tube did not react with $N_2,\;H_2\;and\;O_2$ gas below 1073K. As summarize above results, the electro- polished 316L stainless steel welding tube satisfied the conditions to apply as a pipeline for semi- conductor production facility and clean room.

• Journal of Advanced Marine Engineering and Technology
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• v.25 no.2
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• pp.357-364
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• 2001

This study deals with the effect on non-martensitic layer on the fatigue strength in carburized gear. The test gears are carburized, then treated by the combination of chemical polishing and electro-polishing. Carburization treatment is used widely on parts of power transmission system like surface hardened layer to improve fatigue strength. Carburized gears are observed using a scanning electron microscope(SEM) to determine the characteristics of crack initiation mechanism in the surface layer. The constant street amplitude fatigue test is performed by using and electro-hydraulic servo-controlled pulsating tester. The S-N curves are obtained and illustrated. The effect of non-martensitic layer on the fatigue strength is clarified.

• Transactions of the Korean Society of Automotive Engineers
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• v.22 no.4
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• pp.65-71
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• 2014

As an important component of a fuel cell, the bipolar plate comprises a large proportion in the fuel cell's volume, weight and price. The bipolar plate is the most widely used; however, graphite bipolar plate is large in volume, brittle and therefore easily broken during assembling. In addition, due to its poor machinability, production costs a lot, unless mass production. Compared with the graphite bipolar plate, the metal bipolar plate has good machinability, high electric conductivity and strong mechanical strength; however, it corrodes easily and has a high contact resistance, so in order to prevent corrosion and reduce the contact resistance, the basic metal needs to be processed by use of electro polishing and coating. The water which is produced by electrochemical reactions in the fuel cell must be discharged smoothly. In this study, in order to prevent corrosion the processes of electro polishing and CrN coating were used. According to the presence or absence of these processes, the contact angles can be measured and different metal bipolar plates can be made, these plates can be used for comparing and analyzing the performance of the fuel cell.

• International Journal of Precision Engineering and Manufacturing
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• v.3 no.4
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• pp.43-53
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• 2002

Polishing a die that has free-form surfaces is a time-consuming and tedious job, and requires a considerable amount of high-precision skill. In order to reduce the polishing time and cope with the shortage of skilled workers, a user-friendly automatic polishing system was developed. The polishing system is composed of two subsystems, a three-axis machining center and a two-axis polishing robot. The system has five degrees of freedom and is able to keep the polishing tool in a position normal to the die surface during operation. A sliding mode control algorithm with velocity compensation was proposed to reduce tracking errors. Trajectory tracking experiments showed that the tracking error can be reduced prominently by the proposed sliding mode control compared to a PD (proportional derivative) control. To evaluate the polishing performance of the polishing system and to and the optimal polishing conditions, the polishing experiments were conducted.