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Surface Properties of Electrolytic-Polished 316L Stainless Steel Welding Tube for Semi-Conductor Fab. - As the Relation of Electrolysis Conditions with Surface Characteristics -

반도체 제조 설비용 전해 연마된 STS316L 용접강관의 표면 성질 - 전해 조건과 표면 성상의 관계를 중심으로 -

  • Kim, Ki-Ho (Department of New Materials Eng., Chungbuk National University) ;
  • Cho, Bo-Yeon (Valexkorea Co. Ltd.)
  • Published : 2008.02.29

Abstract

316L stainless steel welding tube was electrolytically polished and the inner surface characteristics of the tube were tested. Electro-polishing variables such as current, voltage, concentration of electrolyte and electropolishing time were changed to seek for optimum condition. These makes a optimum conditions for the electro-polishing as 4000 A, 9 V, 1.7 specific gravity of electrolyte, and 30 minute of electro-polishing time. It makes the surface roughness as Ra < $0.25{\mu}m$. XPS test resulted as the ratio of CrO/FeO equals or more to 3/1. AES test resulted as the thickness of CrO film of $38{\AA}$. DTA test resulted as the tube did not react with $N_2,\;H_2\;and\;O_2$ gas below 1073K. As summarize above results, the electro- polished 316L stainless steel welding tube satisfied the conditions to apply as a pipeline for semi- conductor production facility and clean room.

Keywords

References

  1. 長野昌隆, 電氣化學, 55 (1933) 115
  2. 長野昌隆, 電氣化學, 3 (1935) 6
  3. 笠松 勇, 印刷情報, 3 (1959) 20
  4. 井上英一, 印刷雜誌, 8 (1955) 40
  5. W.J.C.Hilsop, Process Eng. Month, (1934) 5
  6. 川俉正一, 印刷雜誌, 7 (1962) 22
  7. M.Sanz, Metal Progress, 141 (1954) 141
  8. F. Gaben, B. Vuillemin, R. Oltra, J. Electrochem. Soc., 151 (2004) B595 https://doi.org/10.1149/1.1803562
  9. N. Remasubramanian, N. Precocanin, R. D. Davidson, J. Electrochem. Soc., 132 (1985) 793 https://doi.org/10.1149/1.2113959

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