• 제목/요약/키워드: Electro-mechanical system

검색결과 702건 처리시간 0.032초

A Wireless Intraocular Pressure Sensor with Variable Inductance Using a Ferrite Material

  • Kang, Byungjoo;Hwang, Hoyong;Lee, Soo Hyun;Kang, Ji Yoon;Park, Joung-Hu;Seo, Chulhun;Park, Changkun
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제13권4호
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    • pp.355-360
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    • 2013
  • A wireless intraocular (IOP) pressure sensor based on micro electro mechanical system (MEMS) technology is proposed. The proposed IOP sensor uses variable inductance according to the external pressure. The proposed sensor is composed of two flexible membranes: a ferrite bottom part, an inductor, and a capacitor. The inductance of the sensor varies according to the external pressure. The resonance frequency of the sensor is also varied, and this frequency is detected using an external coil. The external coil is designed with an FR-4 printed circuit board. The feasibility of the proposed sensor structure using variable inductance to detect the external pressure is successfully demonstrated.

Fabrication and Characteristics of Micro-Electro-Mechanical-System-Based Gas Flow Sensor

  • Choi, Ju-Chan;Lee, June-Kyoo;Kong, Seong-Ho
    • 센서학회지
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    • 제20권6호
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    • pp.363-367
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    • 2011
  • This paper proposes a highly-sensitive gas flow sensor with a simple structure. The sensor is composed of a micro-heater for heating the gas medium and a pair of temperature sensors for detecting temperature differences due to gas flow in a sealed chamber on one axis. Operation of the gas flow sensor depends on the transfer of heat through the air medium. The proposed gas flow sensor has the capability to measure gas flow rates <5 $cm^3$/min with a resolution of approximately 0.01 $cm^3$/min. Furthermore, this paper reports some additional experiment results, including the sensitivity of the proposed gas flow sensor as a function of operating current and the flow of different types of gas(oxygen, carbon dioxide, and nitrogen). The fabrication process of the proposed sensor is very simple, making it a good candidate for mass production.

패키징으로 인한 응력이 MEMS 소자에 미치는 영향 분석 및 개선 (Effects of Package Induced Stress on MEMS Device and Its Improvements)

  • 좌성훈;조용철;이문철
    • 한국정밀공학회지
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    • 제22권11호
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    • pp.165-172
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    • 2005
  • In MEMS (Micro-Electro-Mechanical System), packaging induced stress or stress induced structure deformation becomes increasing concerns since it directly affects the performance of the device. In the decoupled vibratory MEMS gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, packaged using the anodic bonding at the wafer level and EMC (epoxy molding compound) molding, has a deformation of MEMS structure caused by thermal expansion mismatch. This effect results in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) process technology. It uses a silicon wafer and two glass wafers to minimize the wafer warpage. Thus the warpage of the wafer is greatly reduced and the frequency difference is more uniformly distributed. In addition. in order to increase robustness of the structure against deformation caused by EMC molding, a 'crab-leg' type spring is replaced with a semi-folded spring. The results show that the frequency shift is greatly reduced after applying the semi-folded spring. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

CPW MMIC 칩 실장을 위한 실리콘 MEMS 패키지 설계 (Design of Silicon MEMS Package for CPW MMICs)

  • 김진양;김성진;이해영
    • 대한전자공학회논문지TC
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    • 제39권11호
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    • pp.40-46
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    • 2002
  • 본 논문에서는 CPW MMIC 실장시 발생되는 기생 공진 현상을 제거하기 위한 새로운 구조의 실리콘 MEMS 패키지를 제안하였다. 또한 세 가지 형태의 실리콘 칩 캐리어(gold-plated high resistivity, lightly doped, high resistivity) 상에 GaAs CPW 패턴을 제작하고 해석/측정함으로써, 제안된 패키지의 성능을 확인하였다. 해석 및 측정 결과 제안된 MEMS 패키지는 비저항이(resistivity) 15 ${\Omega}{\cdot}$㎝인 실리콘 캐리어(carrier)를 사용함으로써 기생 공진 현상을 효과적으로 억제시킬 수 있었다.

델파이법을 이용한 금융통장 정보 인식용 광학필터 결정인자 도출에 관한 연구 (A Study on the Selecting Determine Factors of Optical Filter for Recognition Financial Account Using Delphi Method)

  • 유형근;이강원
    • 한국전기전자재료학회논문지
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    • 제27권1호
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    • pp.61-69
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    • 2014
  • In this paper, we have researched semiconductor optical filters to solve the problem of the high failure rate that are recognize bad of financial account, jam of financial account and the ATM service interruption due to failure of accurate location information among the operation of the ATM (automatic teller machine) systems. A semiconductor optical filters that have high resolution and less diffuse, high transmittance are able to detect the information of financial account surface accurately. Therefore, it is a stable filter that is able to minimize the incidence of disability. In this paper, we drew the determinants by element for implement an excellent semiconductor optical filters. Based on this, we had to be able to implement the semiconductor optical filter that is able to be mounted on the actual ATM system through future studies.

PZT 세라믹스의 전기기계결합계수 온도 안정성에 관한 연구 (Temperature Stability of Electro-mechanical Coupling Factors of PZT Ceramics)

  • 이개명
    • 한국전기전자재료학회논문지
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    • 제27권1호
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    • pp.27-32
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    • 2014
  • In this paper, PZT piezoelectric ceramic specimens with 4 compositions (Zr/Ti=50/50, 53/47, 56/44, 58/42) in $Pb(Zr,Ti)O_3$ system were fabricated. We studied effects of poling strength and thermal aging on the temperature characteristics of eletromechanical coupling factor k31 of the specimens, which were poled with the DC electric fields, 1.5, 2.5 and 3.5 kV/mm respectively and thermally aged for an hour at $200^{\circ}C$. The eletromechanical coupling factor k31 of the specimen with the composition Zr/Ti= 53/47, nearest to the morphotropic phase boundary decreased the most greatly, irrelevant to the intensity of poling field, due to 1st thermal aging. And the temperature coefficient of eletromechanical coupling factor k31 was (-) in the tetragonal phase composition and (+) in the rhombohedral phase composition, which is reverse in the temperature coefficient of resonance frequency. It is interesting that eletromechanical coupling factor k31 of PZT ceramics is shown to be able to increase as temperature increase in the interval $-20{\sim}80^{\circ}C$.

형광램프의 기동시 과도특성 모델 해석 (A Transient Model Analysis of a Fluorescent Lamp at Startup Time)

  • 함중걸;백수현
    • 한국조명전기설비학회지:조명전기설비
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    • 제10권5호
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    • pp.52-56
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    • 1996
  • 형광 램프는 에너지 효율이 높아 상업용 조명설비에 많이 사용된다. 형광램프 시스템의 설계에서 안정기의 설계는 형광 램프의 특성을 고려하는 것이 매우 중요하다. 특히, 시동시 형광램프의 과도특성은 안정기 설계시 좀더 많은 설계사양들을 제공하게 된다. 이 논문에서는 시동시 과도특성에 근거한 형광램프의 동작모델을 동기화로 나타냈다. 이 모델은 제조사가 다른 형광 램프에도 폭 넓게 적용이 가능하다. 실험에 의해 얻어진 결과를 동기회로 모델에 의한 Pspice 시뮬레이션에 의해 나타난 결과와 비교 한 결과, 본 논문에서 제시한 모델이 실질적으로 효용성이 있음을 나타냈으며, 자기식 안정기 및 전기식안정기의 설계시 형광램프의 시동과도특성에 의한 안정기 조건 설계들을 더욱 명확하게 알아낼 수 있었다.

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Numerical Prediction of Solder Fatigue Life in a High Power IGBT Module Using Ribbon Bonding

  • Suh, Il-Woong;Jung, Hoon-Sun;Lee, Young-Ho;Choa, Sung-Hoon
    • Journal of Power Electronics
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    • 제16권5호
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    • pp.1843-1850
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    • 2016
  • This study focused on predicting the fatigue life of an insulated gate bipolar transistor (IGBT) power module for electric locomotives. The effects of different wiring technologies, including aluminum wires, copper wires, aluminum ribbons, and copper ribbons, on solder fatigue life were investigated to meet the high power requirement of the IGBT module. The module's temperature distribution and solder fatigue behavior were investigated through coupled electro-thermo-mechanical analysis based on the finite element method. The ribbons attained a chip junction temperature that was 30℃ lower than that attained with conventional round wires. The ribbons also exhibited a lower plastic strain in comparison with the wires. However, the difference in plastic strain and junction temperature among the different ribbon materials was relatively small. The ribbons also exhibited different crack propagation behaviors relative to the wires. For the wires, the cracks initiated at the outmost edge of the solder, whereas for the ribbons, the cracks grew in the solder layer beneath the ribbons. Comparison of fatigue failure areas indicated that ribbon bonding technology could substantially enhance the fatigue life of IGBT modules and be a potential candidate for high power modules.

An Experimental Analysis of the Ripple Current Applied Variable Frequency Characteristic in a Polymer Electrolyte Membrane Fuel Cell

  • Kim, Jong-Hoon;Jang, Min-Ho;Choe, Jun-Seok;Kim, Do-Young;Tak, Yong-Sug;Cho, Bo-Hyung
    • Journal of Power Electronics
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    • 제11권1호
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    • pp.82-89
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    • 2011
  • Differences in the frequency characteristic applied to a ripple current may shorten fuel cell life span and worsen the fuel efficiency. Therefore, this paper presents an experimental analysis of the ripple current applied variable frequency characteristic in a polymer electrolyte membrane fuel cell (PEMFC). This paper provides the first attempt to examine the impact of ripple current through immediate measurements on a single cell test. After cycling for hours at three frequencies, each polarization and impedance curve is obtained and compared with those of a fuel cell. Through experimental results, it can be absolutely concluded that low frequency ripple current leads to long-term degradation of a fuel cell. Three different PEMFC failures such as membrane dehydration, flooding and carbon monoxide (CO) poisoning that lead to an increase in the impedance magnitude at low frequencies are simply introduced.

세그먼트화 폴리우레탄을 이용한 고분자 마이크로 액츄에이터의 제작 및 고분자 전극의 상태에 따른 구동성능 (Development and Performance Evaluation of Polymer Micro-actuator using Segmented Polyurethane and Polymer Composite Electrode)

  • 정영대;박한수;조남주;정해도
    • 한국정밀공학회지
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    • 제22권2호
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    • pp.180-187
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    • 2005
  • This paper is focused on the development of the flexible electrode for disc-type polymer actuators using Segmented Polyurethane(SPU). This paper consists of two parts. The one is about the mechanical property such as elastic modulus. these parameters mainly affect behaviors of polymer actuators and the other is about the electro-chemical property such as the surface resistance of the composite electrode affects the strength of electrostatic force, results in the deformation of polymer actuators. The Young's modulus was measured by UTM. As result, by increasing the modulus of a body of polymer actuators, the maximum displacement of polymer actuators are decreased. The surface resistance of the electrode was measured by 4 point probe system. Compared with the conductive silver grease, the displacement of polymer actuators using carbon black(CB) composite electrodes is comparably small but CB composite electrode should be the practical approach for the improvement of the performance of all-solid actuators, compared with another types of electrode materials.