• Title/Summary/Keyword: Electric field assisted

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전기장 광화학 증착법에 의한 직접패턴 비정질 FeOx 박막의 제조 및 저항변화 특성 (Electric-field Assisted Photochemical Metal Organic Deposition for Forming-less Resistive Switching Device)

  • 김수민;이홍섭
    • 마이크로전자및패키징학회지
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    • 제27권4호
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    • pp.77-81
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    • 2020
  • Resistive RAM (ReRAM)은 전이금속 산화물의 저항변화 특성을 이용하는 차세대 비휘발 메모리로 전이금속산화물 내의 산소공공의 재분포를 통한 저항변화 특성을 이용한다. 따라서 저항변화 특성을 위해 전이금속산화물 내에는 일정량 이상의 산소공공이 요구되며 이를 위해서는 박막 형성 공정에서 산화 수를 조절할 수 있는 공정이 필요하다. 본 연구에서는 직접패턴이 가능한 photochemical metal organic deposition (PMOD) 공정을 사용하여 UV 노출에 의해 photochemical metal organic precursor의 ligand가 분해되는 과정에서 전기장을 인가하여 박막내의 산화 수를 조절하는 실험을 진행하였다. Electric field assisted PMOD (EFAPMOD) 법을 이용하여 FeOx 박막의 산화 수 조절이 가능함을 x-ray photoelectron spectroscopy (XPS) 분석과 I-V 측정을 통하여 확인하였으며, EFAPMOD 공정 중 인가하는 전압의 크기를 조절하여 박막의 산화 수를 조절할 수 있음을 확인하였다. 따라서 EFAPMOD 공정 중 인가전압의 크기를 이용하여 저항변화 특성에 적합한 적정한 산화수를 가지는 금속산화물 박막을 얻고 그 저항변화 특성을 조정할 수 있음을 확인하였다.

칼코게나이드 박막에서의 광유기 이방성(PA)의 전계효과 의존성 (Dependence by the electric field effect in the photoinduced anisotropy(PA) of the chalcogenide thin film.)

  • 장선주;박종화;여철호;박정일;이영종;정홍배
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.1500-1502
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    • 2000
  • In this study, we have investigated the photoinduced anisotropy (PA) phenomena by the assisted. electric field effect on $As_{40}Ge_{10}Se_{15}S_{35}$ thin films. Investigation of photoinduced anisotropy on the assisted electric field effect was carried out using a He-Ne laser beams (inducing and probing beams) illuminating the same area of the thin film. To investigate the effect of electric field, various bias voltages applied. The result is shown the photoinduced anisotropy dependence on electric field. Also. we obtained the property of photoinduced anisotropy in the electric field effects by various voltages.

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Laser Assisted PECVD SiN막의 경시적 열화에 관한 시간 의존성의 통계적 고찰 (Statistical Analysis of wear out in electrically stressed Laser Assisted PECVD SiN Films)

  • 김천섭;김용우;이승환;성영권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1990년도 하계학술대회 논문집
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    • pp.177-179
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    • 1990
  • Recently, it is reported that the behaviour of PECVD under high electric field and current condition has a major effect on MNS device degradation. In this paper, we evaluated the breakdown and TDDB characteristics of Laser assisted PECVD SiN films which is introduced new deposited method. And also, long term insulator breakdown reliability is described by examing time dependent dielectric breakdown under positive voltage. Failure tines against electric field are examined and acceleration factors are obtained for each case. From these data, breakdown wearout limitation for Laser Assisted PECVD SiN film can be characterized.

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측면진동보조전계 전기영동 전착방식을 적용한 YBCO 초전도 후막의 제작 (Fabrication of YBCO Superconducting Thick Film by Use of Lateral Shaky Field Assisted EPD Method)

  • 소대화;전용우
    • 한국전기전자재료학회논문지
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    • 제16권11호
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    • pp.1041-1046
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    • 2003
  • In order to improve the surface uniformity and the conduction properties of the fabricated YBCO thick films, a system that applies alternating field vertically to the EPD field has been developed for the first time and applied to the electrophoretic deposition process. The applied alternating electric field, so called Shaky Alternating Assisted Field, caused a force to be exerted on each YBCO particle and resulted in a shaking of the particle in the direction of applied electric field, accomplishing a uniform particle orientation. The usual commercial electrical power was used for the vertically applied alternating voltage and the induced electric field was 25-120 V/cm at 60Hz. The thick film fabricated by the method developed in this paper showed better surface uniformity without crack and porosity and improved film characteristics such as critical temperature (Tc,zero = 90 K) and critical current density (2354 A/$\textrm{cm}^2$), Therefore, it is expected that the shaky-aligned electrophoretic deposition method can be used to fabricate superconductor films through a simpler process and at less expense.

알루미늄과 구리 간 통전고상접합 연구 (A Study on Electrically Assisted Solid State Joining of Aluminum and Copper)

  • 박주원;최호욱;이시환;정혜진;홍성태;한흥남
    • 소성∙가공
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    • 제29권1호
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    • pp.49-54
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    • 2020
  • The influence of electric current on the joining properties of aluminum and copper was investigated. Various pulsed electric current conditions were set to the joining specimens followed by pressure. The shear strength of the joint area between aluminum and copper was measured by the lab shear test. In addition, the microstructures of the joint area were observed through a field emission scanning electron microscope, energy dispersive X-ray, and electron backscatter diffraction. The mechanical properties of each phase in the joint region were measured by nano-indentation. As a result, it was confirmed that electrically assisted solid state joining of copper and aluminum could be applied in various industrial fields.

보조전계를 이용한 전기영동 초전도 막의 제작 (Superconducting film fabrication using field Assisted Electrophoresis)

  • 소대화;전용우
    • 한국전기전자재료학회논문지
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    • 제16권2호
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    • pp.157-162
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    • 2003
  • For fabricating high T$\sub$c/ superconducting deposition film, novel electrophoretic deposition (EPD) technique applied to deposit surface charged particles on metal substrate with only d.c field has been studied. However, the electric properties of superconducting film could not be improved easily by this way, because the particles of EPD film were usually deposited randomly on metal substrate without any directional orientation affected to its critical current density. For the purpose of obtaining partcle orientation on the EPD films, the new method modified by a.c. assisted field to the conventional electrophoresis system was investigated to improve the particle deposition density and to increase the contacting area among the particles with highly oriented particle deposition of BSCCO superconducting film.

전기장에 의한 $Cs^+-Na^+$ 이온교환으로 제작된 유리 광도파로 (Glass optical waveguides made by electric-field-assisted $Cs^+-Na^+$ ion exchange)

  • 김영철;원영희;조두진
    • 한국광학회지
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    • 제9권2호
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    • pp.86-91
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    • 1998
  • 소오다 석회유리를 기판으로 하고 전기장에 의한 $Cs^+-Na^+$ 이온교환으로 다중 모우드 평면 광도파로를 제작하였다. 광도파로의 각 모우드들에 대한 실효굴절률을 측정하였으며 변형 Fermi 함수 모양으로 맞춤한 굴절률 분포형태를 전자 현미분석기로 얻은 농도분포형태와 비교분석하여 설명하였다. 정량적인 분석결과 약 90%의 $Na^+$이온이 $Cs^+$이온으로 치환되었다. 주어진 인가전기장, 확산온도 및 확산시간으로부터 광도파로 깊이, 이동도 및 굴절률 변화를 구하는 식을 세웠다. 이 식에서 성립하는 광도파로의 깊이와 확산시간의 제곱근 사이의 선형관계 및 광도파로의 깊이와 인가전기장 사이의 선형관계를 실험으로 확인하였다.

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수직보조전계 인가방식에 의한 전기영동 전착막의 제작 (Fabrication of EPD Films by Applying a.c Field Assisted Method)

  • 전용우;박성범;소대화
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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    • pp.107-110
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    • 2002
  • The electrophoretic deposition (EPD) technique have been applied to fabricating superconducting films and wires in former researches of our Lab. However, the particles of EPD films were usually deposited random1y on the metal substrate, the vertically combined a.c and d.c fields were applied to the EPD electrodes for orienting and densifying the particles of high $T_{c}$ superconducting deposition film on the substrate metal. Therefore, the surface states of EPD films by this combined fields could be oriented and affect to the electric properties increasing of superconducting films. The proposed method modified by a.c. assisted field to the conventional electrophoresis system was suitable to obtain improved properties with particle oriented deposition and densification.

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Binder-free Tungsten Carbide Fabricated by Pulsed Electric Current Sintering

  • Shimojima, K.;Hosokawa, H.;Nakajima, T.;Mizukami, M.;Yamamoto, Y.
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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    • pp.621-622
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    • 2006
  • In this paper, we show some experimental results of binder-free WC sintered by Pulsed Electric Current Sintering (PECS) also known as Field Assisted Sintering Technology (FAST). These binder-free WC have extremely hardness and stiffness. However, these mechanical properties are dependent on the sintering condition, e.g., maximum temperature, applied pressure, etc. We show some relationship between mechanical properties and sintering condition to improve to sinter the binder-free WC.

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전계효과에 의한 비정질 칼코게나이드 박막에서의 복굴절 특성 (The Birefringence of the chalcogenide As-Ge-Se-S thin films by the electric field effects)

  • 손철호;장선주;여철호;박정일;이영종;정홍배
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.1727-1729
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    • 2000
  • We has investigated the birefringence by the assisted electric field effect on $As_{40}Ge_{10}Se_{15}S_{35}$ thin films. Photoinduced birefringence has been studied in a chalcogenide material. We induced this thin films using linearly polarized He-Ne laser light(633nm) and detected polarized semiconductor laser light(780nm). To investigate the effect of electric field, various bias voltages applied. The result is shown that the birefringence has a higher value in +2V than others. We obtained the birefringence in the electric field effects by various voltages.

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