• Journal of the Semiconductor & Display Technology
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• v.10 no.4
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• pp.139-144
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• 2011

CMP process is an essential element in the semiconductor product processes in Chemical Mechanical Polishing. Taken as a whole, CMP is one process, but concretely, it is a detail process which consists of polishing, cleaning, and so on. Especially, the polishing and cleaning are key points in the whole process. Polishing rate is the most important factor and is related with deposition of slurry in the polishing process. Each outlet velocities is the most important factors in cleaning process. And when the velocities are more uniform, the cleaning becomes more effective. In this research, based on these factors, we performed a numerical analysis for effective polishing and cleaning which can be applied to industrial field. Consequently, we figured out that more than one opened nozzle is more effective than one opened nozzle at the polishing pad in case of this research. And we confirmed that the revised models have the uniform velocity distribution more than the previous model of the cleaning nozzle.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.26-31
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• 2023

We investigated the impact of NF₃ / H₂O remote plasma dry cleaning conditions on the SiO₂ etching rate at different preparation states during the fabrication of ultra-large-scale integration (ULSI) devices. This included consideration of factors like Si crystal orientation prior to oxidation and three-dimensional structures. The dry cleaning process were carried out varying the parameters of pressure, NF₃ flow rate, and H₂O flow rate. We found that the pressure had an effective role in controlling anisotropic etching when a thin SiO₂ layer was situated between Si₃N₄ and Si layers in a multilayer trench structure. Based on these observations, we would like to provide further guidelines for implementing the dry cleaning process in the fabrication of semiconductor devices having 3D structures.

• Journal of the Korean Vacuum Society
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• v.10 no.3
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• pp.298-302
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• 2001

Cleaning effect of RF/DC discharge to clean the surface of vacuum chamber was studied for various discharge conditions. Glow discharge cleaning without baking reduced the outgassing rate to 1/2, which was similar to that after the only baking treatment alone. Glow discharge cleaning treatment with baking improved the cleaning efficiency and then the outgassing rate was remarkably reduced to 1/20. It was found that the ion energy and the ion density were important factors in cleaning the surface. RF discharge cleaning was more effective than BC discharge cleaning.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.9
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• pp.109-115
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• 2008

The cleaning process of contaminant particles adhering to the microchips, integrated circuits (ICs) or the like is essential in modern microelectronics industry. In the cleaning process particularly working with the application of inert gases, the removal of contaminant particles of submicron scale is very difficult because the particles are prone to reside inside the boundary layer of the working fluid, The use of cryogenic $CO_2$ cleaning method is increasing rapidly as an alternative to solve this problem. In contrast to the merits of high efficiency of this process in the removal of minute particles compared to the others, even fundamental parametric studies for the optimal process design in this cleaning process are hardly done up to date, In this study, we attempted to measure the cleaning efficiency with the variations of some principal parameters such as mass flow rate, injection distance and angle, and tried to draw out optimal cleaning conditions by measuring and evaluating an effective cleaning width called $d_{50}$.

• Journal of the Korea Fashion and Costume Design Association
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• v.21 no.4
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• pp.213-220
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• 2019

The dry cleaning effect related to the type of soil and fiber was analyzed using silicone and alcohol-based solvents(ethyl alcohol, isopropyl alcohol, acetone) that are relatively safe for the human body and environment to improve the detergency of hydrophilic soils in dry cleaning system. Based on this analysis, an effective dry cleaning method to be carried out for improving the detergency according to the type of hydrophilic soils. After dry cleaning was performed using 20 types of artificial soiled fabrics consisting of 7 types of fibers and 4 types of hydrophilic soils, the detergency was measured and the results were compared and analyzed by solvents and fiber types. The results are presented as follows; first, the detergency of hydrophilic soils using silicone solvents showed a low rate of detergency. In particular, the tannin soil showed a lower level of detergency compared to the protein soil. Second, the detergency of hydrophilic soils using silicon solvents with dry soap differed in some detergency according to the soil and fiber types. Especially, the detergency of curry soil on cotton fabric showed significant improvement. Third, the protein soil was not removed from dry cleaning using alcohol-based solvents, but the effect of dry cleaning of curry soil on both cotton and polyester fabric was substantially improved. As a result, the elimination of blood soil is more effective in silicon solvents than in alcohol-based solvents. The removal of tannin soils may improve detergency by adding dry soap to silicon solvents or by using alcohol-based solvents as alternative solvents. The use of alternative solvents such as silicon and alcohol solvents can contribute to the environmental improvement of the dry cleaning industry, which uses petroleum-based solvents. It is also expected to provide consumers with the opportunity to choose eco-friendly and efficient dry cleaning methods.

• Corrosion Science and Technology
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• v.15 no.2
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• pp.84-91
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• 2016

The transport and deposition of corrosion products in pressurized water nuclear reactor (PWR) steam generators have led to corrosion (SCC, denting etc.) problems. Lancing, mechanical cleaning and chemical cleaning have been used to reduce these problems. The methods of lancing and mechanical cleaning have limitations in removing corrosion products due to the structure of steam generator tubes. But high temperature chemical cleaning (HTCC) with EDTA is the most effective method to remove corrosion products regardless of the structure. However, EDTA in chemical cleaning aqueous solution and chemical cleaning environments affects the integrity of materials used in steam generators. The nuclear power plants have to perform the pre-test (also called as qualification test (QT)) that confirms the effect on the integrity of materials after HTCC. This is one of the series studies that assess the effect, and this study determines the effects of 20 % EDTA aqueous solution on defective tubes in high temperature chemical cleaning environments. The depth and magnitude of defects in steam generator (SG) tubes were measured by eddy current test (ECT) signals. Surface analysis and magnitude of defects were performed by using SEM/EDS. Corrosion rate was assessed by weight loss of specimens. The ECT signals (potential and depth %) of defective tubes increased marginally. But the lengths of defects, oxides on the surface and weights of specimens did not change. The average corrosion rate of standard corrosion specimens was negligible. But the surfaces on specimens showed traces of etching. The depth of etching showed a range on the nanometer. After comprehensive evaluation of all the results, it is concluded that 20 % EDTA aqueous solution in high temperature chemical cleaning environments does not have a negative effect on defective tubes.

• Journal of Korean Society of Water and Wastewater
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• v.31 no.3
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• pp.229-236
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• 2017

In this study, a direct contact membrane module was manufactured to be used in a pilot scale membrane distillation process to treat $3m^3/day$ of the digestate produced from anaerobic digestion of livestock manure. In order to investigate the performance of the membrane module, permeate flux was measured with and without spacer inside the module under various condition of temperature difference and cross flow velocity (CFV) through the membrane surfaces. Flux recovery rate after chemical cleaning was also investigated by applying three different cleaning methods. Additionally, thermal energy consumption was theoretically simulated based on actual pilot plant operation conditions. As results, we observed flux of the module with spacer was almost similar to the theoretically predicted value because the installation of spacer reduced the channeling effect inside the module. Under the same operating condition, the permeate flux also increased with increasing temperature difference and CFV. As a result of chemical in-line cleaning using NaOCl and citric acid for the fouled membranes, the recovery rate was 83.7% compared to the initial flux when NaOCl was used alone, and 87% recovery rate was observed when only citric acid was used. However, in the case of using only citric acid, the permeate flux was decreased at a rapid rate. It seemed that a cleaning by NaOCl was more effective to recover the flux of membrane contaminated by the organic matter as compared to a cleaning by citric acid. The total heat energy consumption increased with increasing CFV and temperature difference across the membrane. Thus, further studies should be intensively conducted to obtain a high permeate flux while keeping the energy consumption to a minimum for a practical application of membrane distillation process to treat wastewater.

• Membrane Journal
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• v.28 no.1
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• pp.62-66
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• 2018

In this study the cleaning spherical beads with same density as water were fabricated. Bead moving velocity was measured with respect to the aeration rate and bead concentration in water reservoir. The permeation experiments for FR (filtration and relaxation) and SFCO (sinusoidal filtration continuous operation) modes were simultaneously carried out under the condition of 1 to 3% cleaning spherical bead concentration, 20 LMH and 500 mL/min aeration rate in the MLSS 8,000 mg/L activated sludge solution. The used membrane was the $90cm^2$ effective area and $0.4{\mu}m$ nominal pore size flat membrane. The TMP (transmembrane pressure) decreased as the bead concentration increased, and was shown most effective in FR mode with 2% bead concentration.

• Journal of Korean Society of Water and Wastewater
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• v.30 no.5
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• pp.605-612
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• 2016

Membrane bioreactors (MBRs) employ a process of biological treatment that is based on a membrane that has the advantages of producing high-quality treated water and possessing a compact footprint. However, despite these advantages, the occurrence of "fouling" during the operation of these reactors causes the difficulty of maintenance. Hence, in this study, three physical cleaning methods, namely, backwashing, air scrubbing, and mechanical cleaning ball was performed to identify optimum operating conditions through laboratory scale experiments, and apply them in a pilot plant. Further, the existing MBR process was compared with these methods, and the field applicability of a combination of these physical cleaning methods was investigated. Consequently, MCB, direct control of cake fouling on the membrane surface was found to be the most effective. Moreover, as a result of operating with combination of the physical cleaning process in a pilot plant, the TMP increasing rate was found to be - 0.00007 MPa/day, which was 185% higher than that obtained using the existing MBR process. Therefore, assuming fouling only by cake filtration, about one year of operation without chemical cleaning is considered to be feasible through the optimization of the physical cleaning methods.

• Journal of the Architectural Institute of Korea Structure & Construction
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• v.36 no.4
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• pp.163-172
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• 2020

In this study, the effect of window opening, which is a control mechanism for air control in winter high school classrooms, on the change in air and indoor environment of the classroom was analyzed and physical conditions of indoor and air environment were observed during the classroom course, and satisfaction of the students and teachers was assessed with questionnaires. And the changes in air environment were assessed by the performance of the duster cleaning work in the classroom. It was found that 84.6% of the students surveyed said the air was stuffy. And among the alternatives, opening windows all times during class was most effective in reducing CO₂ concentration and PM concentration was measured within classroom's standard. In addition, the concentration change rate of duster cleaning work was reduced by 74.4% and 65.4% of PM10 compared to broom cleaning work.