통합 검색 | Korea Science

Yoon, S.M.;Cheong, W.S.;Hwang, C.S.;Kopark, S.H.;Cho, D.H.;Shin, J.H.;Ryu, M.;Byun, C.W.;Yang, S.;Lee, J.I.;Chung, S.M.;Chu, H.Y.;Cho, K.I.
- 한국정보디스플레이학회:학술대회논문집
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- 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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- pp.222-225
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- 2008
We proposed the dry etching process recipe for the fabrication of In-Ga-Zn-O (IGZO)-based oxide TFTs, in which the etching behaviors of IGZO films were systematically investigated when the etching gas mixtures and their mixing ratios were varied. Good device characteristics of the fabricated TFT were successfully confirmed.
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Lee Byoung-Sun;Lee Sanguk;Mo Hee-Sook;Cho Sungki;Jung Won Chan;Kim Myungja;Kim In-Jun;Kim Tae-Hee;Joo Inone;Hwang Yoola;Kim Jaehoon
- 한국우주과학회:학술대회논문집(한국우주과학회보)
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- 한국우주과학회 2004년도 한국우주과학회보 제13권2호
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- pp.76-76
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- 2004
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Kang, S.G.;Song, M.K.;Park, S.S.;Lee, S.H.;Hwang, N.;Lee, H.T.;Oh, K.R.;Pyun, K.E.
- 한국재료학회:학술대회논문집
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- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- pp.72.1-72
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- 1998
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Kang, S.G.;Song, M.K.;Park, S.S.;Lee, S.H.;Hwang, N.;Lee, H.T.;Oh, K.R.;Pyun, K.E.;Morris Jr., J.W.
- 한국재료학회:학술대회논문집
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- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- pp.72.3-72
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- 1998
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Hyung-Ho ppark;Hyung-Mun Kim;Hee-Tae Lee;Sahn Nahm;Sang-Gi Kim;Joong-Whan Lee;Byong-Hwa Koak;Kyoung-Ik Cho;Young-Il Kang
- 한국진공학회:학술대회논문집
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- 한국진공학회 1993년도 제5회 학술발표회 논문개요집
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- pp.89-90
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- 1993
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