Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1993.07a
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- Pages.89-90
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- 1993
Three Dimensional Analysis of Device Cell Structure
- Hyung-Ho ppark (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
- Hyung-Mun Kim (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
- Hee-Tae Lee (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
- Sahn Nahm (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
- Sang-Gi Kim (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
- Joong-Whan Lee (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
- Byong-Hwa Koak (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
- Kyoung-Ik Cho (Semiconductor Technology Division, ETRI, Taejeon, Korea) ;
- Young-Il Kang (Semiconductor Technology Division, ETRI, Taejeon, Korea)
- Published : 1993.07.01
Abstract
Keywords