• 제목/요약/키워드: EDS Process

검색결과 447건 처리시간 0.022초

Failure Analysis of Filaments of Quadrupole Mass Spectrometer for Plasma Process Monitoring

  • Ha, Sung Yong;Kim, Dong Hoon;Joo, Junghoon
    • Applied Science and Convergence Technology
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    • 제24권5호
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    • pp.142-150
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    • 2015
  • A failure analysis of tungsten filaments used in quadrupole mass spectrometer for plasma process monitoring was carried by using SEM and EDS. Failed at high temperature, filaments showed two kinds of failure modes. The one is that diameter of filament became thinner gradually and finally snapped. The other is that filament abruptly snapped almost at a right angle. The EDS analysis showed Fe and C, including W and Fe, on the surface of failed filament. when failed filaments were treated with plasma in mixture of Ar and $CF_4$, the amount of Fe and C decreased. The failure analysis of filament showed that the cause of filament failure is thermal evaporation and grain growth of tungsten at high temperature.

다이오드 레이저를 이용한 금속 표면 열처리 특성 (Characteristics of Metal Surface Heat Treatment by Diode Laser)

  • 최성대;정선환;김기만;양승철;김잠규
    • 한국기계가공학회지
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    • 제6권3호
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    • pp.16-23
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    • 2007
  • An experimental investigation with diode laser system was carried out to study the effect of surface heat treatment on the die materials(SM45C, SKD11, SK3). The surface heat treatment characteristics of the laser beam are evaluated using hardness tests, optical microscopy, X-ray diffraction and energy dispersive X-ray spectroscopy(EDS). Results indicated that the beam size, focal length, feed rates are changed surface hardened characteristics. SM45C is higher hardness than other materials and composed to martensite grain at hardened zone, whereas other materials(SKD11, SK3)are low hardness than expected and composed to austenite and allayed martensite at hardened zone. The intensive X-ray diffraction patterns of (110)-(200)-(211) is detected hardened surface and the hardened surface distributed plenty of carbon density than metal zone.

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수율향상을 위한 반도체 EDS공정에서의 불량유형 자동분류 (Automatic Classification of Failure Patterns in Semiconductor EDS Test for Yield Improvement)

  • 한영신;이칠기
    • 한국시뮬레이션학회논문지
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    • 제14권1호
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    • pp.1-8
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    • 2005
  • In the semiconductor manufacturing, yield enhancement is an urgent issue. It is ideal to prevent all the failures. However, when a failure occurs, it is important to quickly specify the cause stage and take countermeasure. Reviewing wafer level and composite lot level yield patterns has always been an effective way of identifying yield inhibitors and driving process improvement. This process is very time consuming and as such generally occurs only when the overall yield of a device has dropped significantly enough to warrant investigation. The automatic method of failure pattern extraction from fail bit map provides reduced time to analysis and facilitates yield enhancement. The automatic method of failure pattern extraction from fail bit map provides reduced time to analysis and facilitates yield enhancement. This paper describes the techniques to automatically classifies a failure pattern using a fail bit map.

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성공적인 Web Site-구축 Process

  • 박수범
    • 한국데이타베이스학회:학술대회논문집
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    • 한국데이타베이스학회 2001년도 추계 컨퍼런스: 인터넷 비즈니스 환경에서의 디지털 컨텐츠 기술 발전 및 활용을 위한 컨퍼런스
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    • pp.239-256
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    • 2001
  • 1. 일관성 (Consistency)과 표준화(Standardization) 2. 유용한 피드백의 제공 3 실수에 대한 대응책(Easy Error Handling) 4. 자기 위치정보의 제공(Internal Locus of Control) 5. 단기 기억부담의 최소화(Minimal Memory Load) (중략)

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저진공 분위기 전기방전소결에 의해 제조된 다공성 Ti-6Al-4V 임플란트의 표면특성 연구 (Surface Characteristics of Porous Ti-6Al-4V Implants Fabricated by Electro-Discharge-Sintering in a Low Vacuum Atmosphere)

  • 현창용;허재근;이원희
    • 한국재료학회지
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    • 제16권3호
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    • pp.178-182
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    • 2006
  • A single electro-discharge-sintering (EDS) pulse (1.0 kJ/0.7 g), from a $300{\mu}F$ capacitor, was applied to atomized spherical Ti-6Al-4V powder in a low vacuum to produce porous-surfaced implant compacts. A solid core surrounded by a porous layer was formed by a discharge in the middle of the compact. XPS (X-ray photoelectron spectroscopy) was used to study the surface characteristics of the implant material. C, O, and Ti were the main constituents, with smaller amounts of Al, V, and N. The implant surface was lightly oxidized and was primarily in the form of $TiO_2$ with a small amount of metallic Ti. A lightly etched EDS implant sample showed the surface form of metallic Ti, indicating that EDS breaks down the oxide film of the as-received Ti-6Al-4V powder during the discharge process. The EDS Ti-6Al-4V implant surface also contained small amounts of aluminum oxide in addition to $TiO_2$. However, V detected in the EDS Ti-6Al-4V implant surface, did not contribute to the formation of the oxide film..

Understanding the Material Removal Mechanisms of Abrasive Water Jet Drilling Process by Acoustic Emission Technique

  • Kwak, Hyo-Sung;Kovacevic, Radovan
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 1998년도 춘계학술대회 논문집
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    • pp.40-52
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    • 1998
  • Among the non-traditional machining methods, Abrasive waterjet machining process shows big promise in drilling difficult-to-machine materials due to its numerous advantages such as absence of heat affect zone and thermal distortion. Acoustic emission signal technique is used to understand about material removal mechanisms during abrasive waterjet drilling process. More information about the drilling process is derived through frequency decomposition of auto regressive moving average modeling representing acoustic emission signals.

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Fabrication and Characterization of Composite LSCF-Ag Cathode for Solid Oxide Fuel Cells using Electron Beam Irradiation Process

  • Kang, Hyun Suk;Jung, Yung-Min;Song, Rak-Hyun;Peck, Dong-Hyun;Park, ChangMoon;Lee, Byung Cheol
    • Bulletin of the Korean Chemical Society
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    • 제35권10호
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    • pp.2969-2973
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    • 2014
  • A new process to fabricate a composite LSCF-Ag cathode material for SOFCs by electron beam (e-beam) irradiation process has been suggested for operation under intermediate temperature range of $600-700^{\circ}C$. A composite LSCF-Ag cathode with uniformly coated Ag nanoparticles on the surface of the LSCF material was prepared by a facile e-beam irradiation method at room temperature. The morphology of the composite LSCF-Ag material was analyzed using a TEM, FE-SEM, and EDS. The prepared composite LSCF-Ag material can play a significant role in increasing the electro-catalytic activities and reducing the operating temperature of SOFCs. The performance of a tubular single cell prepared using the composite LSCF-Ag cathode, YSZ electrolyte and a Ni/YSZ anode was evaluated at reduced operating temperature of $600-700^{\circ}C$. The micro-structure and chemical composition of the single cell were investigated using a FE-SEM and EDS.

전기방전소결에 의해 제조된 다공성 Titanium 임플란트의 기계적 특성 (Mechanical Properties of Electro-Discharge-Sintered Porous Titanium Implants)

  • 현창용;허재근;이원희
    • 한국재료학회지
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    • 제16권3호
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    • pp.173-177
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    • 2006
  • Porous surfaced Ti implant compacts were fabricated by electro-discharging-sintering (EDS) of atomized spherical Ti powders. Powders of $50-100{\mu}m$ in diameter were vibratarily settled into a quarts tube and subject to a high voltage and high density current pulse in Ar atmosphere. Single pulse of 0.7 to 2.0 kJ/0.7 gpowder, from 150, 300, and $450{\mu}F$ capacitors was applied in less than $400{\mu}sec$ to produce twelve different porous-surfaced Ti implant compacts. The solid core formed in the center of the compact shows similar microstructure of cp Ti which was annealed and quenched in water. Hardness value at the solid core was much higher than that at the particle interface and particles in the porous layer, which can be attributed to both heat treatment and work hardening effects induced by EDS. Compression tests were made to evaluate the mechanical properties of the EDS compacts. The compressive yield strength was in a range of 12 to 304MPa which significantly depends on input energy. Selected porous-surfaced Ti-6Al-4V dental implant compacts with a solid core have much higher compressive strengths compared to the human teeth and sintered Ti dental implants fabricated by conventional sintering process.

Tire Industry and Its Manufacturing Configuration

  • Lee, Young-Sik;Cpim;Lee, Jin-Kyu
    • 한국경영과학회:학술대회논문집
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    • 대한산업공학회/한국경영과학회 2000년도 춘계공동학술대회 논문집
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    • pp.135-138
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    • 2000
  • This paper is intended to propose what manufacturing configuration (manufacturing planning and shop floor control) is suitable for the tire industry. Basically tire-manufacturing process is mixed-products, parallel-disconnected-flow-shop. Both throughput time and cycle tine are very short, the variety of tires is very high, the setup time is long, shop floor data reporting requirements is high, and there are many equipments and people working. And with no exception, tire industry also now confronts increasing requirements of delivery conformance with the above peculiar characteristics of tire manufacturing and changing market environments, this paper suggests, weekly master scheduling with no MRP is desirable and traditional kanban is right selection for shop floor control/scheduling. This paper describes why this configuration should be, using the manufacturing engineering principles and some new insights like four primitives of parallel flow shop. Generally known that shop with high parallel-product-mix and long setup time isn't good candidate for kanban. The four primitives of parallel flow shop explain why kanban is also useful scheduling technique in that environment.

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Rietveld 정밀화법과 SEM-EDS 분석에 의한 DPF용 코디어라이트 하니컴 세라믹스의 결정성장 과정 분석 (Characterization of crystal phase evolution in cordierite honeycomb for diesel particulate filter by using rietveld refinement and SEM-EDS methods)

  • 채기웅;김강산;김정석;김신한
    • 한국결정성장학회지
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    • 제31권3호
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    • pp.116-126
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    • 2021
  • 코디어라이트(Mg2Al4Si5O18) 하니컴 세라믹스의 대표적 응용분야는 자동차 배기가스 정화용 필터(diesel particulate filter(DPF))이다. 천연광물, 조공제, 유기바인더를 혼합한 슬러리를 압출하여 DPF용 하니컴 코디어라이트를 성형한 후 980~1450℃ 범위에서 소결하였다. 소결온도에 따른 결정상(indialite, cordierite, cristobalite, alumina, spinel, mullite, pro-enstatite)의 형성과정을 XRD Rietveld 정밀화법을 이용하여 정량분석 하였다. 동시에, 세라믹 에칭(etching) 방법으로 소결 시료 표면의 비정질상을 제거한 후 SEM/EDS법을 사용하여 결정상들의 형상과 조성을 확인하였다. 이들 결과로부터 DPF 하니컴에서 결정상 형성 과정을 명확히 밝힐 수 있었다. 또한, DPF 하니컴의 소결온도에 따른 열팽창계수(linear coefficient of thermal expansion, CTE) 변화를 분석하였고, 결정상의 정량분석결과를 바탕으로 계산된 CTE와 비교하였다. 소결된 DPF 하니컴 내의 결정상들이 CTE 특성에 미치는 영향을 고찰하였다.