• Ceramist
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• v.9 no.6
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• pp.24-29
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• 2006

Electron beam physical vapor deposition (EB-PVD) process has currently been applied to thermal barrier coatings (TBCs) for aircraft engines. Due to unique columnar structure, EB-PVD TBCs have advantages in resistances to thermal shock and thermal cycle for their applications, compared to films prepared by plasma spray By the EB-PVD equipment, we successfully obtained yttria-stabilized zirconia (YSZ) layer which has columnar and feather like structure including a large amount of nano size pores and gaps. The EB-PVD technique has been developed for coating functional perovskite type oxides such as (La, Sr)MnO3. Electrode properties have been improved by interface and structural control.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.193.2-193.2
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• 2014

열차폐 코팅(Thermal Barrier Coating)은 주로 항공기 엔진이나 화력발전용 터빈 등의 $1300^{\circ}C$ 이상의 고온에서 사용되는 부품에 적용되어 모재(내열합금)의 손상 방지 및 에너지 효율 향상을 위해 사용되고 있다. 열차폐 코팅의 경우 Plasma Spray 공법과 EB-PVD(전자빔 물리 증착법) 공법이 가장 많이 사용되고 있다. Plasma Spray에 의한 열차폐 코팅 공정은 생산 비용이 저렴하고 수평형 적층 구조를 통한 높은 열전도율을 가지는 장점이 있으며, EB-PVD 공정은 수직형 구조의 열차폐막을 통해 내열 충격성과 내열 사이클성이 양호하다는 장점이 있다. 본 연구에서는 열 사이클의 내구성이 뛰어난EB-PVD를 이용하여 열차폐 코팅 공정연구를 진행하였다. 본 연구소에서 사용하고 있는 EB-PVD 는 종래의 장치와는 달리 70 kW급 전자총 5기가 장착 되어 있으며, 각각 시편 가열용 전자총 2기 및 피코팅용 가열 전자총 3기로 구성되어 있다. 이런 구성을 통해 다양한 종류의 열차폐 박막과 높은 결정성과 치밀도를 가지는 박막 형성할 수 있을 것이다. 본 발표에서는 EB-PVD 공정 연구결과 및 향후 실용화를 위한 개발 연구 방향에 대해서 기술하였다.

• Journal of the Korean Ceramic Society
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• v.42 no.2 s.273
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• pp.117-122
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• 2005

Electron Beam Physical Vapor Deposition (EB-PVD) is a typical technology for thermal barrier coating with Yttria Stabilized Zirconia (YSZ) on aero gas turbine engine. In this study EB-PVD method was used to fabricate dense YSZ film on NiO-YSZ as a electrolyte of Solid Oxide Fuel Cell (SOFC). Dense YSZ films of -10 $\mu$m thickness showed nano surface structure depending on deposition temperature. Electrical conductivities of YSZ film and electric power density of the single cell were evaluated after screen- printing $LaSrCoO_3$ as a cathode.

• Journal of the Korean institute of surface engineering
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• v.36 no.6
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• pp.423-429
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• 2003

It has been investigated corrosion resistance and crystal structure of Zn-Cr coatings fabricated by electroplating method and electron-beam physical vapor deposition method(EB-P VD). The electroplated Zn-Cr alloy consists mainly of η'-Zn phase for the lower Cr content than 7.9 wt% Cr and ${\gamma}$'-ZnCr phase for the higher Cr content. In the Zn-Cr alloy fabricated by EB-PVD the ${\gamma}$'-ZnCr phase appeared clearly at 3 wt% Cr and it became the sole phase at 50 wt%Cr. The amount of η'-Zn phase decreased obviously with increasing Cr content when it exceeded 15 wt% Cr. The electrochemical measurement of the electroplated Zn-Cr film has shown corrosion potential of about -1000 mV. The current density of active region and the amount of dissolved Zn and Cr decreased significantly with increasing Cr content. The electrochemical characteristics of Zn-Cr alloy fabricated by EB-PVD have shown that the alloy of 50 wt% Cr had the highest corrosion potential(-500 mV) and the lowest critical passive current density than that of the electroplated.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.213-213
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• 2012

In this study, effect of EB-PVD coated Si/HA film thickness on surface characteristics of Ti-35Nb-10Zr alloy was investigated. The Ti-35Nb-10Zr alloy was fabricated by arc melting method. The Si/HA layers were coated with 0.8 wt.% of Si in pure HA by EB-PVD method. The coating thickness was consisted with 100 - 300 nm for each group, the surface characteristics was analyzed by FE-SEM, EDS, XRD, XRF and corrosion test. The Si/HA coating layer was well deposited on the alloy surface by EB-PVD, the thickness was correlative factor with HA peaks and corrosion resistance value.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 1998.05a
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• pp.17-17
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• 1998

• Journal of the Korean institute of surface engineering
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• v.34 no.3
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• pp.195-205
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• 2001

The surface characteristics of Ti/TiN films coated on sintered stainless steels (SSS) by electron beam physical vapour deposition (EB-PVD) were investigated. Stainless steel compacts containing 2, 4, and 10wt%Cu were prepared by the electroless Cu-plating method, which results in increased homogenization in the alloying powder. The specimens were coated with Ti and TiN with a 1.0$\mu\textrm{m}$ thickness respectively by EB-PVD. The microstructures were investigated using scanning electron microscopy (SEM). The corrosion behaviors were investigated using a potentiosat in 0.1 M $H_2$$SO_4$, and 0.1M HCl solutions and the corrosion surface was observed using SEM and XPS. The Ti coated specimens showed rough surface compared to Ti/TiN coated specimens. Ti and Ti/TiN coated SSS revealed a higher corrosion and pitting potential from anodic polarization curves than that of Ti and Ti/TiN uncoated SSS. In addition, Ti/TiN coated SSS containing 10wt% Cu exhibited good resistance to pitting corrosion due to the formation of a dense film on the surface and the decrease in interconnected porosity by electroless coated Cu.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2002.05a
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• pp.50-50
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• 2002

탄소 박막은 내마모, 화학적 생물학적 적합성 둥의 특성으로 언하여 많은 연구자들레 의하 여 연구되어지고 있다. 그러나 탄소 박막의 경우 높은 잔류응력과 이에 따른 낮은 밀착력으 로 언하여 증착 두께에 제한이 되어왔다. EB-PVD법을 이용하여 탄소막을 증착하는 경우 이러한 문제점을 해결하기 위하여 탄소막에 제 2의 금속원소를 첨가하거나 화합물 형태의 증착원 이용, 복합공정 (Hybrid process)을 통하여 증착 두께 의 제 한을 극복하고자 하는 연 구가 계속되고 있다. 본 연구에서는 탄소막의 잔류응력 제어와 증착 두께를 높이기 위하여 Plasma Activated E E-Beam Evaporation을 통하여 탄소막을 증착하였다. 탄소막 증착시 잔류응려과 밀착력에 대한 플라즈마의 영향올 알아보기 위하여 RF 플라즈마의 인업 전력에 따라 실험을 수행하였으며 필라멘트 전자 방출원을 이용하여 플라즈마 밀도가 미치는 영향도 알아보았다.

• Journal of the Korean institute of surface engineering
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• v.27 no.2
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• pp.91-98
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• 1994

For the plasma sprayed as well as the EB-PVD thermal barrier coatings, the fracture paths within the oxidation products developed at the interface between the partially stabilized zirconia ceramic coating and NiCoCrAlY bond coat during cyclic thermal oxidation has been investigated. It was observed that the fracture in the oxidation products primarily took place within the oxide such as $Ni_{1-x}Co_3(Al_,Cr)_2O_4$ or at the interface between the oxide and $Al_2O_3$. It was found that Al2O3 developed first, followed by the Ni/Co/Cr rich oxides such as ,,$Ni_{1-x}Co_x(Al_,Cr)_2O_4$ $Cr_2O_3$and NiO at the interface between the ceramic coating and the bond coat in a cyclic high temperature environment. It was therfore concluded that the formation of the oxide containing Ni, Cr and Co was a life-limiting event for thermal barrier coatings during cyclic thermal oxidation.

• Journal of the Korean institute of surface engineering
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• v.39 no.4
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• pp.147-152
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• 2006

Failure mechanisms of electron beam physical vapor deposited thermal barrier coatings(EB-PVD TBCs) that occur during thermal cyclic oxidation were investigated. The investigations include microstructural degradation of NiCrAIY bond coat, thermally grown oxides(TGOs) along the ceramic top coat-substrate interface and fracture path within TBCs. The microstructural degradation of the bond coat during cyclic oxidation created Al depleted zones, resulting in reduction of NiAl and ${\gamma}$-Ni solid solution phase. It was observed that the fracture took placed primarily within the TGOs or at the interfaces between TGOs and bond coat.