• 제목/요약/키워드: E-beam

검색결과 1,953건 처리시간 0.028초

나노패턴 성형을 위한 금속 나노 스탬퍼 제작 (Fabrication of metallic nano-stamper to replicate nanoscale patterns)

  • 김영규;이동철;강신일
    • 한국소성가공학회:학술대회논문집
    • /
    • 한국소성가공학회 2003년도 춘계학술대회논문집
    • /
    • pp.481-484
    • /
    • 2003
  • In this study, we fabricated the master metallic nano-stamper with nano pillar patterns to apply replication processes which is adequate for mass production. Master nano patterns with various hole diameters between 300 nm and 1000 nm was fabricated by e-beam lithography. After the seed layer was deposited on the master nano patterns using e-beam evaporation, the nickel was electroformed. In each step, the shape and surface roughness of their patterns were analyzed using SEM and AFM.

  • PDF

E-beam Irradiated Fragmentation of Thio-Alkyne Cobaltcarbonyl Complex in Gas Phase as Alkyne Precursor

  • Lee, Young Bae;Hwang, Kwang-Jin
    • Rapid Communication in Photoscience
    • /
    • 제5권2호
    • /
    • pp.16-17
    • /
    • 2016
  • Arylalkyne cobalt complexes 5, 6 were prepared and irradiated with e-beam to study their fragmentation focused in alkyne formation. Thioaryl complex 6 showed facile CO ligand release and generated parent alkyne in 89% relative intensity. Meanwhile, hydroxyaryl complex 5 gave alkyne in 6% relative intensity.

E-beam 증착에 의해 제작된 Al-Mg 코팅층의 다양한 특성 (Various Properties of Al-Mg Films Fabricated by E-beam deposition)

  • 정재훈;양지훈;송민아;김성환;정재인
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2015년도 춘계학술대회 논문집
    • /
    • pp.27-27
    • /
    • 2015
  • 아연(Zn)을 대체할 수 있는 물질계 인 알루미늄(Al)과 마그네슘(Mg)을 본 연구에서는 E-beam 증착을 이용하여 냉연강판 위에 코팅하고 열처리를 실시하여 전자현미경 및 X-선 회절분석을 이용한 코팅층의 특성 분석 및 염수분무시험을 통해 내식성을 평가하였다.

  • PDF

나노패터닝을 위한 고에너지 전자빔 리소그래피 시뮬레이터 개발 및 검증 (A Simulator for High Energy E-beam Lithography for Nano-Patterning)

  • 김진광;김학;한창호;전국진
    • 대한전자공학회:학술대회논문집
    • /
    • 대한전자공학회 2004년도 하계종합학술대회 논문집(2)
    • /
    • pp.359-362
    • /
    • 2004
  • Electron beam on high energy acceleration, which travels deeply and sharply through photoresist, became to be used in e-beam lithography apparatus for nano-patterning in due to its high resolution. An advanced electron beam lithography simulation tool is currently undergoing development for nano-patterning. This paper will demonstrate such simulation efforts with experiments at 200 keV e-beam lithography processes on PMMA, ZEP520 of which photoresist parameters and characteristics will be explained with simulation results. Neureuther parameters was extracted from the contrast curve of the resist

  • PDF

전자빔 가공기용 자기 렌즈의 자기장 제어구조 설계 (Design and Analysis of Magnetic Field Control in Electron Lenses for a E-Beam Writer)

  • 노승국;이찬홍;백영종
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 2004년도 추계학술대회 논문집
    • /
    • pp.401-404
    • /
    • 2004
  • The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. To achieve small spot size as 1-2 nm for higher power of electron beam, magnetic lenses should be designed considering their magnetic field distribution. In this paper, the magnetic field at two condenser lenses and object lens are calculated with finite element method and discussed its performances.

  • PDF

강판 및 섬유쉬트로 보강된 철근콘크리트 보의 매개변수 분석 (Parameter Study on R.C. Beam Strengthened with Steel Plate and Fiber Sheet)

  • 유영준;박종섭;박홍석;정우태
    • 한국전산구조공학회:학술대회논문집
    • /
    • 한국전산구조공학회 2001년도 봄 학술발표회 논문집
    • /
    • pp.138-145
    • /
    • 2001
  • This paper presents F.E.M. analysis result about the behavior of R.C. beam repaired with steel plate and fiber sheet. The effect of repairing varies with reinforcement ratio of R.C. beam, plate thickness, numbers of fiber sheet, and repairing length, etc. F.E.M. analysis using a program, DIANA, was carried out taking these factors as parameter in this study. Analysis result shows that repaired R.C. beam behaves differently according to parameters and certain cases imply that repairing is useless or may lay structure in dangerous condition. F.E.M. model considers that interfacial behavior between different two parts of repaired beam is rigid based on an assumption that adhesive failure does not appear before yielding of reinforcement and its analysis shows the result coincides with that of experiment.

  • PDF

Damage detection in beam-type structures via PZT's dual piezoelectric responses

  • Nguyen, Khac-Duy;Ho, Duc-Duy;Kim, Jeong-Tae
    • Smart Structures and Systems
    • /
    • 제11권2호
    • /
    • pp.217-240
    • /
    • 2013
  • In this paper, practical methods to utilize PZT's dual piezoelectric effects (i.e., dynamic strain and electro-mechanical (E/M) impedance responses) for damage detection in beam-type structures are presented. In order to achieve the objective, the following approaches are implemented. Firstly, PZT material's dual piezoelectric characteristics on dynamic strain and E/M impedance are investigated. Secondly, global vibration-based and local impedance-based methods to detect the occurrence and the location of damage are presented. Finally, the vibration-based and impedance-based damage detection methods using the dual piezoelectric responses are evaluated from experiments on a lab-scaled beam for several damage scenarios. Damage detection results from using PZT sensor are compared with those obtained from using accelerometer and electric strain gauge.

Atomically sculptured heart in oxide film using convergent electron beam

  • Gwangyeob Lee;Seung-Hyub Baek;Hye Jung Chang
    • Applied Microscopy
    • /
    • 제51권
    • /
    • pp.1.1-1.2
    • /
    • 2021
  • We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO3 grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO3/crystalline SrTiO3.

Influence of constraint MgO deposition onto phosphors on luminance properties in AC Plasma Display Panels

  • Jeoung, Jin-Man;OH, P.Y.;Moon, M.W.;Lee, J.H.;Jeong, J.E.;Lee, H.J.;Han, Y.K.;Lee, S.B.;Jeong, S.H.;Yoo, C.K.;Yoo, N.R.;Choi, E.H.;Ko, B.D.
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
    • /
    • pp.1215-1217
    • /
    • 2005
  • One of the important problems in recent AC-PDP technology is the image sticking. In this research, we have investigated the PDP cell with constraint deposition MgO on phosphor, the electrical and optical properties in the PDP cell were examined. Also, we have investigated the correlation with image sticking and degraded MgO protective layer, phosphor in AC-PDP. As a result, we measured the secondary electron emission coefficient ${\gamma}$, discharge characteristics and Brightness for the constraint degraded phosphor are compared with those of nondegraded phosphor.

  • PDF