• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.33 no.2
• /
• pp.99-104
• /
• 2020

In this study, we fabricated a metamorphic high-electron-mobility transistor (mHEMT) device with a T-type gate structure for the implementation of W-band monolithic microwave integrated circuits (MMICs) and investigated its characteristics. To fabricate the mHEMT device, a recess process for etching of its Schottky layer was applied before gate metal deposition, and an e-beam lithography using a triple photoresist film for the T-gate structure was employed. We measured DC and RF characteristics of the fabricated device to verify the characteristics that can be used in W-band MMIC design. The mHEMT device exhibited DC characteristics such as a drain current density of 747 mA/mm, maximum transconductance of 1.354 S/mm, and pinch-off voltage of -0.42 V. Concerning the frequency characteristics, the device showed a cutoff frequency of 215 GHz and maximum oscillation frequency of 260 GHz, which provide sufficient performance for W-band MMIC design and fabrication. In addition, active and passive modeling was performed and its accuracy was evaluated by comparing the measured results. The developed mHEMT and device models could be used for the fabrication of W-band MMICs.

• Proceedings of the Korean Society of Medical Physics Conference
• /
• 2005.04a
• /
• pp.59-63
• /
• 2005

Respiration motion causes movement of internal structures in the thorax and abdomen, making accurate delivery of radiation therapy to tumors in those areas a challenge. Accounting for such motion during treatment, therefore, has the potential to reduce margins drawn around the clinical target volume (CTV), resulting in a lower dose to normal tissues (e.g., lung and liver) and thus a lower risk of treatment induced complications. Among the techniques that explicitly account for intrafraction motion are breath-hold, respiration gating, and 4D or tumor-tracking techniques. Respiration gating methods periodically turn the beam on when the patient's respiration signal is in a certain part of the respiratory cycle (generally end-inhale or end-exhale). These techniques require acquisition of some form of respiration motion signal (infrared reflective markers, spirometry, strain gauge, thermistor, video tracking of chest outlines and fluoroscopic tracking of implanted markers are some of the techniques employed to date), which is assumed to be correlated with internal anatomy motion. In preliminary study for the respiratory gating radiation therapy, we performed to measurement of this respiration motion signal. In order to measure the respiratory motion signals of patient, respiration measurement system (RMS) was composed with three sensor (spirometer, thermistor, and belt transducer), 4 channel data acquisition system and mobile computer. For two patients, we performed to evaluation of respiratory cycle and shape with RMS. We observed under this system that respiratory cycle is generally periodic but asymmetric, with the majority of time spent. As expected, RMS traced patient's respiration each other well and be easily handled for application.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.296-296
• /
• 2014

We investigate experimentally and theoretically the splitting of surface plasmon (SP) resonance peaks under TE- and TM-polarized illumination. The SP structure at infrared wavelength is fabricated with a 2-dimensional square periodic array of circular holes penetrating through Au (gold) film. In brief, the processing steps to fabricate the SP structure are as follows. (i) A standard optical lithography was performed to produce to a periodic array of photoresist (PR) circular cylinders. (ii) After the PR pattern, e-beam evaporation was used to deposit a 50-nm thick layer of Au. (iii) A lift-off processing with acetone to remove the PR layer, leading to final structure (pitch, $p=2.2{\mu}m$; aperture size, $d=1.1{\mu}m$) as shown in Fig. 1(a). The transmission is measured using a Nicolet Fourier-transform infrared spectroscopy (FTIR) at the incident angle from $0^{\circ}$ to $36^{\circ}$ with a step of $4^{\circ}$ both in TE and TM polarization. Measured first and second order SP resonances at interface between Au and GaAs exhibit the splitting into two branches under TM-polarized light as shown in Fig. 1(b). However, as the incidence angle under TE polarization is increased, the $1^{st}$ order SP resonance peak blue-shifts slightly while the splitting of $2^{nd}$ order SP resonance peak tends to be larger (not shown here). For the purpose of understanding our experimental results qualitatively, SP resonance peak wavelengths can be calculated from momentum matching condition (black circle depicted in Fig. 2(b)), $k_{sp}=k_{\parallel}{\pm}iG_x{\pm}jG_y$, where $k_{sp}$ is the SP wavevector, $k_{\parallel}$ is the in-plane component of incident light wavevector, i and j are SP coupling order, and G is the grating momentum wavevector. Moreover, for better understanding we performed 3D full field electromagnetic simulations of SP structure using a finite integration technique (CST Microwave Studio). Fig. 1(b) shows an excellent agreement between the experimental, calculated and CST-simulated splitting of SP resonance peaks with various incidence angles under TM-polarized illumination (TE results are not shown here). The simulated z-component electric field (Ez) distribution at incident angle, $4^{\circ}$ and $16^{\circ}$ under TM polarization and at the corresponding SP resonance wavelength is shown in Fig. 1(c). The analysis and comparison of theoretical results with experiment indicates a good agreement of the splitting behavior of the surface plasmon resonance modes at oblique incidence both in TE and TM polarization.

• The Journal of Korean Institute of Communications and Information Sciences
• /
• v.34 no.4A
• /
• pp.324-329
• /
• 2009

In this paper, a novel Snowflake-shaped microstrip patch antenna for application in the WLAN(5.2/5.8GHz) band is designed and fabricated. The size of antenna is $21.2{\times}16mm^2$ and substrate is used Taconic-RF30. To obtain sufficient bandwidth in Return loss <-10dB and dual resonance characteristic, the Short-pin is inserted on the patch and the coaxial probe source is used. The measured results of fabricated antenna show 220MHz and 135MHz bandwidth in Return loss <-10dB referenced to the WLAN(5.2/5.8GHz) band. The measured antenna gain is $4.7{\sim}6.9dBi$ in the WLAN(5.2/5.8GHz) band. The experimental 3-dB beam width in I-plane and H-plane are $73.2^{\circ}/82.75^{\circ}$ for 5.1500Hz, $74.56^{\circ}/83.63^{\circ}$ for 5.3500Hz, and $86.24^{\circ}/85.15^{\circ}$ for 5.7850Hz, respectively.

• Journal of the Korea Concrete Institute
• /
• v.21 no.5
• /
• pp.619-628
• /
• 2009

To predict the time-dependent behavior of concrete structures, the models which describe the time-dependent characteristics of concrete, i.e. creep and shrinkage are required. However, there must be significant differences between the displacements that are obtained using the given creep and shrinkage models and the measured displacements, because of the uncertainties of creep and shrinkage model itself and those of environmental condition. There are some efforts to reduce these error or uncertainties by using the model which are obtained from creep test for the concrete in construction site. Nevertheless, the predicted values from this model may be still different from the actual values due to the same reason. This study aimed to propose a method of estimating the creep coefficient from the measured displacements of concrete structure, where creep model uncertainty factor was considered as an error factor of creep model. Numerical validation for double composite steel box and concrete beam showed desirable feasibility of the presented method. Consideration of the time-dependent characteristics of creep as one of the error factors make it possible to predict long-term behaviors of concrete structures more realistically, especially long-span PSC girder bridges and concrete cable-stayed bridges of which major problem is the geometry control under construction and maintenance.

• Economic and Environmental Geology
• /
• v.41 no.6
• /
• pp.747-761
• /
• 2008

In order to experiment the acoustic remote classification of seabed sediment, we achieved ground-truth data(i.e. video and grab samples, etc.) and developed post-processing for automatic classification procedure on the basis of 300 kHz MultiBeam Echo Sounder(MBES) backscattering data, which was acquired using KONGBERG Simrad EM3000 at Sock-Cho Port, East Sea of South Korea. Sonar signal and its classification performance were identified with geo-referenced video imagery with the aid of GIS (Geographic Information System). The depth range of research site was from 5 m to 22.7 m, and the backscattering amplitude showed from -36dB to -15dB. The mean grain sizes of sediment from equi-distanced sampling site(50 m interval) varied from 2.86$(\phi)$ to 0.88(\phi). To acquire the main feature for the seabed classification from backscattering amplitude of MBES, we evaluated the correlation factors between the backscattering amplitude and properties of sediment samples. The performance of seabed remote classification proposed was evaluated with comparing the correlation of human expert segmentation to automatic algorithm results. The cross-model perception error ratio on automatic classification algorithm shows 8.95% at rocky bottoms, and 2.06% at the area representing low mean grain size.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.08a
• /
• pp.211-212
• /
• 2010

GaN 기반의 상부발광형 LED는 동작되는 동안 생기는 전기적 단락, 그리고 칩 위의 p-형 전극과 n-형 전극 사이에 생기는 누설전류 및 신뢰성 확보를 위하여 칩 표면에 passivation 층을 형성하게 된다. SiO2, Si3N4와 같은 passivation layers는 일반적으로 PECVD (Plasma Enhanced Chemical Vapor Deposition)공정을 이용한다, 하지만 이는 공정 특성상 plasma로 인한 damage가 유발되기 때문에 표면 누설 전류가 증가 한다. 이로 인해 forward voltage와 reverse leakage current의 특성이 저하된다. 본 실험에서는 원자층 단위의 박막 증착으로 인해 PECVD보다 단차 피복성이 매우 우수한 PEALD(Plasma Enhanced Atomic Layer Deposition)공정을 이용하여 Al2O3 passivation layer를 증착한 후, 표면 누설전류와 빛의 출력 특성에 대해서 조사해 보았다. PSS (patterned sapphire substrate) 위에 성장된 LED 에피구조를 사용하였고, TCP(Trancformer Copled Plasma)장비를 사용하여 에칭 공정을 진행하였다. 이때 투명전극을 증착하기 위해 e-beam evaporator를 사용하여 Ni/Au를 각각 $50\;{\AA}$씩 증착한 후 오믹 특성을 향상시키기 위하여 $500^{\circ}C$에서 열처리를 해주었다. 그리고 Ti/Au($300/4000{\AA}$) 메탈을 사용하여 p-전극과 n-전극을 형성하였다. Passivation을 하지 않은 경우에는 reverse leakage current가 -5V 에서 $-1.9{\times}10-8$ A 로 측정되었고, SiO2와 Si3N4을 passivation으로 이용한 경우에는 각각 $8.7{\times}10-9$과 $-2.2{\times}10-9$로 측정되었다. Fig. 1 에서 보면 알 수 있듯이 5 nm의 Al2O3 film을 passivation layer로 이용할 경우 passivation을 하지 않은 경우를 제외한 다른 passivation 경우보다 reverse leakage current가 약 2 order ($-3.46{\times}10-11$ A) 정도 낮게 측정되었다. 그 이유는 CVD 공정보다 짧은 ALD의 공정시간과 더 낮은 RF Power로 인해 plasma damage를 덜 입게 되어 나타난 것으로 생각된다. Fig. 2 에서는 Al2O3로 passivation을 한 소자의 forward voltage가 SiO2와 Si3N4로 passivation을 한 소자보다 각각 0.07 V와 0.25 V씩 낮아지는 것을 확인할 수 있었다. 또한 Fig. 3 에서는 Al2O3로 passivation을 한 소자의 output power가 SiO2와 Si3N4로 passivation을 한 소자보다 각각 2.7%와 24.6%씩 증가한 것을 볼 수 있다. Output power가 증가된 원인으로는 향상된 forward voltage 및 reverse에서의 leakage 특성과 공기보다 높은 Al2O3의 굴절률이 광출력 효율을 증가시켰기 때문인 것으로 판단된다.

• Journal of the Society of Naval Architects of Korea
• /
• v.29 no.4
• /
• pp.202-213
• /
• 1992

For the analysis and design of ship structures the generalized slope deflection method(GSDM) taking account of axial elongation effect as well as the bending and shearing deformation is developed. Using the span point concept, the existing slope deflection method is easy to transform the variable section to the equivalent uniform one under the bending moment and the shear force, but it is difficult to analyze the web frame with inclined members because the axial deformation effect is not considered. In the present method, the equilibrium conditions including all force components(i.e. axial force, shear force, bending moment) are formulated at the both ends of the variable section beam, such that the usual space frame stiffness equation which can be solved easily by the matrix method is derived. The accuracy and applicability of the present method is demonstrated by analyzing the ship web frame structures.

• Journal of Korean Society of Steel Construction
• /
• v.28 no.2
• /
• pp.109-120
• /
• 2016

Flexural tests of full-scale concrete-filled U-shape hybrid composite beams were conducted. Ordinary (SS400) and high-strength (SM570) steel plates were used in the web and in the bottom flange of U-shape steel section respectively. The primary objectives were to develop the hybrid section configuration with maximized flexural capacity and to investigate its flexural strength and deformation capacity. All the hybrid test specimens in this study exhibited the plastic moment capacity and resonable deformability. It is shown that the plastic stress distribution can be assumed in calculating the flexural strength of the proposed hybrid composite beams if the plastic neural axis is located within 15% of the total beam depth from the top of the composite slab. The procedure for computing the effective flexural stiffness of hybrid composite beams is also recommended based on test results.

• 한국신재생에너지학회:학술대회논문집
• /
• 2011.11a
• /
• pp.52.1-52.1
• /
• 2011

최근에 에너지 자원의 고갈이 다가오는 상황에서 태양전지 분야가 주목받고 있으며 이에 대한 시장이 급격하게 확대되고 있다. 그러나 현재의 태양전지는 주를 이루고있는 실리콘태양전지의 경우 원재료 수급이 불안정하여 가격 변동이 심하다. 따라서 이를 대체할 2세대 태양전지인 박막형 태양전지의 연구가 활발히 이루어지고 있다. 박막형 태양전지 중에서도 주목받고 있는 것은 Cu(In,Ga)$Se_2$(CIGS)박막 태양전지이다. CIGS는 Ga의 농도에 따라 1.02~1.68eV의 다양한 에너지 밴드갭을 갖는 직접천이형 반도체 물질이다. 또한 $1{\times}10^5cm^{-1}$의 높은 광흡수계수를 가지고 있으며, $450{\sim}590^{\circ}C$의 고온공정에서도 매우 안정하여 열화현상이 거의 보이지 않아 박막형 광흡수층 재료로서 적합하다. 흡수층을 제조하는 방법은 여러 가지가 있지만, 본 연구에서는 균일성이 뛰어나고 원료사용효율이 높은 sputtering 방법을 사용하였다. 그리고 결정화하기위해서 유독기체를 사용하는 셀.렌.화. (selenization) 방법 대신 전자빔을 조사하는 방법을 채택하였다. sputtering을 통한 CIGS precursor을 제조하기위해 2~3개의 화합물target을 사용하는데, 대표적인 방법으로 동시에 sputtering하는 co-sputtering 방법과 각각의 단일 층을 쌓아 제조하는 stack형으로 분류된다. 본 연구는 CIGS precursor를 제조하기 앞서 CuGa 단일 층만을 제조하여 공정조건에 따른 박막을 제조하였다. 제조된 CuGa 단일층은 전자빔 처리에 따른 영향을 알아보기 위해 전자빔의 세기와 공정시간을 달리하여 특성을 알아보았다. 실험에서는 Cu:75wt%,Ga:25wt% 조성의 target을 사용하여 공정 압력을 각각 10~1mTorr로 변화시키며 실험을 실시하였으며 공정 power는 50W, 70W, 100W로 변화 시키며 실험을 실시하였다. 이때 실험의 초기진공은 turbo-molecular pump를 이용하여 $1{\times}10^{-6}torr$ 이하로 하였으며, Target과 기판사이의 거리는 모두 같은 조건으로 고정하여 실험을 실시하였다. 박막의 균일성을 증가시키기 위하여 5 rpm의 속도로 기판을 회전하였으며 기판 온도는 가열하지 않고 상온에서 전구체를 증착하였다. 그 후 전자빔의 세기를 고정 시킨 후 전자빔 조사 시간을 조절하여 전자빔 조사 전후의 특성을 각각 분석하였다. 전기적특성은 Hall effect, 4-point probe, 구조적 특성은 SEM,EDS, XRD, XRF 를 이용하여 분석하였다.