• 한국소음진동공학회논문집
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• 제17권10호
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• pp.967-975
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300 rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through 3-D FE analysis and experimental modal analysis. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of lateral and torsional critical speeds, and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, unbalance responses under various unbalance locations, and torsional interference diagram. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• 한국소음진동공학회논문집
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• 제21권12호
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• pp.1112-1119
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• 2011

The goal of this study is the stability evaluation of a vacuum pump through modal test and rotor dynamics. Roots type vacuum pump, which is a dry vacuum pump, is necessary for the manufacturing process of the semiconductor and the display. Eigenvalue was solved by the finite-element method(FEM) using 2D and 3D models, then the modal test result was compared with the FEM result. According to the comparison, the analysis result using the 2D was more accurate than the 3D model. Therefore, rotor dynamics was performed by the 2D model. Campbell diagram and root-locus maps, which were calculated by complex-eigenvalue analysis, were used to evaluate the stability of the rotors of the vacuum pump. And displacement solved by unbalance response analysis was compared with the minimum clearance between two rotors of the vacuum pump. Thus, the vacuum pump is assumed operated under steady state through the evaluation of the rotor dynamics.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제34회 동계학술대회 초록집
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• pp.265-265
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• 2008

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2011년도 추계학술대회 논문집
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• pp.264-270
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• 2011

The goal of this study is a stability evaluation through eigenvalue and rotor dynamics analysis of the vacuum pump. The vacuum pump used is a roots type pump, one of the dry middle vacuum pumps, is necessary at the procedure to produce semiconductor and display. The eigenvalue evaluation is solved by numerical analysis through using Modal test and 2D 3D models. Both the experiment and the analysis result are similar, the analysis result using 2D is more oculate the 3D model comparing with test result. So rotor dynamic evaluation is performed through using 2D model. Rotor dynamic evaluation used the campbell diagram and root locus map which were acquired by complex eigenvalue analysis. And we checked minimum clearance of vacuum pump composition between two rotors through unbalance response analysis. Thus, vacuum pump, the target object of this study, was evaluated to be operated stably.

• Applied Science and Convergence Technology
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• 제24권2호
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• pp.27-32
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• 2015

We analyzed the destruction patterns of a turbo-molecular pump (TMP) resulting from its sudden exposure of a foreline to the atmospheric pressure due to a destruction of the foreline connecting clamp of an ICP dry etcher for 300 mm wafers during high-vacuum operation ($5{\times}10^{-6}$ Torr). Unlike in the case of view port's breakage, the TMP's rotor module was crashed inside the chamber. The primary damage resulted from the collision of the blades and stators, and the secondary damage resulted from the breaking of the rotor - driving shaft assembly. The fixing screws of the rotor and axial shaft were bent and broken when the TMP controller output the maximum current even after the crash event. Electrical power consumption analysis of the TMP power controller confirmed it. The stress distributions were analyzed by a finite element method using CFD-ACE+ multi physics software. Rotating inertia of each parts and kinetic energies were calculated as well. 68% of the rotational kinetic energy is deposited by the rotor - shaft module.

• 한국안전학회지
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• 제22권4호
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• pp.32-36
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• 2007

When the vacuum system for the process of $SiH_{4}$ gas used in the semiconductor and FPD field is partially vented from vacuum to atmospheric state, a fire often occurs due to auto-ignition of $SiH_{4}$ gas. In order to prevent the fire, the concentration of $SiH_{4}$ should be kept under LFL. This means that the higher capacity pump is needed to meet the process conditions as well as the condition that the concentration of $SiH_{4}$ should be kept under LFL. In this article, we conducted the injection of the dilution gas at the manifold between booster pump and dry pump compared with the typical method that the dilution gas was injected into inlet port of booster pump using computer simulation. According to the result, we can flow further more purge gas for safety without any change of the condition in the process chamber, which means that the higher capacity pump is not required for safety in some cases.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.1313-1316
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• 2006

Demands of high volume dry vacuum pumps on the domestic semiconductor and LCD industries are rapidly increasing as the size of wafers and LCD is increasing. This study introduces a new experimental setup for testing the reliability of vacuum pumps. The test system was designed to measure the acoustic pressure and mechanical vibration levels simultaneously. It is shown that the test system enables the analysis and evaluation of the performance of dry pumps under the different gas-load conditions. Detailed experimental result are shown to enable us to examine the characteristics and performance of dry pumps.

• 한국태양에너지학회 논문집
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• 제26권4호
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• pp.9-16
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• 2006

Geothermal-energy has been getting popular as a natural energy source for green buildings these days. Public building with gross area more than $3000m^2$, planned after March, 2005, should spend about 5% of total building cost for equipment run by natural energy source (e.g. geothermal, solar heat, solar power, etc) according to renewable energy promotion law in Korea. As a result geothermal-energy using heat pump system is emerging as a effective alternative for realistic and economic plan although design guidelines and construction code for the system is in progress and technical data is far from sufficient. The quantitative analysis on the performance of geothermal-energy using heat pump system is insufficient for appropriate design of it. In this paper, cooling performance of geothermal-energy using heat pump system of residential and retail etc. mixed-use building has been analyzed on the basis of temperature comparison between inlet and outlet of heat exchangers of the operating system. Additionally, dry-bulb temperature and relative humidity have been measured and analyzed together as an index of indoor thermal environment.

• 설비공학논문집
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• 제22권12호
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• pp.852-858
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• 2010

In an absorption chiller, solution is circulated by a solution pump with an inverter to vary flow rate depending on operating conditions. For optimal operation, the solution level in the high temperature generator should be kept constant. However, a sensor for measuring continuous level is not available because of varying solution concentration. Instead, level switches are used and hence feedforward control associated with limit checking is a common practice. In the study, inverter frequencies are estimated from a dynamic simulation model and pump performance. Designed frequencies are compared with those implemented in real chillers. It was found that the frequencies used in real chillers are larger than those needed in circulation flow rates. It was intended to prevent system shut-off caused by dry-out. However, it is necessary to minimize the excessive frequency setting in order to reduce frequent pump stops and the range of solution level for continuous pump operation.

• 한국지열·수열에너지학회논문집
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• 제13권4호
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• pp.8-13
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• 2017

The effects of operational conditions of cooling water system on energy consumption for central cooling system are researched by using TRNSYS program. Cooling tower water pump flow rate, cooling tower fan flow rate, and condenser water temperature with various dry-bulb and wet-bulb temperatures are varied and their effects on total and component power consumption are studied. If the fan maximum flow rates of cooling tower is decreased, cooling tower fan and total power consumptions are increased. If the cooling tower water pump maximum flow rates is decreased, chiller and total power consumptions are increased. If condenser water set-point temperature is increased, chiller power consumption is increased and cooling tower fan power consumption is decreased, respectively.