Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)

  • 2006.05a
  • /
  • Pages.1313-1316
  • /
  • 2006
  • /
  • 1598-2548(pISSN)
The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
권호 표지

A study of acoustic and vibration character of High volume dry vacuum pumps

대용량 건식 진공펌프의 음향.진동 특성 연구

  • 신윤상 (전북대학교 대학원 메카트로닉스공학과) ;
  • 정완섭 (한국표준과학연구원 역학그룹 음향진동) ;
  • 홍동표 (한국표준과학연구원 진공기술연구랩) ;
  • 임종연 (전북대학교 기계공학부) ;
  • 김세환 (전북대학교 기계공학부)
  • Published : 2006.05.01
Download PDF
⟨ Previous Next ⟩

Abstract

Demands of high volume dry vacuum pumps on the domestic semiconductor and LCD industries are rapidly increasing as the size of wafers and LCD is increasing. This study introduces a new experimental setup for testing the reliability of vacuum pumps. The test system was designed to measure the acoustic pressure and mechanical vibration levels simultaneously. It is shown that the test system enables the analysis and evaluation of the performance of dry pumps under the different gas-load conditions. Detailed experimental result are shown to enable us to examine the characteristics and performance of dry pumps.

Keywords