• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.315-318
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• 2001

The optical and dielectric properties of TiO$_2$ thin films prepared with mixtures of Epoxy, bits-(4, 4'-p-toluenesulfonylacidic isoproplylidene)-cyclohexadiol and UVI 6990 in dry sol-gel process were investigated. The absorption peak of the films was showed at 360nm. Photocurrent of the thin films doped with 50 wt% of TiO$_2$was higher than that of nondoped thin films. Energy gap was lowered from 3.6 to 3.3 eV with increasing amount of TiO$_2$. Relative dielectric constants of samples were 1.5 to 3 and showed a characteristics of lower dielectric materials.

• Journal of the Korean Ceramic Society
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• v.34 no.11
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• pp.1187-1197
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• 1997

Dry gel composed of primary particles more homogeneous than starting boehmite powder was prepared by dispersing and gelling the boehmite powder. The transformation temperatures of boehmite powder, dry gel seeded with 0, 1, 3, 5 wt% $\alpha$-Al2O3, and ball milled gel were 1192$^{\circ}C$, 1184$^{\circ}C$, 1141$^{\circ}C$, 1119$^{\circ}C$, 1117$^{\circ}C$, and 1106$^{\circ}C$, respectively. Sintering behavior of dry gel without seed was similar to that of boehmite powder, but the sintered density of dry gel was improved as much as 10%~15% than boehmite powder. In the case of dry gel seeded with 5 wt% $\alpha$-Al2O3, sintering behavior was much improved. The relative density of the gel seeded with 5 wt% $\alpha$-Al2O3 was 96% when sintered at 140$0^{\circ}C$ for 1h. On the other hand, ball milling of the non-seeded sol for 48h resulted in the relative density of 97% when sintered at 130$0^{\circ}C$ for 1h. The size and amount of $\alpha$-Al2O3 particles added by ball milling were 0.107 ${\mu}{\textrm}{m}$ and 0.5 wt%.

• Journal of the Korean Ceramic Society
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• v.30 no.7
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• pp.535-542
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• 1993

It was investigated in this study that a preparation method, activation energy, surface area, pore volume, pore size distribution and DTA analysis of the dry gel in process of producing monolithic porous gel in Li2O-Al2O3-TiO2-SiO2 system by the sol-gel technique using metal alkoxides. Activation energy for gellation according to the variation of water concentration and the kind of catalysts ranged from 10 to 20kcal/mole. Monolithic dry gels were prepared after drying at 9$0^{\circ}C$ when the amount of water for gellation was 4~8 times more than the stoichiometric amount, that was necessary for the full hydrolysis of the mixed metal alkoxide. The specific surface area, the pore volume, the average pore radius of the dried gel at 18$0^{\circ}C$ according to the various kinds of catalyst were about 348~734$m^2$/g, 0.35~0.70ml/g and 10~35$\AA$, respectively. It showed that the dry gels were porous body. As a result ofthe analysis of DTA, it was confirmed that the exothermaic peaks at 715$^{\circ}C$ and 77$0^{\circ}C$ was clue to the crystallization of dried gel.

• Journal of the Korean Ceramic Society
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• v.40 no.2
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• pp.153-158
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• 2003

Self-patterning of thin films using photosensitive sol solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. In this study,$La_{0.5}SR_{0.5}CoO_3$(LSCO) thin films as an electrode material for ferroelectric memories have been prepared by spin coating method using photosensitive sol solution. La-2methoxyethoxide, Sr-ethoxide, Co-2methoxyethoxide were used as starting materials. As UV exposure time to the LSCO gel thin film increased, the UV absorption peak intensity of metal${beta}$-diketonate decreased due to reduced solubility by M(metal)-O-M bond formation. Solubility difference by UV irradiation on LSCO gel thin film allows to obtain a fine patterning of thin film. The LSCO thin films annealed over$680{\circ}C$ in air showed perovskite phase and the lowest resistivity$(4{ imes}10^{-3}{Omega}cm)$ of the thin films were obtained by annealing at$740{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.32 no.4
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• pp.507-515
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• 1995

The monolithic dry gels of the Li2O-Al2O3-TiO2-SiO2 system were prepared by the sol-gel technique using metal alkoxides as starting materials to obtain monolithic glass-ceramics at low temperature without melting. Activation energy for the crystal growth of the gel with 6.05% TiO2, nucleating ageng, for the preparation of Li2O-Al2O3-TiO2-SiO2 system glass-ceramic was 101.14kcal/mol. As a result of the analysis of DTA & XRD, it was confirmed that the crytallization of Li2O-Al2O3-TiO2-SiO2 system glass-ceramic was the most efficient when 6.05% TiO2, nucleating agent, was added. $\beta$-eucryptite solid solution crystals and $\beta$-spodumene solid solution crystals were detected in the sample heat treated above 85$0^{\circ}C$. The sintered gel heat treated at 85$0^{\circ}C$ had the specific surface area of 185$m^2$/g, the pore volume of 0.19cc/g and the average pore radius of 20.8$\AA$. This shows that the sintered gel is also comparatively porous material. In temperature range of 25~85$0^{\circ}C$ thermal expansion coefficient of the specimen which was crystallized for 10hrs at 85$0^{\circ}C$ was 6.7$\times$10-7/$^{\circ}C$, which indicated that the crystallized specimen was turned out to be the glass-ceramic with low thermal expansion.

• Journal of the Korean Ceramic Society
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• v.35 no.1
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• pp.66-78
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• 1998

the microstructure and mechanical properties of seeded and ball-milled dry gels prepared by boehmite sol-gel method were discussed. The densification of seeded gels was improved with increasing seed content namely the number of seed The number of seed was 1.09, 3.35, 5.72${\times}$1012/cm3 boehmite when seeded with 1, 3, 5wt% respectively The ball milled gel contained about 0.5wt% seed and the number of seed was 4.72${\times}$1012/cm3 boehmite. The sintered density of 5wt% seeded gel was below 80% when sintered at 1300$^{\circ}C$ for 1h. On the other hand that of ball milled gel was very improved and reached to 97% In the case of 3wt% seeded gels the density over 97% was attained when sintered at 1500$^{\circ}C$for 1h. and the grain of the sintered body was several micrometers in size. However the sintered body of ball milled gel showed grain size of submicrometer when sintered at 1300$^{\circ}C$ for 1h. And this specimen showed highest harness value of 1900kg/mm2 The fracture toughness increased with increasing sintering temperature. The sintered body of ball milled gel showed the largest grain size and the highest fracture toughness without regard to sint-ering temperature.

• Journal of the Korean Ceramic Society
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• v.39 no.8
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• pp.750-757
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• 2002

Self-patterning of thin films using photosensitive sol solution has advantages such as simple manufacturing process compared to photoresist/dry etching process. In this study, ferroelectric $Sr_{0.9}Bi_{2.1}Ta_2O_9$ thin films have been prepared by spin coating method using photosensitive sol solution. Strontium ethoxide, tertramethylheptanedionato bismuth and tantalum ethoxide were used as starting materials. As UV exposure time to the SBT thin film increased, the UV absorption peak intensity of metal ${\beta}$-diketonate decreased due to reduced solubility by M-O-M bond formation. Solubility difference by UV irradiation on SBT thin film allows to obtain a fine patterning of thin film. Also, The ferroelectric properties of the UV irradiated SBT thin films were superior to those of the no-UV irradiated films.

• Journal of the Korean Ceramic Society
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• v.30 no.3
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• pp.169-174
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• 1993

The porous silica glass prepared by the sol-gel method from the mixed solution of Si(OCH3)4, H2O, HCl and CH3OH with HCONH2 as a DCCA (Drying Control Chemical Additives). For investigation the characteristics of gels and glasses, we examined gels and glasses using TG-DTA, XRD, IR, SEM and porosimeter. The more content of formamide in the mixed solution increased, the more pore size and porosity of gel increased. In the excess formamide added gel, the properties of pore of gel were not so changed. The porous silica glass was prepared from the dry gel after heat treatment at 75$0^{\circ}C$. Porosity and mean pore size of the porous silica glass was 17~25% and 40~60$\AA$ relatively.

• Transactions on Electrical and Electronic Materials
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• v.3 no.1
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• pp.42-45
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• 2002

Properties of lead zirconate titanate ferroelectric thin films prepared by rapid thermal annealing/direct insertion thermal annealing were investigated. The remnant polarization (Pr), saturation polarization (Ps), and coercive force (Ec) of typical samples annealed by rapid thermal annealing (RTA) are about 13.7 $\mu$ C/cm$^2$, 27.1 $\mu$C/cm$^2$, and 55.6 kV/cm, respectively. The dielectric constant of the sample is about 786, the dielectric loss tangent is about 2.4% at 1 kHz. Furthermore, ferroelectric, conduction, and piezoelectric properties of the thin films annealed by RTA process and the direct insertion thermal annealing (DITA) process were compared. The influence of temperature in the dry process on the above properties was also investigated.

• Journal of the Korean Ceramic Society
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• v.38 no.9
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• pp.794-798
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• 2001

$Y_{2-x}SiO_5:Ce_x^{3+}$(x=0.002∼0.04) phosphors were prepared by sol-gel process, amorphous crystal phase was observed in calcining dry gel at 800$^{\circ}$C, but pure $X_2$ type of type $Y_2SiO_5$ phase appeared from heat treatment above 1000$^{\circ}$C. Light absorption of tye $Y_2SiO_5$ host lattice occurred at 230∼360nm, and light absorption of the $Y_{2-x}SiO_5:Ce_x^{3+}$ phosphors was observed at 300∼400nm in adding $Ce^{3+}$. $Y_{2-x}SiO_5:Ce_x^{3+}$ phosphors showed maximum emission shoulder at 436nm. Maximum CL intensities of $Y_{2-x}SiO_5:Ce_x^{3+}$ were observed in adding 0.025 $Ce^{3+}$ and the phosphor showed x=0.161, y=0.124 in color coordinate of CIE1931.