Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Optical and dielectric Properties of $TiO_2$ hybrid thin films by dry sol-gel processing

Dry Sol-Gel법에 의한 $TiO_2$ hybrid 박막의 광학특성 및 유전특성에 관한 연구

  • 정재훈 (부경대학교 공과대학 전자공학과) ;
  • 조종래 (부경대학교 공과대학 전자공학과) ;
  • 손세모 (부경대학교 화상정보공학부 인쇄정보공학과) ;
  • 정수태 (부경대학교 공과대학 전자공학과)
  • Published : 2001.07.01
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Abstract

The optical and dielectric properties of TiO$_2$ thin films prepared with mixtures of Epoxy, bits-(4, 4'-p-toluenesulfonylacidic isoproplylidene)-cyclohexadiol and UVI 6990 in dry sol-gel process were investigated. The absorption peak of the films was showed at 360nm. Photocurrent of the thin films doped with 50 wt% of TiO$_2$was higher than that of nondoped thin films. Energy gap was lowered from 3.6 to 3.3 eV with increasing amount of TiO$_2$. Relative dielectric constants of samples were 1.5 to 3 and showed a characteristics of lower dielectric materials.

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