• 한국정밀공학회지
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• 제28권2호
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• pp.245-250
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• 2011

A high-resolution shadow mask, a nanostencil, is widely used for high resolution lithography. This high-resolution shadowmask is often fabricated by a combination of MEMS processes and focused ion beam (FIB) milling. In this study, FIB milling on 500-nm-thin SiN membrane was tested and characterized. 500 nm thick and $2{\times}2$ mm large membranes were made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 60 nm could be made into the membrane. The nanostencil could be used for nanoscale patterning by local deposition through the apertures.

• Journal of Magnetics
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• 제16권2호
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• pp.104-107
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• 2011

In the present study, we systematically investigated the effect of mechanical milling on the magnetic properties of $Sm_2Fe_{17}N_x$ powders produced by the reduction-diffusion process. The Sm-Fe powders obtained by the reduction-diffusion process were composed of an $Sm_2Fe_{17}N_x$ single phase. After nitrogenation, the coercivity and saturation magnetization of the powders were 0.48 kOe and 13.32 kG, respectively. The particle size largely decreased down to less than $2\;{\mu}m$ in diameter after ball milling for 30 hours. However, there is no evidence that the $Sm_2Fe_{17}N_x$ was decomposed to Sm-N and ${\alpha}$-Fe even after ball milling for 30 hours. The coercivity was significantly improved up to 8.82 kOe after milling for 60 hours. However, the magnetization decreased linearly with the ball milling time.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.871-874
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• 2004

Fabrication of a high-resolution shadow mask, or called nanostencil, is presented. This high-resolution shadowmask is fabricated by a combination of MEMS processes and focused ion beam (FIB) milling. 500 nm thick and 2x2 mm large membranes are made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. Subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to high resolution of FIB milling process, nanoscale apertures down to 70 nm could be made into the membrane.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1811-1815
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• 2003

Investigated is the relationship between tool deflection and geometrical accuracy in side wall machining. Form error is predicted directly from the tool deflection without surface generation. Developed model can predict the surface form error about three hundred times faster than the previous method. Cutting forces and tool deflection are calculated considering tool geometry, tool setting error, and machine tool stiffness. The characteristics and the difference of generated surface shape in up milling and down milling are discussed. The usefulness of the presented method is verified from a set of experiments under various cutting conditions generally used in die and mold manufacture. This study contributes to real time surface shape estimation and cutting process planning for the improvement of geometrical accuracy.

• 한국재료학회지
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• 제14권10호
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• pp.743-748
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• 2004

Modified Ni/YSZ cermets for high temperature electrolysis were synthesized by the direct ball milling of Ni and YSZ powder. The ball milling was carried out in dry process and in ethanol with varying milling time. While the dry-milling decreased the average size from 65 to $80{\mu}m$, the wet-milling decreased the average size down to $10{\mu}m$. In addition, very fine particles less than $0.1{\mu}m$ were observed in the wet-milling condition. The subsequent process of cold-pressing and sintering at $900^{\circ}C$ for 2 h did not affect the particle size of dry-milled powder. The electrical conductivity of the dry-milled Ni/YSZ cermet showed the value of $5{\times}10^{2}\;S/cm$ and this value was increased to $1.4{\times}10^{4}\;S/cm$ after the sintering at $900^{\circ}C$ for 2 h.

• 한국기계가공학회지
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• 제1권1호
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• pp.5-14
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• 2002

Hemisphere shapes were machined for different tool paths and machining conditions with ball endmill cutters. It was also found out how feedrate affect the precision of the machining and also tried to study the most suitable feedrate in specific cutting condition. Tool deflection, cutting forces and shape accuracy were measured according to the inclination position of the sculptured surface. As the decreasing of inclination position angle, the tool deflection was increased due to the decreased cutting speed when the cutting edge is approaching toward the center. Tool deflection when upward cutting IS obtained less than that of downward cutting and down-milling in upward cutting showed the least tool deflection for the sculptured surface. For down-milling, the cutting resistance of the side wall direction is larger than that of feed direction. It was found that the tool deflection is getting better as tool path is going to far from the center for convex surface.

• 한국정밀공학회지
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• 제22권5호
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• pp.167-174
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• 2005

High-speed machining is one of the most effective technologies to improve productivity Because of the high speed and high feed rate, high-speed machining can give great advantages for the machining of dies and molds. This paper describes on the analysis and evaluation of cutting force in high-speed machining. Cutter rotation directions, slope directions, spindle revolution and depth of cut are control factors for cutting force. The effect of the control factors on cutting force is investigated for the high speed machining of STD11.

• 한국정밀공학회지
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• 제12권11호
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• pp.45-51
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• 1995

In order to suggest the proper cutting conditons of the CNC milling machining for the free-form surface, some experments were carried out. In the experiments, the influence of cutting conditions on a inclined spherical surface were examined by geometrical analysis. In this study, the roundness and cutting force were measured to know the effect of several cutting conditions on the machined surface and the cutting characteristics were carefully investigated. The results obtained in this study are aw follows. 1) If the tool ha s enough rigidity, we can get better dimensional accuracy in up-ward cutting than down- ward cutting. 2) A great roundness error is appeared on the surface declined under 30 degress to the horizontal plane in circular machining by a bal end mill. 3) If the thrust force is increased, the stability of tool is decreased. And the phenomenon is apperared in great in down-ward cutting than up-ward cutting.

• 한국생산제조학회지
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• 제20권3호
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• pp.232-238
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• 2011

In the present study, Taguchi method is used to determine the rough region first, followed by RSM technique to determine the exact optimum value during milling on a machining center. A region reducing algorithm is applied to narrow down the region of the Taguchi method for RSM. The result from the Taguchi method is fed to train the artificial neural network (ANN), whose optimum value is used to drive the region reducing algorithm. The proposed algorithm is tested under different cutting condition and results show that the introduced algorithm works well during milling process. It is also shown that theoretically obtained optimal cutting condition is very close to experimentally obtained result.

• 한국정밀공학회지
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• 제21권6호
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• pp.43-51
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• 2004

A method for form error prediction in side wall machining with a flat end mill is suggested. Form error is predicted directly from the tool deflection without surface generation by cutting edge locus with time simulation. Developed model can predict the surface form error about three hundred times faster than the previous method. Cutting forces and tool deflection are calculated considering tool geometry, tool setting error and machine tool stiffness. The characteristics and the difference of generated surface shape in up milling and down milling are discussed. The usefulness of the presented method is verified from a set of experiments under various cutting conditions generally used in die and mold manufacturing. This study contributes to real time surface shape estimation and cutting process planning for the improvement of form accuracy.