• Title/Summary/Keyword: Double wet process

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Facilitation of the four-mask process by the double-layered Ti/Si barrier metal for oxide semiconductor TFTs

  • Hino, Aya;Maeda, Takeaki;Morita, Shinya;Kugimiya, Toshihiro
    • Journal of Information Display
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    • v.13 no.2
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    • pp.61-66
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    • 2012
  • The double-layered Ti/Si barrier metal is demonstrated for the source/drain Cu interconnections in oxide semiconductor thin-film transistors (TFTs). The transmission electromicroscopy and ion mass spectroscopy analyses revealed that the double-layered barrier structure suppresses the interfacial reaction and the interdiffusion at the interface after thermal annealing at $350^{\circ}C$. The underlying Si layer was found to be very useful for the etch stopper during wet etching for the Cu/Ti layers. The oxide TFTs with a double-layered Ti/Si barrier metal possess excellent TFT characteristics. It is concluded that the present barrier structure facilitates the back-channel-etch-type TFT process in the mass production line, where the four- or five-mask process is used.

Analysis of Coating Flow Characteristics in Wet-on-Wet Optical Fiber Liquid Coating Process (광섬유 WOW 액상코팅 공정의 코팅액 유동특성 해석연구)

  • Kim, Kyoungjin;Park, Joong-Youn
    • Journal of the Semiconductor & Display Technology
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    • v.16 no.4
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    • pp.91-96
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    • 2017
  • In this computational study of optical fiber manufacturing, WOW (wet-on-wet) double coating process on freshly drawn glass fiber has been numerical modelled and simulated using a simplified geometry of typical optical fiber coating apparatus. The numerical domain includes primary and secondary coating dies along with secondary coating cup and the interface between primary and secondary coating liquids are investigated using level set method. Coating liquid viscosity is an important parameter and its dependence on temperature is also considered. Since there would be possibility for pressure and temperature of primary coating liquid to be increased substantially at high fiber drawing speed, the effects of increased pressure and temperature of primary coating liquid are examined on flow patterns of coating liquids in secondary coating cup. In case that both pressure and temperature of primary coating liquid are high enough, liquid interface becomes noticeably unstable and this flow instability could adversely affect the uniform coatings and final quality of produced optical fiber.

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Numerical Study of Secondary Coating Die Geometry Effects on High Speed Optical Glass Fiber Coating Process (광섬유 2차 코팅다이 형상 변화에 따른 유리섬유 고속 코팅공정 영향성 해석연구)

  • Kim, Kyoungjin;Park, Joong-Youn
    • Journal of the Semiconductor & Display Technology
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    • v.18 no.3
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    • pp.12-18
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    • 2019
  • The protective double layer polymer coatings on silica optical fibers are realized by wet-on-wet liquid coating process and they play an important role in final quality of mass produced optical fibers. This numerical study aims to analyze the effects of secondary coating die design parameters by employing two dimensional axisymmetric model of coating cup and coating die geometry and computational fluid dynamics simulations which include temperature dependent viscosity of polymer coating liquids and viscous dissipation heating. Under high speed fiber drawing conditions and pressurized coating liquid supply, the effects of converging die angle are investigated in order to appreciate the change of coating liquid flow patterns such as flow recirculation zone near coating die as well as primary and secondary coating layer thicknesses. The auxiliary coating die to converging coating die is also tested and the results find that this concept is advantageous in achieving stable double layer coatings on silica glass fiber.

Estimation of Input Material Accounting Uncertainty With Double-Stage Homogenization in Pyroprocessing

  • Lee, Chaehun;Kim, Bong Young;Won, Byung-Hee;Seo, Hee;Park, Se-Hwan
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.20 no.1
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    • pp.23-32
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    • 2022
  • Pyroprocessing is a promising technology for managing spent nuclear fuel. The nuclear material accounting of feed material is a challenging issue in safeguarding pyroprocessing facilities. The input material in pyroprocessing is in a solid-state, unlike the solution state in an input accountability tank used in conventional wet-type reprocessing. To reduce the uncertainty of the input material accounting, a double-stage homogenization process is proposed in considering the process throughput, remote controllability, and remote maintenance of an engineering-scale pyroprocessing facility. This study tests two types of mixing equipment in the proposed double-stage homogenization process using surrogate materials. The expected heterogeneity and accounting uncertainty of Pu are calculated based on the surrogate test results. The heterogeneity of Pu was 0.584% obtained from Pressurized Water Reactor (PWR) spent fuel of 59 WGd/tU when the relative standard deviation of the mass ratio, tested from the surrogate powder, is 1%. The uncertainty of the Pu accounting can be lower than 1% when the uncertainty of the spent fuel mass charged into the first mixers is 2%, and the uncertainty of the first sampling mass is 5%.

Modeling of Stochastic Process Noises for Kinematic GPS Positioning (GPS 이동측위를 위한 프로세스 잡음 모델링)

  • Chang-Ki, Hong
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.33 no.2
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    • pp.123-129
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    • 2015
  • The Kalman filter has been widely used in the kinematic GPS positioning due to its flexibility and efficiency in computational points of view. At the same time, the relative positioning technique also provided the high precision positioning results by removing the systematic errors in the measurements significantly. However, the positioning quality may be degraded following to longer in baseline length. For this case, it is required that the remaining atmospheric effects, such as double-difference ionospheric delay and zenith wet delay, should be properly modeled by examining the characteristics of the stochastic processes. In general, atmospheric effects are estimated with the assumption of random walk, or the first-order Gauss-Markov stochastic process, which requires the precise modeling on the corresponding process noises. Therefore, we determined and provided the parameters for modelling the process noises for atmospheric effects. The auto-correlation functions are empirically determined at first, and then the parameters are extracted from the empirical auto-correlation function. In fact, the test results can be either applied directly, or used as guidance values for the modeling of process noises in the kinematic GPS positioning.

Investigation of Wet Chemical Etching for Surface Texturing of Multi-crystalline Silicon Wafers (다결정 실리콘 웨이퍼의 표면 텍스쳐링을 위한 습식 화학 식각에 대한 연구)

  • Kim, Bum-Ho;Lee, Hyun-Woo;Lee, Eun-Joo;Lee, Soo-Hong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.19-20
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    • 2006
  • Two methods that can reduce reflectance in solar cells are surface texturing and anti-reflection coating. Wet chemical etching is a typical method that surface texturing of multi-crystalline silicon. Wet chemical etching methods are the acid texturization of saw damage on the surface of multi-crystalline silicon or double-step chemical etching after KOH saw damage removal too. These methods of surface texturing are realized by chemical etching in acid solutions HF-$HNO_3$-$H_2O$. In this solutions we can reduce reflectance spectra by simple process etching of multi-crystalline silicon surface. We have obtained reflectance of 27.19% m 400~1100nm from acidic chemical etching after KOH saw damage removal. This result is about 7% less than just saw damage removal substrate. The surface morphology observed by microscope and scanning electron microscopy (SEM).

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5, 10, $20\;{\mu}m$ Silicon Diaphgrams and Features Fabricated without Using An Etch Stop (에치스탑을 사용하지 않고 제작된 5, 10, $20\;{\mu}m$ 두께의 실리콘 박막과 구조물)

  • Kwon, Yonung-Shin;Cho, Dong-Il
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1977-1979
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    • 1996
  • Single-crystaIline silicon diaphgrams and features are fabricated without using an etch stop process. The process involves vertical dry etching, double-sided alignment, followed by wet-chemical etching from the back side. The abvantages of this process are that $5{\sim}50{\mu}m$ diaphgrams and features can be fabricated accurately and inexpensively. In addition, since no impurity-based process is introduced, highly uniform and homogenous properties can be achieved

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The preparation of Pb(Zr0.53Ti0.47)O3 powders for low temperature densification (저온 소결성이 우수한 Pb(Zr0.53Ti0.47)O3 계 압전 분말 제조)

  • Lee, Yonghui;Baek, In Chan;Seok, Sang Il
    • Particle and aerosol research
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    • v.4 no.1
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    • pp.21-25
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    • 2008
  • $Pb(Zr_{0.53}Ti_{0.47})O_3$ (PZT) was synthesized by a multiple wet dry process. Precipitates prepared from reaction between $ZrOCl_2{\cdot}8H_2O$ and $TiOCl_2$ and $NH_4OH$ in an aqueous solution was dried at $100^{\circ}C$, and calcined at $500^{\circ}C$ and $700^{\circ}C$. The mixture mixed with PbO and as-dried or calcined $Zr_{0.53}Ti_{0.47}O_4$ (ZT) powders was calcined again at 700 and $800^{\circ}C$. Well crystallized ZT and PZT were formed at even $700^{\circ}C$. PZT piezoelectric ceramics of more than 98.5% in a relative density was obtained by sintering at as low as $900^{\circ}C$.

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The study of evaluating surface characteristics and effect of thermal annealing process for AlN single crystal grown by PVT method (PVT법으로 성장된 AlN 단결정의 표면 특성 평가 및 고온 어닐링 공정의 효과에 대한 연구)

  • Kang, Hyo Sang;Kang, Suk Hyun;Park, Cheol Woo;Park, Jae Hwa;Kim, Hyun Mi;Lee, Jung Hun;Lee, Hee Ae;Lee, Joo Hyung;Kang, Seung Min;Shim, Kwang Bo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.27 no.3
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    • pp.143-147
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    • 2017
  • To evaluate surface characteristics and improve crystalline quality of AlN single crystal grown by physical vapor transport (PVT) method, wet chemical etching process using $KOH/H_2O_2$ mixture in a low temperature condition and thermal annealing process was proceeded respectively. Conventional etching process using strong base etchant at a high temperature (above $300^{\circ}C$) had formed over etching phenomenon according to crystalline quality of materials. When it occurred to over etching phenomenon, it had a low reliability of dislocation density because it cannot show correct number of etch pits per estimated area. Therefore, it was proceeded to etching process in a low temperature (below $100^{\circ}C$) using $H_2O_2$ as an oxidizer in KOH aqueous solution and to be determined optimum etching condition and dislocation density via scanning electron microscope (SEM). For improving crystalline quality of AlN single crystal, thermal annealing process was proceeded. When compared with specimens as-prepared and as-annealed, full width at half maximum (FWHM) of the specimen as-annealed was decreased exponentially, and we analyzed the mechanism of this process via double crystal X-ray diffraction (DC-XRD).

Electric Properties of Carbon Aerogel for Super Capacitors (카본 에어로겔을 이용한 초고용량 커패시터의 전기적 특성)

  • Han, Jeong-Woo;Lee, Kyeong-Min;Lee, Du-Hee;Lee, Sang-Won;Yoon, Jung-Rag
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.8
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    • pp.660-666
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    • 2010
  • Carbon aerogels are promising materials as electrodes for electrical double layer capacitors (EDLCs). An optimum process is presented for synthesis of nanoporous carbon aerogels via pyrolyzing resorcinol-formaldehyde (RF) organic aerogels, which could be cost-effectively manufactured from RF wet gels. The major reactions between resorcinol and formaldehyde include an addition reaction to form hydroxymethyl derivatives ($-CH_2OH$), and then a condensation reaction of the hydroxymethyl derivatives ($-CH_2-$)- and methylene ether ($-CH_2OCH_2-$) bridged compounds. The textural properties of carbon aerogels obtained were characterized by nitrogen adsorption/desorption analysis and SEM and TEM. The application of the resultant carbon for electrodes of electric double layers capacitor (EDLC) in organic TEABF4/ACN electrolyte indicated that the ESR, as low as 55 $m{\Omega}$, was smaller than for commercially activated carbons. And EDLC with carbon Aerogel electrodes has an excellent stable more than for commercially activated carbons.