• Title/Summary/Keyword: Doping process

검색결과 512건 처리시간 0.022초

a-Si:H 분광스펙트럼 특성연구 (A Study on properties of a-Si:H layers by photoelectron spectroscopic)

  • 양현훈;김한울;김주회;김철중;이창권;소순열;박계춘;이진
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2011년도 추계학술대회 초록집
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    • pp.61.1-61.1
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    • 2011
  • We report on a detailed study on gap-state distribution in thin amorphous silicon layers(a-Si:H) with film thickness between 5 nm and 20 nm c-Si wafers performed by UV excited photoelectron spectroscopy(UV-PES). We measured how the work function, the gap state density, the position of the Fermi-level and the Urbch-energy depend on the layer thickness and the doping level of the ultra thin a-Si:H(n) layer. It was found, that for phosphorous doping the position of the Fermi level saturates at $E_F-E_V$=1.47 eV. This is achieved at a gas phase concentration of 10000 ppm $PH_3$ in the $SiH_4/H_2$ mixture which was used for the PECVD deposition process. The variation of the doping level from 0 to 20000 ppm $PH_3$ addition results in an increase of the Urbach energy from 65 meV to 101 meV and in an increase of the gap state density at midgap($E_i-E_V$=0.86eV) from $3{\times}10^{18}$ to $2{\times}1019cm^{-3}eV^{-1}$.

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Verneuil법에 의한 $SiO_2$를 첨가한 Sapphire 단결정 성장 (SiO2 Doped Sapphire single Crystal Growth by Verneuil Method)

  • 조현;오근호;최종건;박한수
    • 한국세라믹학회지
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    • 제29권10호
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    • pp.822-826
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    • 1992
  • SiO2 doped sapphire single crystals were grown by Verneuil method using feed material which prepared by adding SiO2 in Al2O3. Crystal growing were attempted with varing doping amount of SiO2 from 0.01 to 1.0 wt% and when the doping amount of SiO2 were 0.01~0.04 wt%, single crystals could be attained. Starting materials for feed powder were 99.99% purity alumina and extra pure SiO2 powder. Mixing these two materials by wet milling for 24 hours and drying the mixture and then was calcined at 900~110$0^{\circ}C$ for 2~4 hours. The grown crystals had yellowish color and were somewhat transparent. During growing process the flow range of oxygen was 5~7.5ι/min and of hydrogen was 13~25ι/min, the average growth rate was 7.0~11 mm/hr. The pressure of gases were fixed at 5psi. The color of crystal was appeared and mechanical property of sapphire was developed by doping of SiO2.

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High Conductivity of Transparent SWNT Films on PET by Ionic Doping

  • Min, Hyung-Seob;Kim, Sang-sig;Choi, Won-Kook;Lee, Jeon-Kook
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.65-65
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    • 2011
  • Single-well carbon nanotubes (SWNT) have been proposed as a promising candidate for various applications owing to their excellent properties. In particular, their fascinating electrical and mechanical properties could provide a new area for the development of advanced engineering materials. A transparent conductive thin film (TCF) has increased for applications such as liquid crystal displays, touch panels, and flexible displays. Indium tin oxide (ITO) thin films, which have been traditionally used as the TCFs, have a serious obstacle in TCFs applications. SWNTs are the most appropriate materials for conductive films for displays due to their excellent high mechanical strength and electrical conductivity. But, a bundle of CNTs has different electrical properties than their individual counterparts. In this work, the fabrication by the spraying process of transparent SWNT films and reduction of its sheet resistance on PET substrates is researched. Arc-discharge SWNTs were dispersed in deionized water by adding sodum dodecyl sulfate (SDS) as surfactant and sonicated, followed by the centrifugation. The dispersed SWNT was spray-coated on PET substrate and dried on a hotplate at $100^{\circ}C$. When the spray process was terminated, the TCF was immersed into deionized water to remove the surfactant and then it was dried on hotplate. The TCF film was then treated with ionic doping treatment, rinsed with deionized water and dried. The surface morphology of TCF was characterized by field emission scanning electron microscopy. The sheet resistance and optical transmission properties of the TCF were measured with a four-point probe method and a UV-visible spectrometry, respectively. Results, we show that 97 ${\Omega}$/> sheet resistance can be achieved with 81% transmittance at the wavelength of 550 nm. The changes in electrical and optical conductivity of SWNT film before and after ionic doping treatments were discussed.

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고상법으로 합성한 LiMn2O4:Al의 전기화학적 특성 (Electrochemical Performances of LiMn2O4:Al Synthesized by Solid State Method)

  • 박혜정;박선민;노광철;한정화
    • 한국세라믹학회지
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    • 제48권6호
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    • pp.531-536
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    • 2011
  • Al doped $LiMn_2O_4$ ($LiMn_2O_4:Al$) synthesized by several Al doping process and Solid State method. The Al contents in $Mn_{1-x}Al_xO_2$ for $LiMn_2O_4:Al$ were analyzed 1.7 wt% by EDS. The $LiMn_2O_4:Al$ confirmed cubic spinel structure and approximately 5 ${\mu}m$ particles regardless of three kinds of doping process by solid state method. In the result of electrochemical performances, initial discharge capacity had 115 mAh/g in case of $LiMn_2O_4$ and 111 mAh/g of $LiMn_2O_4:Al$ after 100th cycle at room temperature. But the capacity retention results showed that $LiMn_2O_4$ and $LiMn_2O_4:Al$ were 44% and 69% respectively in the 100th cycle at 60$^{\circ}C$. Therefore we are confirmed that $LiMn_2O_4:Al$ increased the capacity retention about 25% than $LiMn_2O_4$, thus the effect of Al dopping on $LiMn_2O_4$ capacity retention.

RTCVD 법으로 성장한 실리콘 에피막의 특성 (Characteristics of the Silicon Epitaxial Films Grown by RTCVD Method)

  • 정욱진;권영규;배영호;김광일;강봉구;손병기
    • 센서학회지
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    • 제5권1호
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    • pp.63-70
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    • 1996
  • RTCVD (rapid thermal chemical vapor deposition) 법을 이용하여 급준한 불순물 농도분포를 갖는 서브마이크론 두께의 실리콘 에피막을 성장하였다. 실리콘 에피막 성장은 $SiH_{2}Cl_{2}\;/\;H_{2}$ 혼합가스를 사용하고, $H_{2}$ probating 공정을 포함하는 여러 가지 공정변수들을 변화하면서 성장계면에서의 불순물 농도 분포의 계면특성 및 성장율, 결정성등을 평가하였다. 실리콘 에피막의 결정성은 $900^{\circ}C$ 에서 $H_{2}$ prebaking 공정 후 동일한 온도에서 성장한 경우에 전위등의 결함이 보이지 않았으며, $SiH_{2}Cl_{2}$ 원료가스의 부피비에 따라 실리콘 에피막의 성장율을 선택함으로서 에피막 두께를 서브마이크론 까지 조절할 수 있었다. 실리콘에피막의 불순물 농도분포는 성장 계면에서 약 $200{\AA}/decade$ 로 급격하게 조절될 수 있음을 SIMS 법에 의한 분석으로 확인하였다.

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비화학양론적 Bi1±xFeO3±δ와 Ti가 첨가된 BiFeO3의 소결조건에 따른 결정구조와 미세구조 변화 (Crystal Structure and Microstructure Variation of Nonstoichiometric Bi1±xFeO3±δ and Ti-doped BiFeO3 Ceramics under Various Sintering Conditions)

  • 배지희;김준찬;김명호;이순일
    • 한국재료학회지
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    • 제30권2호
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    • pp.61-67
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    • 2020
  • BiFeO3 with perovskite structure is a well-known material that has both ferroelectric and antiferromagnetic properties called multiferroics. However, leaky electrical properties and difficulty of controlling stoichiometry due to Bi volatility and difficulty of obtaining high relative density due to high dependency on the ceramic process are issues for BiFeO3 applications. In this work we investigated the sintering behavior of samples with different stoichiometries and sintering conditions. To understand the optimum sintering conditions, nonstoichiometric Bi1±xFeO3±δ ceramics and Ti-doped Bi1.03Fe1-4x/3TixO3 ceramics were synthesized by a conventional solid-state route. Dense single phase BiFeO3 ceramics were successfully fabricated using a two-step sintering and quenching process. The effects of Bi volatility on microstructure were determined by Bi-excess and Ti doping. Bi-excess increased grain size, and Ti doping increased sintering temperature and decreased grain size. It should be noted that Ti-doping suppressed Bi volatility and stabilized the BiFeO3 phase.

Effect of Au-ionic Doping Treatment on SWNT Flexible Transparent Conducting Films

  • 민형섭;정명선;최원국;김상식;이전국
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2012년도 춘계학술발표대회
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    • pp.111.1-111.1
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    • 2012
  • Interest in flexible transparent conducting films (TCFs) has been growing recently mainly due to the demand for electrodes incorporated in flexible or wearable displays in the future. Indium tin oxide (ITO) thin films, which have been traditionally used as the TCFs, have a serious obstacle in TCFs applications. SWNTs are the most appropriate materials for conductive films for displays due to their excellent high mechanical strength and electrical conductivity. In this work, the fabrication by the spraying process of transparent SWNT films and reduction of its sheet resistance on PET substrates is researched Arc-discharge SWNTs were dispersed in deionized water by adding sodium dodecyl sulfate (SDS) as surfactant and sonicated, followed by the centrifugation. The dispersed SWNT was spray-coated on PET substrate and dried on a hotplate. When the spray process was terminated, the TCF was immersed into deionized water to remove the surfactant and then it was dried on hotplate. The TCF film was then was doped with Au-ionic doping treatment, rinsed with deionized water and dried. The surface morphology of TCF was characterized by field emission scanning electron microscopy. The sheet resistance and optical transmission properties of the TCF were measured with a four-point probe method and a UV-visible spectrometry, respectively. This was confirmed and discussed on the XPS and UPS studies. We show that 87 ${\Omega}/{\Box}$ sheet resistances with 81% transmittance at the wavelength of 550nm. The changes in electrical and optical conductivity of SWNT film before and after Au-ionic doping treatments were discussed. The effect of Au-ion treatment on the electronic structure change of SWNT films was investigated by Raman and XPS.

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단결정 실리콘 태양전지의 도핑 최적화를 위한 확산 온도에 대한 연구 (Optimization of Drive-in Temperature at Doping Process for Mono Crystalline Silicon Solar Cell)

  • 최성진;송희은;유권종;유진수;한규민;권준영;이희덕
    • 한국태양에너지학회 논문집
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    • 제31권1호
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    • pp.37-43
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    • 2011
  • In this paper, the optimized doping condition of crystalline silicon solar cells with $156{\times}156\;mm^2$ area was studied. To optimize the drive-in temperature in the doping process, the other conditions except variable drive-in temperature were fixed. These conditions were obtained in previous studies. After etching$7\;{\mu}m$ of the surface to form the pyramidal structure, the silicon nitride deposited by the PECVD had 75~80nm thickness and 2 to 2.1 for a refractive index. The silver and aluminium electrodes for front and back sheet, respectively, were formed by screen-printing method, followed by firing in 400-425-450-550-$850^{\circ}C$ five-zone temperature conditions to make the ohmic contact. Drive-in temperature was changed in range of $830^{\circ}C$ to $890^{\circ}C$to obtain the sheet resistance $30{\sim}70\;{\Omega}/{\box}$ with $10\;\Omega}/{\box}$ intervals. Solar cell made in $890^{\circ}C$ as the drive-in temperature revealed 17.1% conversion efficiency which is best in this study. This solar cells showed $34.4\;mA/cm^2$ of the current density, 627 mV of the open circuit voltage and 79.3% of the fill factor.

고효율 TOPCon 태양전지의 SiOX/poly-Si박막 형성 기법과 passivating contact 특성 (Passivating Contact Properties based on SiOX/poly-Si Thin Film Deposition Process for High-efficiency TOPCon Solar Cells)

  • 김성헌;김태용;정성진;차예원;김홍래;박소민;주민규;이준신
    • 신재생에너지
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    • 제18권1호
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    • pp.29-34
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    • 2022
  • The most prevalent cause of solar cell efficiency loss is reduced recombination at the metal electrode and silicon junction. To boost efficiency, a a SiOX/poly-Si passivating interface is being developed. Poly-Si for passivating contact is formed by various deposition methods (sputtering, PECVD, LPCVD, HWCVD) where the ploy-Si characterization depends on the deposition method. The sputtering process forms a dense Si film at a low deposition rate of 2.6 nm/min and develops a low passivation characteristic of 690 mV. The PECVD process offers a deposition rate of 28 nm/min with satisfactory passivation characteristics. The LPCVD process is the slowest with a deposition rate of 1.4 nm/min, and can prevent blistering if deposited at high temperatures. The HWCVD process has the fastest deposition rate at 150 nm/min with excellent passivation characteristics. However, the uniformity of the deposited film decreases as the area increases. Also, the best passivation characteristics are obtained at high doping. Thus, it is necessary to optimize the doping process depending on the deposition method.