Formation of Silicon Diaphragm Using Silicon-wafer Direct Bonding / Electrochemical Etch-stopping and Its Application to Silicon Pressure Sensor Fabrication (실리콘 직접 접합 / 전기화학적 식각정지를 이용한 실리콘 다이아프램의 형성과 실리콘 압력센서 제조에의 응용)
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- Journal of Sensor Science and Technology
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- v.3 no.3
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- pp.45-53
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- 1994