• Title/Summary/Keyword: Dielectric layers

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Nanocomposite magnetic powder materials using mechanochemical Synthesis

  • Soh, Dae-Wha;Mofa, N.N.;Keteguenov, T.A.;Mansurov, Z.A.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.585-587
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    • 2002
  • The materials showing high structure dispersity are developed on the quartz base and they are obtained by mechano-chemical technology. Depending on the processing conditions and subsequent applications the materials produced by mechano-chemical reaction show concurrently magnetic, dielectric and electrical properties. The obtained magnetic-electrical powders classified by aggregate complex of their features as segnetomagnetics, contain a dielectric material as a canγing nucleus, particularly the quartz on that surface one or more layers of different compounds are synthesized having thickness up to 10~50 nm and showing magnetic, electrical and other properties.

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Study of Nonvolatile Memory Device with $SiO_2/Si_3N_4$ stacked tunneling oxide (터널링 $SiO_2/Si_3N_4$ 절연막의 적층구조에 따른 비휘발성 메모리 소자의 특성 고찰)

  • Cho, Won-Ju;Jung, Jong-Wan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.189-190
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    • 2008
  • The electrical characteristics of band-gap engineered tunneling barriers consisting of thin $SiO_2$ and $Si_3N_4$ dielectric layers were investigated. The band structure of stacked tunneling barriers was studied and the effectiveness of these tunneling barriers was compared with that of the conventional tunneling barrier. The band-gap engineered tunneling barriers show the lower operation voltage, faster speed and longer retention time than the conventional $SiO_2$ tunnel barrier. The thickness of each $SiO_2$ and $Si_3N_4$ layer was optimized to improve the performance of non-volatile memory.

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Displacement Current Characteristics of DMPC Lipid Monolayer (DMPC 인지질 단분자막의 변위전류 특성)

  • Choi, Yong-Sung;Sang, Jin-Won;Lee, Kyung-Sup
    • Proceedings of the KIEE Conference
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    • 2006.10a
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    • pp.12-13
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    • 2006
  • The physical properties of DMPC monolayer were made for dielectric relaxation phenomena by the detection of the surface pressures and displacements current. The current was measured after the electric bias across the manufactured MIM device. It is found that the phospolipid monolayer of dielectric relaxation takes a little time and depend on the molecular area. When electric bias is applied across the manufactured MIM device by the deposition condition of phospolipid mono-layer, it wasn't breakdown when the higher electric field to impress by increase of deposition layers.

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Formation of SOG Film between Al Metal Layers for Double metal Process (2중 Al 배선을 위한 금속층간 SOG 박막의 형성)

  • 백종무;정영철;이용수;이봉현
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.8
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    • pp.53-61
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    • 1994
  • Intermetallic dielectric layer was formed by using SiO$_2$/SOG/SiO$_2$ for aluminum based dual-metal interconnection process and its electric characteristics were evaluated. The dielectric layer was in the cost and facility point of view more useful than the insulator that was formed by etch-back process. The planarity by using SOG process was about 40% higher than that of the insulator by the CVD process. When SiO$_2$ films were deposited by the PECVD process the Al hillock formation during the next process was restrained bucause the intermetalic insulator was made at low temperature. The leakage current was 1${\times}10^{7}~1{\times}10^{-8}A/cm^{2}$ at the electric field of 10$^{5}$V/cm and breakdown filed was 4.5${\times}10^{6}~7{\times}10^{6}A/cm$. So we had confirmed that siloxane SOG was very useful for intermetallic layer material.

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Fabrication of insulating fifes using phenolic polymer and electrical properties in MIM structure (페놀계 고분자를 이용한 절연막의 제작과 MIM구조에서의 전기적 특성)

  • 김경환;유승엽;정상범;박재철;권영수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.347-349
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    • 1999
  • We have fabricated insulating thin films using p-hexadecoxyphenol(p-Hp) that was formed phenol-formaldehyde resin of crosslinked structure from reaction with formaldehyde by LB technique. For fabricated MIM device, the possibility for insulating layers of electronic were investigated by electrical properties of their LB films according to crosslinking of LB films current-voltage (I-V) properties and frequency-capacitance (C-F) characteristics. We have provided evidence for the high insulating performance of phenol-formaldehyde thin films by the LB method. Conductivity of their LB films was as follows: pure water > 1 % aq. Formaldehyde > heat treatment, in the current-voltage (I-V) characteristics. It is demonstrated that insulation properties of crosslinked p-HP LB films were improved. In capacitance-frequency properties, the heat-treated p-HP LB films for crosslinking showed a low relative dielectric constant.

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Microstructural Properties of PZT Heterolayered Thin Films Prepared by Sol-Gel Method (솔-젤법으로 제작한 PZT 이종층 박막의 구조적 특성)

  • 이성갑;김경태;정장호;박인길;이영희
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.311-314
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    • 1999
  • Ferroelectric PZT heterolayered thin films were fabricated by spin coating method on the Pt/Ti/SiO$_2$/Si substrate using PZT(10/90) and PZT(90/10) metal alkoxide solutions. All PZT heterolayered films showed a homogeneous grain structure without presence of the rosette structure. It can be assumed that the lower PZT layers a role of nucleation site or seeding layer for the formation of the upper PZT layer. Zr and Ti diffusion into the Pt electrode were mainly distributed at the surface of Pt electrode beneath the PZT/Pt interface. The PZT/Pt interfacial layer showed a microstructure characterized by a grain phase surrounded by a Pb-deficient pyrochlore matrix phase. The relative dielectric constant and the dielectric loss of the PZT-6 film were 567 and 3.6, respectively.

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Study on the ultra thin film of silicon oxyinitride deposited by plasma - assisted $N_2O$ oxidation in ICP-CVD reactor (ICP-CVD 반응기 내에서 $N_2O$ 플라즈마 산화법을 이용하여 증착된 ultra thin silicon oxynitride films 에 관한 연구)

  • Hwang, Sung-Hyun;Jung, Sung-Wook;Yi, J.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.06a
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    • pp.161-162
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    • 2006
  • Scaling rules for TFT application devices have led to the necessity of ultra thin dielectric films and high-k dielectric layers. In this paper, The advantages of high concentration of nitrogen in silicon oxide layer deposited by using $N_2O$ in Inductively Coupled Plasma Chemical Vapor Deposition (ICP-CVD) reported about Ellipsometric measurement, Capacitance-Voltage characterization and processing conditions.

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Dielectric Characteristics of Magnetic Tunnel Junction

  • Kim, Hong-Seog
    • The Journal of Engineering Research
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    • v.6 no.2
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    • pp.33-38
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    • 2004
  • To investigate the reliability of the MTJs on the roughness of insulating tunnel barrier, we prepared two MTJs with the different uniformity of barrier thickness. Namely, the one has uniform insulating barrier thickness; the other has non-uniform insulating barrier thickness as compared to different thing. As to depositing amorphous layer CoZrNb under the pinning layer IrMn, we achieved MTJ with uniform barrier thickness. Toinvestigate the reliability of the MTJs dependent on the bottom electrode, time-dependent dielectric breakdown (TDDB) measurements were carried out under constant voltage stress. The Weibull fit of out data shows clearly that $t_{BD}$ scales with the thickness uniformity of MTJs tunnel barrier. Assuming a linear dependence of log($t_{BD}$) on stress voltages, we obtained the lifetime of $10^4$years at a operating voltage of 0.4 V at MTJs comprising CoNbZr layers. This study shows that the reliabilityof new MTJs structure was improved due to the ultra smooth barrier, because the surface roughness of the bottom electrode influenced the uniformity of tunnel barrier.

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Design of Frequency-Selective Reflector for Large Reflecting Antennas using a Periodic Dielectric Layer (주기적인 유전체 층을 사용한 안테나용 주파수 선택 반사기의 설계)

  • Ho, Kwang-Chun
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.10 no.1
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    • pp.33-38
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    • 2010
  • This paper examines the feasibility of using periodically varying dielectric layers with dielectric constant ${\epsilon}_1$ and ${\epsilon}_2$ at millimeter wave frequency for implementing the frequency-selective reflectors that permit feed separation in large aperture reflecting antenna systems. For oblique incidence, it is found that the total reflection can be obtained at different frequencies for proper choices of ${\epsilon}_1$, ${\epsilon}_2$ and the geometric parameters. In the frequency-selective reflector designed, the bandwidth for 90% reflection is always found to be much narrower than that for 90% transmission.

A Study on Displacement Current Characteristics of DLPC Monolayer (I) (DLPC 인지질 단분자막의 변위전류 특성 연구 (I))

  • Song, Jin-Won;Lee, Kyung-Sup;Choi, Yong-Sung
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.56 no.1
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    • pp.117-122
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    • 2007
  • LB method is one of the most interesting technique to arrange certain molecular groups at precise position relative to others. Also, the LB deposition technique can fabricate extremely thin organic films with a high degree of control over their thickness and molecular architecture. In this way, new thin film materials can be built up at the molecular level, and the relationship between these artificial structures and the properties of materials can be explored. In this paper, evaluation of physical properties was made for dielectric relaxation phenomena by the detection of the surface pressures and displacements current on the monolayer films of phospolipid monomolecular DLPC. Lipid thin films were manufacture by detecting deposition for the accumulation and the current was measured after the electric bias was applied across the manufactured MIM device. It is found that the phospolipid monolayer of dielectric relaxation takes a little time and depend on the molecular area. When electric bias is applied across the manufactured MIM device by the deposition condition of phospolipid mono-layer, it wasn't breakdown when the higher electric field to impress by increase of deposition layers.