• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.07b
• /
• pp.884-887
• /
• 2003

Strain gages were widely used transducers. Essentially a strain gage was an electric element to which an appropriate type was attached. Strain was sensed by gages and provided electrical output proportional to applied forced. This paper describes the recent development of a thick film strain gage ceramic pressure sensors. The thick film resistors as strain gage in the Wheatstone bridge were fabricated with a novel mixture of ruthenium. The thick-film technology of resistors were printed on the ceramic diaphragm back side by screen printing and cured at $850^{\circ}C$. The mechanical measurements were performed with the computer simulation results(ANSYS 5.1). The output sensitivity was 1.2mV/V, of which max. nonlinearity was less than 0.29%, hysteresis was less than 0.38%FS.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2005.11a
• /
• pp.45-46
• /
• 2005

The piezoelectric ZnO thin films were deposited onto Al/Si substrate in order to figure out the crystalline and the residual stress of deposited films. As the $Ar/O_2$ gas ratio is increased, c-axis orientation of deposited films is significantly enhanced and also the residual stresses of ZnO films are all compressive. They are decreased from -1.2 GPa to -950 MPa as the $Ar/O_2$ gas ratio is increased. A diaphragm-based piezoelectric microspeaker fabricated on ONO films shows about 14 mPa output pressure at 1 kHz with $8V_{peak-to-peak}$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1998.06a
• /
• pp.423-426
• /
• 1998

Piezoresistive pressure sensors have fabricated using electrochemical etch-stop technique. Si diaphragm having thickness of n-epi. layer was fabricated and used to detect pressure range from 0 to 1 kg/$\textrm{cm}^2$. Piezoresistors were diffused 3${\times}$10$\^$18/ cm$\^$-3/ and placed at diaphragm edge for maximum pressure detection. The characteristics of electrochemical etch-stop in TMAH/lPA/pyrazine solution were also discussed. I-V curves of n and p-type Si in TMAH/lPA/pyrazine solution were obtained. Etching rate is highest at optimum etching condition, TMAH 25wt.%/IPA 17vo1.%/pyrazine 0.1/100m1, thus the elapsed time of etch-stop was reduced.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.34 no.3
• /
• pp.22-30
• /
• 2006

In this paper, a systematic design method on an IPMC(ionic polymer-metal composite)-driven ZNMF(zero-net-mass-flux) pump is introduced for the flow control of an MAV's (micro air vehicle) wing. Since the IPMC is able to generate a large deformation under a low input voltage along with its ability to operate in air, and is easier to be manufactured in a small size, it is considered to be an ideal material of the actuating diaphragm. Through the numerical methods, an optimal shape of the IPMC　diaphragm was found for maximizing the stroke volume. Based on the optimal IPMC diaphragm, a proto-type ZNMF pump with a slot, was designed. By using the flight speed of the MAV considered in this work, the driving frequencies(~ 40 Hz) of IPMC diaphragm, and the flow velocity through the pump's slot, the calculated non-dimensional frequency and the momentum coefficient ensure the feasibility of the designed ZNMF pump as a flow control device.

• Journal of Korean Association for Spatial Structures
• /
• v.7 no.2 s.24
• /
• pp.91-96
• /
• 2007

To improve the land use of urban, Construction of the circular steel column is required recently. The circular steel columns have a advantage for improving a load carrying capacity as wall as reducing a effective section area. However, the circular steel columns under service load, such as earthquake, shows a tendency to cause local buckling and large deformation. To prevent these phenomena, use of diaphragm is considered. It is reported that longitudinal stiffeners has a effect on improving a buckling and fatigue performance of steel structures. The research of effect on diaphragm is not sufficient. Under monotonic and cyclic loadings diaphragm make a important role to prevent local buckling and deformation of used steel structures. Therefore, influence of diaphragm on performance of used steel structures is investigated. In this study, the influence of diaphragm on seismic and deformation performance of circular steel piers was investigated by using elastic-plastic finite element analysis considered geometrical and material non-linearity. The seismic performance of circular steel columns was evaluated for analytical parameter of manufactured part. The seismic performance of circular steel columns was clarified by comparing an energy dissipation of circular steel piers.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.790-793
• /
• 2005

In these days, the piezoresistive material has been applied to various sensors in order to measure the change of physical quantities. But the relationship between the sensitivity of a sensor and the position and size of piezoresistor has rarely been studied. Therefore, this paper was focused on the effect of residual stress induced in piezoresistor on the distribution of resistance change ratio and supposed the feasible position of piezoresistor. The resulting are following; The tensile residual stress in the vicinity of piezoresistor decreased the value of resistance change ratio and could not effect on all the area of diaphragm but local area around the piezoresistor. Also, the piezoresistor in the diaphragm type pressure sensor with boss should fabricate in the edge of boss in order to increase the sensitivity of pressure sensor.

• Journal of Chest Surgery
• /
• v.32 no.4
• /
• pp.394-398
• /
• 1999

Background: According to the changes in the Environmental factors, traumatic diaphragmic rupture is seen in increasing frequency. Many reports described the early diagnostic methods and treatment modalities. In our institution, a study was retrospectively performed to obtain the early diagnostic and treatment methods of diaphragmic ruptures. Material and Method: From January 1994 to April 1998, 20 patients with traumatic rupture of the diaphragm were treated in our institution and We analyzed the patients in preoperative clinical presentations, diagnostic accuracies, associated injuries and postoperative complications. Result: Socially active male patients were affected most. 75% of patients had blunt trauma and 25% had penetrating injury. There were 16 cases of ruptured right diaphragm, 3 cases of left diaphragm and 1 case on both. Preoperative diagnosis were possible in 10 patients (50%) and 6 patients(30%) were diagnosed intraoperatively, but 4 patients (20%) were diagnosed in the late stages. Most common postoperative complication was wound infection, and two died of associated injuries. Conclusion: We conclude that if there is suspicion of diaphragmic rupture after a trauma, careful study and examination is essential and interdepartmental collaboration is very important.

• Journal of Practical Engineering Education
• /
• v.6 no.2
• /
• pp.105-110
• /
• 2014

In this work, mechanical characteristics of titanium diaphragm have been studied as a potential robust substrate and a diaphragm material for automotive tire pressure sensor. Lamination process techniques combined with traditional micromachining processes have been adopted as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on titanium diaphragm have been designed, fabricated and characterized. The fabrication process for micromachined titanium devices keeps the membrane and substrate being at the environment of 20 MPa pressure and $200^{\circ}C$ for a half hour and then subsequently cooled to $24^{\circ}C$. Each sensor uses a stainless steel substrate, a laminated titanium film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. Besides, out-of-plane deflections are calculated under pressures on the diaphragm. The sensitivity of the fabricated device is $9.45ppm\;kPa^{-1}$ with a net capacitance change of 0.18 pF over a range 0-210 kPa.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.07b
• /
• pp.946-949
• /
• 2003

This paper reports on the fluid flow simulation results of a multilayer type piezoelectric valve. The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed type using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a MLCA(Multilayer Type Ceramic Actuator). It is confirmed that the complete laminar flow and the lowest flow leakage are strongly depend on the valve seat geometry. In addition, turbulent flow was occurs in valve outlet according to increase seat dimension, height and inlet pressure. From this, we was deducts the optimum geometry of the valve seat and diaphragm deflection that have an great influence fluid flow in valve. Thus, it is expected that our simulation results would be apply for piezoelectric applications such as valve and pump, fluidic control systems.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2006.06a
• /
• pp.374-375
• /
• 2006

This paper describes anodic bonding characteristics of MCA to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with the same properties were deposited on MCA under optimum RF sputter conditions (Ar 100 %, input power $1\;W/cm^2$). After annealing at $450^{\circ}C$ for 1 hr, the anodic bonding of MCA to Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in $110^{-6}$ Torr vacuum condition. Then, the MCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation and simulation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity being 0.05-0.08 %FS. Moreover, any damages or separation of MCNSi bonded interfaces did not occur during actuation test. Therefore, it is expected that anodic bonding technology of MCNSi-wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.