Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1998.06a
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- Pages.423-426
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- 1998
Application of Electrochemical Etch-stop in TMAH/IPA/pyrazine Solution to Pressure Sensors
TMAH/IPA/pyrazine용액에 있어서 전기화학적 식각정지법의 압력센서에의 응용
Abstract
Piezoresistive pressure sensors have fabricated using electrochemical etch-stop technique. Si diaphragm having thickness of n-epi. layer was fabricated and used to detect pressure range from 0 to 1 kg/
Keywords