• 한국재료학회지
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• 제4권2호
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• pp.152-158
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• 1994

메탄가스를 반응가스로 하여 플라즈마 화학증착법으로 Diamondlike Carbon(DLC)박막 제작시 박막의 광학적 특성에 미치는 수소가스의 영향을 조사하였다. 수소가스를 보조가스로 사용하는 경우는 불활성가스인 아르곤이나 헬륭의 경우와는 달리 인가전력의 변화에 따라 수소가스의 역할이 다르게 나타났다. Optical band gap의 변화와 FT-IR 분석결과로부터 수소가스에 의한 C-H 결합의 화학적인 에칭과 스퍼터링 및 수소의 박막 내로의 주입 가능성을 예측하고 이를 아르곤과 헬륨을 보조가스로 사용한 경우와 비교하여 그 타당성을 확인하였다.

• 한국재료학회지
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• 제4권2호
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• pp.227-232
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• 1994

450KHz 저주파수로 플라즈마 화학증착법을 이용하여 Diamondlike carbon박막을 제작하고 optical band gap, 미소경도, 내부응력 등의 물성에 대하여 13.56MHz의 전원을 사용했을 때보다 optical band gap이 감소하였으며 FT-IR및 CHN분석결과 박막 내의 C-H결합농도와 총 수소의 함량이 크게 감소하는 것으로 밝혀졌다. 또한 저주파수로 DLC 박막을 형성하는 경우 미소경도의 희생없이 내부응력을 크게 줄일 수 있어 기판과의 접착성이 향상될 것으로 기대되었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.397-397
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• 2007

Diamondlike carbon (DLC) coatings were deposited on alumina ceramic seals using a plasma immersion ion deposition technique (PIID). Then they were subjected to tribological tests using a pin-on-disc tribometer under a high load (1.3 GPa) and under elevated temperatures up to 400C. Coefficients of friction (COFs) were recorded and compared with that of the untreated alumina while the wear tracks were analyzed using SEM with EDS to characterize the DLC films. To enhance the DLC adhesion to the substrate, various interlayers including Si and Cr were deposited using the PIID process or an ion beam assisted deposition (IBAD) method. It was observed that the DLC coating, if adhering well to the substrate, reduced the COFs significantly, from 0.4-0.8 for the uncoated alumina to about 0.05-0.1, within the tested temperature range. The adhesion was determined by the interlayer type and possibly by the application method. Cr interlayer did not perform as well as the Si interlayer. This could also be due to the fact that the Cr interlayer and the subsequent DLC coating had to be done in two different processing systems, while both the Si interlayer and the subsequent DLC film were deposited in one system without breaking the chamber. The coating failure mode was found to be delamination between the Cr and the alumina substrate. In contrast, the Si interlayer with proper DLC deposition procedures resulted in very good adhesion and hence excellent tribological performance. Further study may lead to future DLC applications of ceramic seals.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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• pp.116.2-116
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• 1998

• 한국재료학회:학술대회논문집
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• 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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• pp.153.4-153
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• 1998

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.163-164
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• 2002

This paper describes a new carbon film that afford superlubricity (i.e, friction coefficients of 0.001- 0.005) and superlow wear rates (i.e., $10^{-11}-10^{-10}mm^3/N.m$) to sliding metallic and ceramic surfaces, when tested in inert test environments. The wear life of these films are more than 1000 km even under very high contact pressures (i.e., 1-3 GPa) and at a wide range of sliding velocities (i.e., 0.1 to 2 m/s). They are produced in a plasma enhanced chemical vapor deposition system at room temperature using highly hydrogenated gas discharge plasmas. Extensive research has shown that films grown in highly hydrogenated gas discharge plasmas (i.e., hydrogen-to-carbon ratio of 6 and above) provide superlow friction and wear coefficients. In full paper, specific conditions under which superlubricity can be achieved in carbon films will be discussed.and a mechanistic model will be proposed to explain the superlubricity of new carbon films.

• 한국진공학회지
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• 제4권1호
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• pp.12-17
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• 1995

Diamondlike carbon(DLC)films having good characteristics in mechanical and optical properties, were synthesized by rf-plasma enhanced chemical vapor deposition method. Methane, methane-hydrogen, or methane-argon were used as source gases. The infrared transparency and composition of the films were investigate. Especially, the anti-reflection effect of KLC film in infrared region was confirmed by depositing it on Ge/Si sample. When DLC films were deposited on the plastic substrates and thermal distortion, which were originated before and during deposition, respectively, played a role as a crack source of the films.

• 한국진공학회지
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• 제3권4호
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• pp.420-425
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• 1994

메탄을 원료가스로 하여 PECVD에 의해 다이아몬드성 탄소(DLC) 박막을 형성하였으며 이때 인 가전력의 크기 및 주파수 그리고 보조가스의 종류가 optical band gap의 크기에 미치는 영향에 대학여 연구하였다. DLC 박막의 optical band gap 은 증착되는 이온의 에너지가 증가할수록 감하였으며 불활성 기체를 보조가스로 사용하는 경우 인가전력에 따른 optical band gap의 크기가 큰폭으로 감소하였다. 소 소를 보조가스로 사용한 경우는 높은 인가전력(100W 이상)에서 optical band gap이 증가하는 것으로 밝 혀졌으며 본 연구에서 제안된 증착 기수의 모델에 의해 적절한 설명이 가능하였다.

• 한국표면공학회지
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• 제29권5호
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• pp.519-524
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• 1996

We synthesized semiconducting Sn-doped diamondlike carbon films by rf plasma-enhanced chemical vapor deposition using an organotin compound as a dopung gas source. XPS quan-titative analysis for the deposited films after 60 s argon ion etching revealed that Sn concen-tration increased with the partial pressure of the organotin compound in the reactant gas. In C 1s spectra, there was a component due to C-Su bond which had a negative chemical shift. C 1s spectra also indicated that the deposited films were relatively $sp^2$ rich. The chemical shift of the Sn-C bond in Sn $3d_{5/2}$ spectra was about +1.7 eV. The electrical resistivity and the optical transmittance were also investigated.

• 한국정밀공학회지
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• 제29권4호
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• pp.409-416
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• 2012

Recently, surface modification technology is of importance to improve the wear resistance and the corrosive resistance for high accurate mechanical parts such as LM guide, Ball Screw and Roller Bearing etc., Those has generally featured on rolling contact mechanism to improve not only the wear and the friction, but also the accuracy and the corrosion performances. For surface modifications of high accurate mechanical parts, normally thermal spray, PVD, CVD and E.P. processes have been used with many materials such as DLC, raydent, W, Ni, Ti etc. Diamondlike carbon (DLC) films possess a combination of attractive properties and have been largely employed to modify the tribological behaviors such as friction, wear, corrosion, fretting fatigue, biocompatibility, etc. However, for rolling contact mechanism mechanical parts DLC films are needed to study for commercial benefit. Rolling contact mechanism has features on effects of cyclic motions and stresses, and also not simply sliding motions. The papers focused on the performance test of wear and corrosive resistance according to Me-DLC film thickness. And also, its thickness effect of wear analysis was carried out through the simulation of the maximum shear stress under the rolling contact surface. As the results, Me-DLC films have more potential to improve the wear resistance for high precision mechanical parts than raydent films.