Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Diamond-like Carbon Films Synthesized from $CH_4$, $CH_4-H_2$, and $CH_4-Ar$ Plasmas

메탄, 메탄-수소 및 메탄-아르곤 플라즈마로부터 합성된 다이아몬드성 탄소막

  • Choi, Y. (HanWha Group Research Center) ;
  • Hong, J. W. (HanWha Group Research Center) ;
  • Lee, H. W. (HanWha Group Research Center) ;
  • Song, J. S. (Surface Engineering Lab., Korea Academy of Industrial Technology)
  • 최윤 (한화그룹 종합연구소) ;
  • 홍진후 (한화그룹 종합연구소) ;
  • 이행우 (한화그룹 종합연구소) ;
  • 송정식 (생산기술연구원 표면기술실)
  • Published : 1995.03.01
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Abstract

Diamondlike carbon(DLC)films having good characteristics in mechanical and optical properties, were synthesized by rf-plasma enhanced chemical vapor deposition method. Methane, methane-hydrogen, or methane-argon were used as source gases. The infrared transparency and composition of the films were investigate. Especially, the anti-reflection effect of KLC film in infrared region was confirmed by depositing it on Ge/Si sample. When DLC films were deposited on the plastic substrates and thermal distortion, which were originated before and during deposition, respectively, played a role as a crack source of the films.

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