• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.220-220
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• 2013

Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

• 대한방사선치료학회지
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• 제18권2호
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• pp.81-87
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• 2006

목 적: 움직이는 장기의 방사선치료시에 움직임을 고려한 선량분포의 연구가 많이 이루어지지 않았고, 정적인 상태로서의 선량분포가 고려된 치료 및 연구가 이루어졌다. 그래서 본 연구는 구동팬텀 시스템을 이용하여 움직이는 장기의 선량분포 계측을 시행하였다. 이 연구의 목적은 호흡에 따른 선량분포의 변화가 어떻게 일어나는지에 대한 실험적 계측에 대한 평가이다. 재료 및 방법: 호흡에 의한 움직이는 장기의 선량분포 측정을 위해서 다목적 팬텀과 구동팬텀을 고안 하였다. 다목적 팬텀의 구성은 아크릴과 코르크를 사용하였고, 아크릴의 밀도는 $1.14g/cm^3$이고 코르크는 $0.32g/cm^3$이다. 아크릴은 정상조직을 표현하기 위해 사용되었고, 코르크는 폐를 묘사하기 위해 제작 되었다. 측정용 필름은 가프크로믹 필름과 EDR2필름을 사용하였다. 구동팬텀 시스템은 상하좌우 2차원적인 움직임을 하도록 설계되었으나 본 실험은 1차원적인 움직임만으로 구동하여 측정하였다. 결 과: 코르크 팬텀에서 측정된 선량분포가 아크릴에서 측정된 선량분포보다 반음영이 크게 나타났다. 가프크로믹 필름으로 측정된 선량분포는 선량분포에 따른 광학농도가 낮기 때문에 분포곡선이 평탄하지 않았다. 내부장기의 움직임이 증가함에 따라 선량분포에서 반음영, 평탄도, 대칭도가 점점 증가하였다. 모든 가프크로믹 필름으로 측정된 선량분포는 EDR2필름으로 측정된 필름보다 평탄도나 대칭도가 좋지 않았지만 반음영은 비슷하게 분포되었다. 결 론: 가프크로믹 필름은 현상이 필요 없기 때문에 사용하기 편하고, 조그만 크기로도 쉽게 잘라서 사용할 수 있다. 또한 많은 양의 방사선을 조사할 수 있는 장점이 있다. 그러나 선량에 따른 광학농도의 변화가 작기 때문에 측정 시에 선량분포에 평탄도가 좋지 않다. 움직이는 장기의 방사선치료시 다목적 팬텀과 구동팬텀을 이용하여 질보정이 이루어진다면 치료효과를 향상시킬 것이라 사료된다.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 1995년도 가을 학술발표회 논문집
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• pp.15.2-22
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• 1995

Evaluating stiffness of near-surface materials has been one of the critically important tasks in many civil engineering works. It is the main goal of geotechnical characterization. The so-called deflection-response method evaluates the stiffness by measuring stress-strain behavior of the materials caused by static or dynamic load. This method, however, evaluates the overall stiffness and the stiffness variation with depth cannot be obtained. Furthermore, evaluation of a large-area geotechnical site by this method can be time-consuming, expensive, and damaging to many surface points of the site. Wave-propagation method, on the other hand, measures seismic velocities at different depths and stiffness profile (stiffness change with depth) can be obtained from the measured velocity data. The stiffness profile is often expressed by shear-wave (S-wave) velocity change with depth because S-wave velocity is proportional to the shear modulus. that is a direct indicator of stiffiiess. The crosshole and downhole method measures the seismic velocity by placing sources and receivers (geophones) at different depths in a borehole. Requirement of borehole installation makes this method also time-consuming, expensive, and damaging to the sites. Spectral-Analysis-of-Surface-Waves (SASW) method places both source and receivers at the surface, and records horizontally-propagating surface waves. Based upon the theory of surfacewave dispersion, the seismic velocities at different depths are calculated by analyzing the recorded surface-wave data. This method can be nondestructive to the sites. However, because only two receivers are used, the method requires multiple measurements with different field setups and, therefore, the method often becomes time-consuming and labor-intensive. Furthermore. the inclusion of noise wavefields cannot be handled properly, and this may cause the results by this method inaccurate. When multi-channel recording method is employed during the measurement of surface-waves, there are several benefits. First, usually single measurement is enough because multiple number (twelve or more) of receivers are used. Second, noise inclusion can be detected by coherency checking on the multi-channel data and handled properly so that it does not decrease the accuracy of the result. Third, various kinds of multi-channel processing techniques can be applied to f1lter unwanted noise wavefields and also to analyze the surface-wavefields more accurately and efficiently. In this way, the accuracy of the result by the method can be significantly improved. Fourth, the entire system of source, receivers, and recording-processing device can be tied into one unit, and the unit can be pulled by a small vehicle, making the survey speed very fast. In all these senses, multi-channel recording of surface waves is best suited for a routine method for geotechnical characterization in most of civil engineering works.

• 한국전기전자재료학회논문지
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• 제37권3호
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• pp.332-336
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• 2024

High-energy bandgap material silicon carbide (SiC) is gaining attention as a next-generation power semiconductor material, and in particular, SiC-based MOSFETs are developed as representative power semiconductors to increase the breakdown voltage (BV) of conventional planar structures. However, as the size of SJ (Super Junction) MOSFET devices decreases and the depth of pillars increases, it becomes challenging to uniformly form the doping concentration of pillars. Therefore, a structure with different doping concentrations segmented within the pillar is being researched. Using Silvaco TCAD simulation, a SJ VVD (vertical variation doping profile) MOSFET with three different doping concentrations in the pillar was studied. Simulations were conducted for the width of the pillar and the doping concentration of N-epi, revealing that as the width of the pillar increases, the depletion region widens, leading to an increase in on-specific resistance (R_on,sp) and breakdown voltage (BV). Additionally, as the doping concentration of N-epi increases, the number of carriers increases, and the depletion region narrows, resulting in a decrease in R_on,sp and BV. The optimized SJ VVD MOSFET exhibits a very high figure of merit (BFOM) of 13,400 KW/cm², indicating excellent performance characteristics and suggesting its potential as a next-generation highperformance power device suitable for practical applications.

• 한국진공학회지
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• 제18권2호
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• pp.108-115
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• 2009

150 주기의 InAs/GaSb (8/8-ML) 제2형 응력초격자 (SLS)를 활성층에 탑재한 초격자 적외선검출소자 (SLIP) 구조를 MBE 방법으로 성장하고, 직경 $200{\mu}m$의 개구면을 가지는 SLIP 개별소자를 시험 제작하였다 고분해능 투과전자현미경 (TEM) 이미지의 휘도분포와 X선회절 (XRD) 곡선의 위성피크의 분석 결과는 SLS 활성층은 균일한 층두께와 주기적 응력변형을 유지하는 급격한 계면의 초격자임을 입증하였다. 흑체복사 적외선 광원을 이용하여 측정한 입사파장 및 인가전압에 따른 반응도 (R)와 검출률 ($D^*$)로부터, 차단파장은 ${\sim}5{\mu}m$이고 최대 R과 $D^*$ ($\lambda=3.25{\mu}m$)는 각각 ${\sim}10^3mA/W$ (-0.6 V/13 K)와 ${\sim}10^9cm.Hz^{1/2}/W$ (0 V/13 K)임을 보였다. 반응도의 온도의존성으로부터 분석한 활성화에너지 275 meV는 광반응 과정에 개입되어 있는 가전대 및 전도대 부준위 사이의 에너지 간격 (HH1-C)과 잘 일치하였다.

• Journal of Korean Neurosurgical Society
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• 제63권2호
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• pp.137-152
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• 2020

In spite of the developing endovascular era, large (15-25 mm) and giant (>25 mm) wide-neck cerebral aneurysms remained technically challenging. Intracranial flow-diverting stents (FDS) were developed to address these challenges by targeting aneurysm hemodynamics to promote aneurysm occlusion. In 2011, the first FDS approved for use in the United States market. Shortly thereafter, the Pipeline of Uncoilable or Failed Aneurysms (PUFS) study was published demonstrating high efficacy and a similar complication profile to other intracranial stents. The initial FDA instructions for use (IFU) limited its use to patients 22 years old or older with wide-necked large or giant aneurysms of the internal carotid artery (ICA) from the petrous segment to superior hypophyseal artery/ophthalmic segment. Expanded IFU was tested in the Prospective Study on Embolization of Intracranial Aneurysms with PipelineTM Embolization Device (PREMIER) trial. With further post-approval clinical data, the United States FDA expanded the IFU to include patients with small or medium, wide-necked saccular or fusiform aneurysms from the petrous ICA to the ICA terminus. However, IFU is more restrictive in South Korea than in United States. Several systematic reviews and meta-analyses have sought to evaluate the overall efficacy of FDS for the treatment of cerebral aneurysms and consistently identify FDS as an effective technique for the treatment of aneurysms broadly with complication rates similar to other traditional techniques. A growing body of literature has demonstrated high efficacy of FDS for small aneurysms; distal artery aneurysms; non-saccular aneurysms posterior circulation aneurysms and complication rates similar to traditional techniques. In the short interval since the Pipeline Embolization Device was first introduced, FDS has been firmly entrenched as a powerful tool in the endovascular armamentarium. As new FDS are developed, established FDS are refined, and delivery systems are improved the uses for FDS will only expand further. Researchers continue to work to optimize the mechanical characteristics of the FDS themselves, aiming to optimize deploy ability and efficacy. With expanded use for small to medium aneurysms and posterior circulation aneurysms, FDS technology is firmly entrenched as a powerful tool to treat challenging aneurysms, both primarily and as an adjunct to coil embolization. With the aforementioned advances, the ease of FDS deployment will improve and complication rates will be further minimized. This will only further establish FDS deployment as a key strategy in the treatment of cerebral aneurysms.

• 한국의학물리학회지:의학물리
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• 제23권4호
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• pp.234-238
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• 2012

눈꺼풀에 발생한 종양의 치료를 위해서는 종종 고에너지 전자선이 이용되며, 이 경우 환자의 시력 보호를 위해 금속차폐체를 눈꺼풀과 안구 사이에 삽입하고 방사선 치료를 시행한다. 차폐체에 접한 눈꺼풀 안쪽의 방사선량 확인을 위해서는 매우 작은 측정도구가 필요하며, 굽은 경계면의 특성상 유연한 측정도구가 바람직한데, radiochromic 필름 도시메트리는 이 목적에 매우 적합하다. 작으면서도 휘어진 경계면을 따라서 선량을 측정하기 위해, 눈꺼풀 팬텀과 차폐체 사이에 3-mm 폭의 EBT2 필름 띠를 삽입하고, 6MeV의 전자선을 조사 후, 선량분포를 얻었다. 금속차폐체와 동일한 크기로 아크릴 재질의 차폐체를 제작하여, 금속인공영상물이 없는 CT 영상을 얻은 후, 이를 이용하여 몬테칼로 전산모사를 수행하였다. 전산모사에서는 실제 안구차폐체의 재질을 따라 텅스텐, 알루미늄 및 스테인레스 스틸 등의 물질 정보를 이용하였다. 이렇게 얻은 전산모사 결과는 필름 측정과 2.1% 내에서 일치하였다. 밀리미터 크기 정도로 작고 또한 휘어진 영역에서 radiochromic 필름 도시메트리는 취급도 용이할 뿐만 아니라 만족스런 정확도를 보여주고 있다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.380-381
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• 2012

Bioinspired sea urchin-like structures were fabricated on silicon by inductively coupled plasma (ICP) etching using lens-like shape hexagonally patterned photoresist (PR) patterns and subsequent metal-assisted chemical etching (MaCE) [1]. The lens-like shape PR patterns with a diameter of 2 ${\mu}m$ were formed by conventional lithography method followed by thermal reflow process of PR patterns on a hotplate at $170^{\circ}C$ for 40 s. ICP etching process was carried out in an SF6 plasma ambient using an optimum etching conditions such as radio-frequency power of 50 W, ICP power of 25 W, SF6 flow rate of 30 sccm, process pressure of 10 mTorr, and etching time of 150 s in order to produce micron structure with tapered etch profile. 15 nm thick Ag film was evaporated on the samples using e-beam evaporator with a deposition rate of 0.05 nm/s. To form Ag nanoparticles (NPs), the samples were thermally treated (thermally dewetted) in a rapid thermal annealing system at $500^{\circ}C$ for 1 min in a nitrogen environment. The Ag thickness and thermal dewetting conditions were carefully chosen to obtain isolated Ag NPs. To fabricate needle-like nanostructures on both the micron structure (i.e., sea urchin-like structures) and flat surface of silicon, MaCE process, which is based on the strong catalytic activity of metal, was performed in a chemical etchant (HNO3: HF: H2O = 4: 1: 20) using Ag NPs at room temperature for 1 min. Finally, the residual Ag NPs were removed by immersion in a HNO3 solution. The fabricated structures after each process steps are shown in figure 1. It is well-known that the hierarchical micro- and nanostructures have efficient light harvesting properties [2-3]. Therefore, this fabrication technique for production of sea urchin-like structures is applicable to improve the performance of light harvesting devices.

• 한국산학기술학회논문지
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• 제13권10호
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• pp.4780-4785
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• 2012

최근 스마트폰과 태블릿과 같은 소형 모바일 기기가 확산됨에 따라, 모바일 기기에서 동영상 촬영시 이용되는 비디오 인코더의 성능 최적화의 필요성이 제기되고 있다. 본 논문에서는 모바일 기기를 대상으로 하는 H.264/AVC 기본 프로파일 비디오 인코더를 모바일 기기에 구현하고, 실험을 통해 H.264 인코더의 주요 제어 변수를 최적화하였다. 실험으로는 인코더의 복잡도에 영향을 주는 것으로 알려진 라그랑지안 최적화, 하다마드 변환, 움직임 벡터 탐색 범위, I-프레임 주기, 참조 프레임 수를 다양하게 조합하여 변화시키면서 동영상의 화질, 비트율, 인코딩 시간, 움직임 추정 시간 그리고, 인코딩에 따라 보드에서 소모되는 전력을 측정하였다. 실험에서 측정된 데이터를 분석하여, 모바일 기기에서의 비디오 인코더에서 요구되는 조건을 만족할 수 있는 최적의 H.264/AVC 제어 변수를 위의 다섯 가지 기능 모듈에 대해 결정하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.358-358
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• 2012

The application of BZO (Boron-doped Zinc Oxide) films use as the TCO(Transparent Conductive Oxide) material for display and solar cell industries, where the conductivity of the BZO films plays a critical role for improvement of cell performance. Thin BZO films are deposited on glass substrates by using RF sputter system. Then charging flow rates of O2 gas from zero to 10 sccm, thereby controlling the impurity concentration of BZO. BZO deposited on soda lime glass and RF power was 300 W, frequency was 13.56 MHz, and working pressure was $5.0{\times}10-6$ Torr. The Substrate and glass between distance 200 mm. We measured resistivity, conductivity, mobility by hall measurement system. Optical properties measured by photo voltaic device analysis system. We measured surface build according to oxygen flow rate from XPS (X-ray Photoelectron Spectroscopy) system. The profile of the energy distribution of the electrons emitted from BZO films by the Auger neutralization is measured and rescaled so that Auger self-convolution arises, revealing the detail structure of the valence band. It may be observed coefficient ${\gamma}$ of the secondary electron emission from BZO by using ${\gamma}$-FIB (Gamma-Focused Ion Beam) system. We observed the change in electrical conductivity by correlation of the valence band structure. Therefore one of the key issues in BZO films may be the valence band that detail structure dominates performance of solar cell devices. Demonstrating the secondary electron emission by the Auger neutralization of ions is useful for the determination of the characteristics of BZO films for solar cell and display developments.