• 제목/요약/키워드: Deposition reduction

검색결과 490건 처리시간 0.039초

이중 활성층(a-Si/a-SiNx)의 XeCl 엑시머 레이저 어닐링 효과 (Excimer Laser Annealing Effects of Double Structured Poly-Si Active Layer)

  • 최홍석;박철민;전재홍;유준석;한민구
    • 전자공학회논문지D
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    • 제35D권6호
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    • pp.46-53
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    • 1998
  • 저온 공정으로 제작되는 다결정 실리콘 박막 트랜지스터의 활성층을 이중 활성층(a-Si/a-SiN/sub x/)으로 제작하는 공정을 제안하고 다결정 실리콘 박막 트랜지스터를 제작하였다. 본 논문에서는 활성층의 아래쪽 실리콘 박막에 약간의 질소기를 첨가한 후 그 위에 순수한 비정질 실리콘 박막을 증착하여 엑시머 레이저의 에너지로 비정질 실리콘 박막을 결정화하여 사용하였다. 이중 활성층 (a-Si/a-SiN/sub x/)의 경우, 하부층의 NH₃/SiH₄ 유속비가 증가함에 따라, 상부 a-Si 층의 결정 성장이 촉진됨을 알 수 있었으나, n/sup +/ poly-SiN/sub x/ 층의 전도도 특성을 고려해 볼 때, NH₃/SiH₄ 유속비는 0.11의 상한치를 가짐을 알 수 있었다. 전계 방출 전류에 영향을 미치는 광학적 밴드갭의 경우, poly-Si 박막에 비해 증가하였으며, NH₃/SiH₄ 유속비가 0.11 이하에서도 0.1eV 정도의 증가를 보여, 이로 인하여 소자 제작시 전계 방출 전류가 억제될 것을 예상할 수 있다.

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Ni/AlN/4H-SiC 구조로 제작된 소자의 후열처리 효과 (The Effect of Post-deposition Annealing on the Properties of Ni/AlN/4H-SiC Structures)

  • 민성지;구상모
    • 전기전자학회논문지
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    • 제24권2호
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    • pp.604-609
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    • 2020
  • 본 연구에서는 RF 스퍼터를 이용하여 SiC 기판위에 AlN막을 증착하고 급속 열처리 (RTA) 공정의 온도에 따른 AlN/4H-SiC 구조의 전기적, 재료적 특성에 대한 영향을 분석하였다. 400도에서 RTA 공정을 진행한 Ni/AlN/4H-SiC SBD 소자의 온/오프 비율은 RTA 공정 전 그리고 600도에서 RTA 공정을 한 소자에 비해 약 10배정도 높은 값을 가졌다. 또한 오제이 전자현미경을 통한 원자성분 분석을 통해 증착한 AlN 층내의 존재하는 산소의 양이 후열 처리 조건에 따라 변화함을 확인하였고 소자의 온/오프 비율 그리고 온-저항 등 소자의 성능에 영향을 주는 것을 분석하였다. 추가적으로, 제작한 소자의 노출된 음향 주파수에 따른 전기적 특성변화를 분석하였다.

New curing method using gaseous oxidant on sweet potato (Ipomoea batatas)

  • Jin, Hyunjung;Kim, Wook
    • 한국작물학회:학술대회논문집
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    • 한국작물학회 2017년도 9th Asian Crop Science Association conference
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    • pp.39-39
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    • 2017
  • In Asia, sweet potato (Ipomoea batatas) is a very important crop for starch production. Approximately 74.3% of the total sweet potato production quantity is produced in Asia (FAO, 2014) and China is the largest producer of sweet potato. Post-harvest management is particularly important because it is difficult to maintain the quality as well as quantity of sweet potatoes. Despite the importance of post-harvest management, researches on sweet potato have been focused on production-related study such as breeding of new variety, improved techniques of cultivation, so there is limited research on storage after harvest. Curing is a normal practice after sweet potato harvest to promote wound healing and extend postharvest storage life. In Korea, harvested sweet potatoes are usually cured for 4 to 7 days at $30-33^{\circ}C$ and 80-95% relative humidity within one week. Since the optimum storage temperature of sweet potato is regarded as $15-20^{\circ}C$, additional facilities and costs are required to raise the temperature for curing. However, the majority of small farmers do not have the capacity to provide additional facilities and costs. This study was initiated to suggest a new curing method to accelerate the wound healing by applying chemical oxidation to the wound surface of sweet potato. Oxidative stress is known to play an important role in the synthesis of secondary metabolites including lignin. In addition, chemical oxidation can be applied to prevent spoilage caused by microorganisms. Powerful gaseous oxidant with excellent penetration ability and superior sterilization effect was selected for this study. Lignification, weight loss, and spoilage rate of artificially wounded sweet potatoes were investigated after oxidant fumigation. There were clear differences in morphological analysis such as lignification pattern, lignin deposition color, and continuity of lignified cell layers between oxidant-fumigated sweet potatoes and control. These results show that gaseous oxidant can be used to supplement or replace the curing practice, to improve shelf-life as well as curing cost reduction.

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Importance of Green Density of Nanoparticle Precursor Film in Microstructural Development and Photovoltaic Properties of CuInSe2 Thin Films

  • Hwang, Yoonjung;Lim, Ye Seul;Lee, Byung-Seok;Park, Young-Il;Lee, Doh-Kwon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.471.2-471.2
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    • 2014
  • We demonstrate here that an improvement in precursor film density (green density) leads to a great enhancement in the photovoltaic performance of CuInSe2 (CISe) thin film solar cells fabricated with Cu-In nanoparticle precursor films via chemical solution deposition. A cold-isostatic pressing (CIP) technique was applied to uniformly compress the precursor film over the entire surface (measuring 3~4 cm2) and was found to increase its relative density (particle packing density) by ca. 20%, which resulted in an appreciable improvement in the microstructural features of the sintered CISe film in terms of lower porosity, reduced grain boundaries, and a more uniform surface morphology. The low-bandgap (Eg=1.0 eV) CISe PV devices with the CIP-treated film exhibited greatly enhanced open-circuit voltage (VOC, from 0.265 V to 0.413 V) and fill factor (FF, from 0.34 to 0.55), as compared to the control devices. As a consequence, an almost 3-fold increase in the average power conversion efficiency, 3.0 to 8.2% (with the highest value of 9.02%), was realized without an anti-reflection coating. A diode analysis revealed that the enhanced VOC and FF were essentially attributed to the reduced reverse saturation current density (j0) and diode ideality factor (n). This is associated with the suppressed recombination, likely due to the reduction in recombination sites such as grain/air surfaces (pores), inter-granular interfaces, and defective CISe/CdS junctions in the CIP-treated device. From the temperature dependences of VOC, it was confirmed that the CIP-treated devices suffer less from interface recombination.

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Synthesis and Characterization of Large-Area and Highly Crystalline Molybdenum Disulphide Atomic Layer by Chemical Vapor Deposition

  • Park, Seung-Ho;Kim, Yooseok;Kim, Ji Sun;Lee, Su-Il;Cha, Myoung-Jun;Park, Chong-Yun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.356.1-356.1
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    • 2014
  • The Isolation of few-layered transition metal dichalcogenides has mainly been performed by mechanical and chemical exfoliation with very low yields. in particular, the two-dimensional layer of molybdenum disulfide (MoS2) has recently attracted much interest due to its direct-gap property and potential application in optoelectronics and energy harvesting. However, the synthetic approach to obtain high-quality and large-area MoS2 atomic thin layers is still rare. In this account, a controlled thermal reduction-sulfurization method is used to synthesize large-MoOx thin films are first deposited on Si/SiO2 substrates, which are then sulfurized (under vacuum) at high temperatures. Samples with different thicknesses have been analyzed by Raman spectroscopy and TEM, and their photoluminescence properties have been evaluated. We demonstrated the presence of mono-, bi-, and few-layered MoS2 on as-grown samples. It is well known that the electronic structure of these materials is very sensitive to the number of layer, ranging from indirect band gap semiconductor in the bulk phase to direct band gap semiconductor in monolayers. This synthetic approach is simple, scalable, and applicable to other transition metal dichalcogenides. Meanwhile, the obtained MoS2 films are transferable to arbitrary substrates, providing great opportunities to make layered composites by stacking various atomically thin layers.

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AMOLED 에이징 챔버 신호 생성 및 가열 시스템 (AMOLED Aging Chamber Signal Generation and Heating System)

  • 이병권;조광희;정회경
    • 한국정보통신학회논문지
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    • 제22권6호
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    • pp.861-866
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    • 2018
  • OLED(Organic Light-Emitting Diode) 제조에서 에이징(aging) 공정은 제조 효율을 높이고 에이징 보정을 위한 보정 값을 측정한다. OLED의 에이징 보정을 위한 보정 값은 구동 신호에 적용할 수 있다. OLED 에이징 공정은 미리 설정된 구동신호와 온도에 의해 정해진 시간 동안 빛을 출력한 후 전류를 측정한다. OLED 제조 공정에서 증착 및 기온에 의해 균일하지 않은 것에 대해 에이징을 가하는 것이다. 이 시간이 OLED 효율 감소에 미치는 영향은 거의 없다. 에이징을 위해 필요한 조건을 만들기 위해 가열장치와 신호 생성 시스템이 요구된다. 가열장치와 신호 생성 시스템에 의해 측정된 결과값은 OLED 제조에서 전력 요구사항, 균일성, 효율성을 평가하는 근거로 사용할 수 있다. 이에 본 논문에서는 실용적인 OLED 에이징 보정을 위한 구동 신호 생성 및 가열 시스템의 연동을 위한 구성을 제안하고 이를 구현하였다.

디젤엔진 배출가스 질소산화물 저감을 위한 Solid SCR용 Ammonium Carbonate 중간생성물인 재응고 물질의 분석 연구 (Analytical Study on Re-solidification Materials(Ammonium Carbonate Intermediates) for NOx Reduction of Exhaust Emissions in Diesel Engine with Solid SCR)

  • 신종국;이호열;윤천석;김홍석
    • 한국자동차공학회논문집
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    • 제22권4호
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    • pp.152-159
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    • 2014
  • Urea solution as a reductant of SCR has been widely used to reduce NOx emissions from diesel engine. But it has lots of problems which are freezing at low temperature due to liquid state, deposition of solid formation in the exhaust, dosing device, and complex package such as mixers for uniform concentration of ammonia. In order to overcome these obstacle, ammonium carbonate which is one of solid ammonium materials to produce ammonia gas directly by sublimation process is considered. Simple reactor with visible widow was designed to predict equilibrium temperature and pressure of ammonium carbonate. To simulate real operation conditions under automobile environment, several cycles of heating and cooling condition were settled, two different re-solidification materials were extracted from the reactor and visible window. Analytical study is performed to characterize these unknown materials by XRD(X-Ray Diffraction), FT-IR(Fourier Transform Infrared Spectroscopy), and EA(Elemental Analyzer). From analytical results, re-solidification materials from heating and cooling cycles are very similar to original material of ammonium carbonate.

Effect of Triiodobenzoic Acid on Broomrape (Orobanche ramosa) Infection and Development in Tomato Plants

  • Harb, Amal M.;Hameed, Khalid M.;Shibli, Rida A.
    • The Plant Pathology Journal
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    • 제20권2호
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    • pp.81-84
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    • 2004
  • Branched broomrape (Orobanche ramosa) is a holo-parasitic flowering plant that attaches to the root of its host, green plant, by means of a specialized structure known as haustorium. Following successful contact and penetration on susceptible plant root, complex tissue of Orobanche cells is formed which is known as the tubercle. Newly formed tubercles contain high activity ofindole-3-acetic acid (IAA). Triiodobenzoic acid (TIBA), as an inhibitor of IAA polar transport, was utilized to investigate the supply and requirement of auxin to the developing O. ramosa on tomato plant. There was no significant reduction in the incidence of O. ramosa per pot of different TIBA treatments. However, infection severity in terms of the number of O. ramosa shoots that emerged per plant and number of attachments per plant root system were significantly reduced by 60 % and 45 % on TIBA treated plants, respectively. Histo-logical studies revealed conspicuous delay in the initiation of xylem vessel differentiation inside tubercles of the TIBA treated tomato plants. Also, differentiated vessels showed thinner secondary wall deposition, and improper alignment within bundles inside those tubercles. They were wider and shorter in diameter in comparison to those of untreated plants. These findings were attri-buted to the short supply of IAA required for normal development, and to the xylem vessel differentiation of O. ramosa tubercles on infected tomato. Hence, this parasitic flowering plant seems to depend upon its host in its requirements for IAA, in a source to sink relation-ship.

Effect of Foliar and Root Application of Silicon Against Rice Blast Fungus in MR219 Rice Variety

  • Abed-Ashtiani, Farnaz;Kadir, Jugah-Bin;Selamat, Ahmad-Bin;Hanif, Ahmad Husni Bin-Mohd;Nasehi, Abbas
    • The Plant Pathology Journal
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    • 제28권2호
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    • pp.164-171
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    • 2012
  • Rice blast disease caused by Magnaporthe grisea (Hebert) Barr [teleomorph] is one of the most devastating diseases in rice plantation areas. Silicon is considered as a useful element for a large variety of plants. Rice variety MR219 was grown in the glasshouse to investigate the function of silicon in conferring resistance against blast. Silica gel was applied to soil while sodium silicate was used as foliar spray at the rates of 0, 60, 120, 180 g/5 kg soil and 0, 1, 2, 3 ml/l respectively. The treatments were arranged in a completely randomized design. Disease severity and silicon content of leaves were compared between the non-amended controls and rice plants receiving the different rates and sources of silicon. Silicon at all rates of application significantly (${\alpha}$ = 0.05) reduced the severity of disease with highest reduction (75%) recorded in treatments receiving 120 g of silica gel. SEM/EDX observations demonstrated a significant difference in weight concentration of silicon in silica cells on the leaf epidermis between silicon treated (25.79%) and non treated plants (7.87%) indicating that Si-fertilization resulted in higher deposition of Si in silica cells in comparison with non-treated plants. Application of silicon also led to a significant increase in Si contents of leaves. Contrast procedures indicated higher efficiency of silica gel in comparison to sodium silicate in almost all parameters assessed. The results suggest that mitigated levels of disease were associated with silicification and fortification of leaf epidermal cells through silicon fertilization.

수질 장기관측자료를 활용한 우리나라의 지하수 수질변동 특성

  • 김규범;이강근
    • 한국지하수토양환경학회:학술대회논문집
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    • 한국지하수토양환경학회 2003년도 총회 및 춘계학술발표회
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    • pp.94-96
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    • 2003
  • Since 1995, MOCT(Ministry of Construction and Transportation) and KOWACO(Korea Water Resources Corporation) have established the National Groundwater Monitoring Network in South Korea and also MOE(Ministry of Environment) has operated Groundwater Quality Monitoring network. Until 2001, 202 monitoring stations by MOCT and 780 monitoring wells by MOE have been constructed, measured groundwater level and analyzed water samples. Groundwater quality analysis has been conducted two times a year during last 6 years for all monitoring wells. The quality data has about 15 components including pH, COD, Count of Coliform group, and etc.. Trend analysis has been peformed for 6 components(Coliform, pH, COD, NO$_3$-N, Cl and EC) of water quality which are analyzed more than 7 times for total monitoring wells. Two test methods have been used ; Sen's test and Mann-Kendall test. These trend tests have been done at the 0.05 significance level. By the result of Sen's test, Count of Coliform group has either upward or downward trends at 4.3 percent of the monitoring points. pH does at 5.6 percent, COD does at 8.6 percent, Nitrate-Nitrogen does at 13.2 percent, Chloride does at 13.4 percent, and. EC does at 11.6 percent of the monitoring points. The exact causes of the groundwater quality trends are difficult to specify. Notable downward trends in nitrate at many monitoring points may be the result of reduction on some contamination sources. Potential causes include diminished agricultural areas, improvements in sewage treatment and a decrease in atmospheric deposition. Increase in chloride at many monitoring points may be the result of increased non-point source pollution such as road salting and runoff from sprawling paved developments and suburbs.

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