• Title/Summary/Keyword: Deposition flux

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탄소 음이온 빔에 의해 증착된 DLC 필름의 특성 평가

  • 김인교;김용환;이덕연;최동준;한동원;백홍구
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.59-59
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    • 1999
  • DLC(diamond-like carbon)필름은 다이아몬드와 유사한 강도, 낮은 마차계수, 높은 Optical band gap, NEA(negative electron affinity)등의 우수한 특성을 가지고 있어, 내마모 코팅이나 정보저장 매체의 윤활 코팅, FED(field emission display)의 전계방출소자등 다양한 분야에의 응용이 연구되고 있다. DLC 필름은 PECVD(plasma enhanced chemical vapor deposition), IBAD(ion beam assisted deposition), Laser ablation, Cathodic vacuum arc등의 process를 이용하여 증착되고 있다. 특히 이러한 필름의 물성은 입사되는 이온의 에너지에 의해 좌우되는데, Lifshitz 등의 연구에 의하여 hyperthermal species를 이용한 DLC 필름의 성장은 초기에 subsurface로의 shallow implantation이 일어난 후 높은 sp3 fraction을 갖는 필름이 연속적으로 성장한다는 subplantation model이 제시 되었다. 본 연구에서는 기판과 subplantation 영역이 이후 계속하여 증착되는 순수 DLC 필름의 특성 변호에 미치는 영향에 대하여 관심을 가지고 실험을 행하였다. 본 실험에서는 상기 제시되어 있는 방법보다도 더욱 정확하고도 독립적으로 탄소 음이온의 에너지와 flux를 조절할 수 있는 Cs+ ion beam sputtering system을 이용하여 탄소 음이온의 에너지를 40eV에서 200eV까지 변화시키며 필름을 증착하였다. Si(100) 웨이퍼를 기판으로 사용하였고 증착 압력은 5$\times$10-7torr 였으며 인위적인 기판의 가열은 하지 않았다. 또한 Ion beam deposited DLC film의 growth process를 연구하기 위하여 200eV의 탄소 음이온을 시간(증착두께)을 변수로 하여 증착하였고, 이 때에는 Kaufman type의 gas ion beam을 이용하여 500eV의 Ar+ ion으로 pre-sputering을 행하였다. 탄소 음이온의 에너지와 증착두께에 따라 증착된 film 내의 sp3/sp2 ratio 의 변화를 XPS plasmon loss 와 Raman spectra를 이용하여 분석하였다. 또한 증착두께에 따른 interlayer의 결합상태를 관찰하기 위하여 AES와 XPS 분석을 보조로 행하였다.

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$Ba[Ce_{0.9}Y_{0.1}]O_{3-\delta}$ - Ni Composite Membrane for Hydrogen Separation by Aerosol Deposition Method (에어로졸 증착법[aerosol depostion method]에 의한 $Ba[Ce_{0.9}Y_{0.1}]O_{3-\delta}$ - Ni 수소분리막 제조)

  • Park, Young-Soo;Byeon, Myeong-Seob;Choi, Jin-Sub;Kim, Jin-Ho;Hwang, Kwang-Taek
    • Transactions of the Korean hydrogen and new energy society
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    • v.21 no.2
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    • pp.117-122
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    • 2010
  • BCY($Ba(Ce_{0.9}Y_{0.1})O_{3-\delta}$) oxide, shows high protonic conductivity at high temperatures, and are referred to as hydrogen separation membrane. For high efficiency of hydrogen separation ($H_2$ flux and selectivity) and low fabrication cost, ultimate thin and dense BCY-Ni layer have to be coated on a porous substrate such as $ZrO_2$. Aerosol depostion (AD) process is a novel technique to grow ceramic film with high density and nano-crystal structure at room-temperature, and would be applied to the fabrication process of AD integration ceramic layer effectively. XRD and SEM measurements were conducted in order to analyze the characteristics of BCY-Ni membrane fabricated by AD process.

High Functional $GdB_2C_3O_{7-x}$ Thin Films Fabricated by Pulsed Laser Deposition

  • Song, S.H.;Ko, K.P.;Song, K.J.;Moon, S.H.;Yoo, S.I.
    • Progress in Superconductivity and Cryogenics
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    • v.8 no.4
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    • pp.15-18
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    • 2006
  • REBCO coated conductors (RE: rare earth elements) have recently drawn great attention since they are known to possess stronger flux pinning centers in high magnetic fields compared with YBCO coated conductors. In this study, $GdBa_2Cu_3O_{7-d}(GdBCO)$ was selected to investigate the influence of the distance between target and substrate and substrate temperature on the superconducting properties of GdBCO films on the $SrTiO_3(100)$ substrate. Samples were fabricated by pulsed laser deposition (PLD) with a Nd:YAG laser (355nm). Under a given oxygen pressure of 800mTorr, we changed the distance between target and substrate from 5.5cm to 7.0cm and the substrate temperature from $750^{\circ}C\;to\;850^{\circ}C$. The crystallinity and texture of GdBCO films were analyzed by X-ray diffraction (XRD), and the surface morphology was observed by the scanning electron microscopy (SEM). Tc and Jc values were measured by the four point probe method. High quality GdBCO films with Tc of 89.7K and Jc over $1MA/cm^2$ at 77 K in self field were successfully fabricated by optimizing processing parameters. The detailed processing conditions, microstructure and superconducting properties will be presented for a discussion.

HTS Josephson Junctions with Deionized Water Treated Interface (증류수 계면처리를 이용한 고온초전도체 죠셉슨 접합 제작)

  • Moon, S.H.;Park, W.K.;Kye, J.I.;Park, J.D.;Oh, B.
    • Progress in Superconductivity
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    • v.2 no.2
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    • pp.76-80
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    • 2001
  • We have fabricated YBa$_2$Cu$_3$$O_{7-x}$ (YBCO) ramp-edge Josephson junctions by modifying ramp edges of the base electrodes without depositing any artificial barrier layer. YBa$_2$Cu$_3$O/7-x//SrTiO$_3$ (YBCO/STO) films were deposited on SrTiO$_3$(100) by on-axis KrF laser deposition. After patterning the bottom YBCO/STO layer, the ramp edge was cleaned by ion-beam and then reacted with deionized water under various conditions prior to the deposition of counter-electrode layers. The top YBCO/STO layer was deposited and patterned by photolithography and ion milling. We measured current-voltage (I-V) characteristics, magnetic field modulation of the critical current at 77 K. Some showed resistively shunted junction (RSJ)-type I-V characteristics, while others exhibited flux-flow behaviors, depending on the dipping time of the ramp edge in deionized water. Junctions fabricated using optimized conditions showed fairly uniform distribution of junction parameters such as I$_{c}$R$_{n}$ values, which were about 0.16 mV at 77 K with 1$\sigma$~ 24%. We made a dc SQUID with the same deionized water treated junctions, and it showed the sinusoidal modulation under applied magnetic field at 77 K. 77 K.

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Fabrication of Photocatalytic TiO2 thin Film Using Aerosol Deposition Method and its Filtration Characteristics (에어로졸 증착법을 이용한 광촉매 TiO2 박막 제조 및 박막의 여과 특성)

  • Choi, Wonyoul;Lee, Jinwoo;Kim, Shijun;Kim, Jongoh
    • Journal of the Korean GEO-environmental Society
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    • v.11 no.1
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    • pp.5-11
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    • 2010
  • The objective of this study is to evaluate the effect of operational parameters such as rotation speed and vibrating milling time for the fabrication of photocatalytic $TiO_2$ thin film using aerosol deposition methods. $TiO_2$ powders produced in the range of 1,000-3,000 rpm of rotation speed of centrifugal separator are ineffective on the fabrication of $TiO_2$ thin film by aerosol deposition due to the problem of nozzle powder jam. $TiO_2$ powders controlled by vibrating milling had about 420 nm of average diameter after 2 hr of vibrating milling time. The result of XRD analysis indicated that $TiO_2$ powders had a anatase phase. Vibrating milling methods was considered to be an effective pre-treatment process for $TiO_2$ powder control. Consequently $TiO_2$ photocatalytic thin film with dispersion of anatase crystallites controled by vibrating milling was successfully fabricated by aerosol deposition. The permeation flux of $TiO_2$ photocatalytic thin film with the immobilized $TiO_2$ powder was higher than that of suspended $TiO_2$ powder. Therefore, $TiO_2$ photocatalytic thin film promises to be one of the effective methods for enhancing filtration performance for the treatment of organic pollutants.

Fabrication and Optical Property of ZnO/SiO2 Branch Hierarchical Nanostructures (ZnO/SiO2 가지형 나노계층구조의 제작 및 광학적 특성 연구)

  • Ko, Y.H.;Kim, M.S.;Yu, J.S.
    • Journal of the Korean Vacuum Society
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    • v.20 no.5
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    • pp.381-386
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    • 2011
  • We fabricated the ZnO (zinc oxide)/$SiO_2$ (silicon dioxide) branch hierarchical nanostructures by the e-beam evaporation of $SiO_2$ onto the surface of the electrochemically grown ZnO nanorods on Si substrate, which leads to the self-assembled $SiO_2$ nanorods by oblique angle deposition between vapor flux and vertically aligned ZnO nanorods. In order to investigate the effects of $SiO_2$ deposition on the morphology and optical property of ZnO/$SiO_2$ branch hierarchical nanostructures, the evaporation time of $SiO_2$ was varied under a fixed deposition rate of 0.5 nm/s. The vertically aligned ZnO nanorods on Si substrate exhibited a low reflectance of <10% in the wavelength range of 300~535 nm. For ZnO/$SiO_2$ branch hierarchical nanostructures at 100 s of evaporation time of $SiO_2$, the more improved antireflective property was achieved. From these results, ZnO/$SiO_2$ branch hierarchical nanostructures are very promising for optoelectronic and photovoltaic device applications.

Growth and Structural Properties of Fe Thin Films Electrodeposited on n-Si(111) (n-Si(111) 기판 위에 전기증착에 의한 Fe 박막의 성장과 구조적 특성)

  • Kim Hyun-Deok;Park Kyeong-Won;Lee Jong-Duk
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.10 no.9
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    • pp.1663-1670
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    • 2006
  • Single crystal Fe thin films were grown directly onto n-Si(111) substrates by pulsed electrodeposition. Cyclic Voltammogram(CV) indicated that the $Fe^{2+}/n-Si(111)$ interface shows a good diode behavior by forming a Schottky barrier. From Mott-Schottky (MS) relation, it is found that the flat-band potential of n-Si(111) substrate and equilibrium redox potential of $Fet^{2+}$ ions are -0.526V and -0.316V, respectively. The nucleation and growth kinetics at the initial reaction stages of Fe/n-Si(111) substraste was studied by current transients. Current transients measurements have indicated that the deposition process starts via instantaneous nucleation and 3D diffusion limited growth. After the more deposition, the deposition flux of Fe ions was saturated with increase of deposition time. from the as-deposited sample obtained using the potential pulse of 1.4V and 300Hz, it is found that Fe nuclei grows to three dimensional(3D) islands with the average size of about 100nm in early deposition stages. As the deposition time increases, the sizes of Fe nuclei increases progressively and by a coalescence of the nuclei, a continuous Fe films grow on the Si surface. In this case, the Fe films show a highly oriented columnar structure and x-ray diffraction patterns reveal that the phase ${\alpha}-Fe$ grows on the n-Si(111) substrates.

Prediction of Critical Heat Flux for Saturated Flow Boiling Water in Vertical Narrow Rectangular Channels (얇은 수직 사각유로에서의 포화비등조건 임계열유속 예측)

  • Choi, Gil Sik;Chang, Soon Heung;Jeong, Yong Hun
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.39 no.12
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    • pp.953-963
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    • 2015
  • There is an increasing need to understand the thermal-hydraulic phenomena, including the critical heat flux (CHF), in narrow rectangular channels and consider these in system design. The CHF mechanism under a saturated flow boiling condition involves the depletion of the liquid film of an annular flow. To predict this type of CHF, the previous representative liquid film dryout models (LFD models) were studied, and their shortcomings were reviewed, including the assumption that void fraction or quality is constant at the boundary condition for the onset of annular flow (OAF). A new LFD model was proposed based on the recent constitutive correlations for the droplet deposition rate and entrainment rate. In addition, this LFD model was applied to predict the CHF in vertical narrow rectangular channels that were uniformly heated. The predicted CHF showed good agreement with 284 pieces of experimental data, with a mean absolute error of 18. 1 % and root mean square error of 22.9 %.

PVDF/h-BN hybrid membranes and their application in desalination through AGMD

  • Moradi, Rasoul;Shariaty-Niassar, Mojtaba;Pourkhalili, Nazila;Mehrizadeh, Masoud;Niknafs, Hassan
    • Membrane and Water Treatment
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    • v.9 no.4
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    • pp.221-231
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    • 2018
  • A new procedure to produce poly(vinylidene fluoride)/boron nitride hybrid membrane is presented for application in membrane distillation (MD) process. The influence of hexagonal boron nitride (h-BN) incorporation on the performance of the polymeric membranes is studied through the present investigation. For this aim, h-BN nanopowders were successfully synthesized using the simple chemical vapor deposition (CVD) route and subsequent solvent treatments. The resulting h-BN nanosheets were blended with poly(vinylidene fluoride) (PVDF) solution. Then, the prepared composite solution was subjected to phase inversion process to obtain PVDF/h-BN hybrid membranes. Various examinations such as scanning electron microscopy (SEM), wettability, permeation flux, mechanical strength and liquid entry pressure (LEP) measurements are performed to evaluate the prepared membrane. Moreover, Air gap membrane distillation (AGMD) experiments were carried out to investigate the salt rejection performance and the durability of membranes. The results show that our hybrid PVDF/h-BN membrane presents higher water permeation flux (${\sim}18kg/m^2h$) compared to pristine PVDF membrane. In addition, the experimental data confirms that the prepared nanocomposite membrane is hydrophobic (water contact angle: ${\sim}103^{\circ}$), has a porous skin layer (>85%), as well competitive fouling resistance and operational durability. Furthermore, the total salt rejection efficiency was obtained for PVDF/h-BN membrane. The results prove that the novel PVDF/h-BN membrane can be easily synthesized and applied in MD process for salt rejection purposes.

Response of estuary flow and sediment transport according to different estuarine dam locations and freshwater discharge intervals

  • Steven Figueroa;Minwoo Son
    • Proceedings of the Korea Water Resources Association Conference
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    • 2023.05a
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    • pp.519-519
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    • 2023
  • Estuarine dams are a recent and global phenomenon. While estuarine dams can provide the benefit of improved freshwater resources, they can also alter estuarine processes. Due to the wide range of estuarine types and estuarine dam configurations, the effect of estuarine dams on estuaries is not well understood in general. To develop a systematic understanding of the effect of estuarine dam location and freshwater discharge interval on a range of estuarine types (strongly stratified, partially mixed, periodically stratified, and well-mixed), this study used a coupled hydrodynamic-sediment dynamic numerical model (COAWST) and compared flow, sediment transport, and morphological conditions in the pre- and post-dam estuaries. For each estuarine type, scenarios with dam locations at 20, 55 and 90 km from the mouth and discharge intervals of a discharge every 0.5, 3, and 7 days were investigated. The results were analyzed in terms of change in tide, river discharge, estuarine classification, and sediment flux mechanism. The estuarine dam location primarily affected the tide-dominated estuaries, and the resonance length was an important length scale affecting the tidal currents and Stokes return flow. When the location was less than the resonance length, the tidal currents and Stokes return flow were most reduced due to the loss of tidal prism, the dead-end channel, and the shift from mixed to standing tides. The discharge interval primarily affected the river-dominated estuaries, and the tidal cycle period was an important time scale. When the interval was greater than the tidal cycle period, notable seaward discharge pulses and freshwater fronts occurred. Dams located near the mouth with large discharge interval differed the most from their pre-dam condition based on the estuarine classification. Greater discharge intervals, associated with large discharge magnitudes, resulted in scour and seaward sediment flux in the river-dominated estuaries, and the dam located near the resonance length resulted in the greatest landward tidal pumping sediment flux and deposition in the tide-dominated estuaries.

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