• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.125-125
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• 2012

Graphene was epitaxially grown on a 6H-SiC(0001) substrate by thermal decomposition of SiC under ultrahigh vacuum conditions. Using scanning tunneling microscopy (STM), we monitored the evolution of the graphene growth as a function of the temperature. We found that the evaporation of Si occurred dominantly from the corner of the step rather than on the terrace. A carbon-rich $(6{\sqrt{3}}{\times}6{\sqrt{3}})R30^{\circ}$ layer, monolayer graphene, and bilayer graphene were identified by measuring the roughness, step height, and atomic structures. Defect structures such as nanotubes and scattering defects on the monolayer graphene are also discussed. Furthermore, we confirmed that the Dirac points (ED) of the monolayer and bilayer graphene were clearly resolved by scanning tunneling spectroscopy (STS).

• Bulletin of the Korean Chemical Society
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• v.5 no.1
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• pp.41-44
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• 1984

The oxidation of carbon monoxide has been investigated on Ni-doped ${\alpha}-Fe_2O_3$ catalyst at 300 to $450^{\circ}$. The oxidation rates have been correlated with 1.5-order kinetics; first with respect to CO and 1/2 with respect to $O_2$. Carbon monoxide is adsorbed on lattice oxygen of Ni-doped ${\alpha}-Fe_2O_3$, while oxygen appears to be adsorbed on oxygen vacancy formed by Ni-doping. The conductivities show that adsorption of CO on O-lattice produces conduction electron and adsorption of $O_2$ on O-vacancy withdraws the conduction electron from vacancy. The adsorption process of CO on O-lattice is rate-determining step and dominant defect of Ni-doped ${\alpha}-Fe_2O_3$ is suggested from the agreement between kinetic and conductivity data.

• Bulletin of the Korean Chemical Society
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• v.11 no.4
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• pp.339-342
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• 1990

$Gd_2O_3-ThO_2$ solid solutions containing 8,10 and 12 mol % $ThO_2$ were synthesized with spectroscopically pure $Gd_2O_3,$ and $ThO_2$ polycrystalline powders. X-ray diffraction revealed that all synthesized specimens have the modified fluorite structure, and the lattice parameter of $Gd_2O_3$ is nearly unchanged with increasing $ThO_2$ mol %. Both ac and dc conductivities were measured in the temperature range $500-1100^{\circ}C$ under $Po_2's$ from $10^{-6}$ to $10^{-1}$ atm. The dc conductivities are nearly independent of $Po_2,$ and agree with the ac values. This implies that the solid solutions are ionic conductors. The conductivity increases with increasing $ThO_2$ mol % with an average activation energy of 1.23 eV. An oxygen interstitial defect and ionic hopping conduction are suggested.

• Bulletin of the Korean Chemical Society
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• v.29 no.10
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• pp.1960-1964
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• 2008

The roles of coordinating ligands (TOPO, OA, HDA, and TDPA) for the synthesis of ZnO nanoparticles are investigated. Various shapes (hexagonal cone, hexagonal plate, and rod) and sizes (5-100 nm) of ZnO nanoparticles are prepared in relation to the coordinating ligands. The hexagonal shapes ($\leq$ 100 nm) are synthesized with TOPO and OA, while smaller size nanorods (5 ${\times}$ 30 nm) are with TOPO and TDPA. The relative intensities of two distinctive emission bands centered at 385 and 500 nm, which are related to the exciton and defect states, respectively, depend on the crystal qualities of ZnO nanoparticles affected by the coordinating ligands. The intense UV emissions with the reduced visible emissions are found in the monodisperse nanoparticles such as hexagonal cones and nanorods, suggesting that the monodispersity as well as the crystallinity is closely related to the coordinating ligands. The blue-shift of photoluminescence and absorption edge is observed in the nanorods, because the sizes of the nanorods are in the quantum confinement regime.

• Tribology and Lubricants
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• v.31 no.6
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• pp.239-244
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• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• Journal of the Korean Chemical Society
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• v.31 no.3
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• pp.225-230
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• 1987

Electrical conductivity of $CdO-La_2O_3$ system containing 0.8mol% of CdO was measured from 500 to $900^{\circ}C$ at oxygen partial pressures of $10^{-7}\;to\;10^{-1}$ atm. Plots of log ${\sigma}$ vs. 1/T at constant $PO_2$ are found to be linear and the activation energy appears to be 0.97eV. The log ${\sigma}$vs. log $PO_2$ is found to be linear at oxygen pressures of $10^{-7}\;to\;10^{-1}$ atm and $500{\sim}900^{\circ}C$. The conductivity dependence on $PO_2$ at the above temperature range is given by ${\sigma}\;{\alpha}\;PO_2^{1/4}$. The defect structure in this system is believed to be complex, i.e., ${V_{La}}^{'''}$ and $V\"{o}$. The interpretations of conductivity dependences on temperature and $PO_2$ are presented and conduction mechanism is proposed to explain the data.

• Journal of the Korean Chemical Society
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• v.30 no.1
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• pp.33-39
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• 1986

The x-values of nonstoichiometry chemical formulas, Sm$O_{1.5+x}$ and Zr$O_{2+x}$, have been measured in temperature range from 500$^{\circ}$C to 1000$^{\circ}$C under oxygen pressure of 2 ${\times}10^{-1}$ to 1 ${\times}10^{-5}$ atm by gravimetric method. The enthalpies of formation of defect in samarium sesquioxide and zirconium dioxide decrease with decreasing oxygen pressure and are all positive. The 1/n values calculated from the slopes of the plots of log x vs. log $PO_2$ increase with temperature and are positive values which mean the higher oxygen pressure dependence at higher temperature. From x-values and thermodynamic data, it is found out that the nonstoichiometric defect is fully ionized metal vacancy. The conduction mechanisms of the systems are also discussed with respect to the nonstoichiometric compositions.

• Bulletin of the Korean Chemical Society
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• v.33 no.8
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• pp.2657-2668
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• 2012

We obtain the general formulation which can handle the rotational preionization spectrum of $H_2$ in the region above its ${H_2}^+$ ionization threshold, ($^2{\sum}_g^+$, ${\nu}^+=0$, $N^+=0$) converging toward its rotationally excited (${\nu}^+=0$, $N^+=2$) limit and perturbed by the vibrationally excited levels $7p{\pi}$ ${\nu}=1$ and $5p{\pi}$ ${\nu}^=2$. The formulation is based on phase-shifted multichannel quantum-defect theory. With this formulation, resonance structures are analyzed in detail.

• Bulletin of the Korean Chemical Society
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• v.31 no.11
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• pp.3201-3211
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• 2010

Previous work on the phase-shifted version of the multichannel quantum-defect theory (MQDT) for a system involving 2 closed and many open channels (Lee, C.-W. Bull. Korean Chem. Soc. 2010, 31, 1669) was extended to obtain the formulae of the spectral shape parameters with the structure of a pole extracted explicitly for general cases only limited by 2 non-degenerate closed channels. The theory was applied to the narrow $6p_{1/2,3/2}np$ J = 1 autoionizing Rydberg series in barium perturbed by the $6p_{3/2}nf$ states obtained by de Graaff et al.

• Bulletin of the Korean Chemical Society
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• v.31 no.6
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• pp.1669-1680
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• 2010

The phase-shifted version of the multichannel quantum-defect theory (MQDT) was reformulated by disentangling the interloper spectrum from the perturbed dense Rydberg series for a systems involving 2 closed and more than 1 open channel. The theory was applied successfully to Martins and Zimmermann's photoionization spectra of the Rydberg series Cu I $3d^9\;4s(^1D_2)\;nd^2G_{9/2}$ perturbed by the interloper, $3d^9\;4p^2\;^4F_{9/2}$, for which Cohen's 4 channel QDT had failed. The zero surface graphic of the perturbed Fano's asymmetry parameter q of the autoionization spectrum of dense Rydberg series by the interloper was determined by only two parameters for this system. It was used as a map to trace the transformation route of the 3 channel autoionization spectra to the 4 channel spectra when the channel coupling of the closed channels with a newly added open channel was turned on progressively.