• 제목/요약/키워드: Cr layer

검색결과 808건 처리시간 0.026초

50nm급 패턴 니켈 스탬퍼 제작에 관한 연구 (A Study on the Fabrication of Ni Stamper for 50nm Class of Patterns)

  • 유영은;오승훈;이관희;김선경;윤재성;최두선
    • 한국금형공학회:학술대회논문집
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    • 한국금형공학회 2008년도 하계 학술대회
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    • pp.35-38
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    • 2008
  • A pattern master and a Ni stamper for 50nm class of patterns are fabricated through e-beam lithography and Ni electroforming process. A model pattern set is designed, which is based on unit patterns of 50nm, 100nm, 150nm and 200nm in length and 50nm in width. The e-beam process is optimized to fabricate designed patterns with some parameters including dose, accelerating voltage, focal distance and developing time. For Ni electroforming to fabricate Ni stamper, a seed layer, a conducting layer, is deposited first on the pattern master fabricated by an e-beam lithography process. Ni, Ti/Ni and Cr are first tested to find optimal seed layer process. Currently the best result is obtained when adopting Cr deposited to be 100nm thick with continuous tilting motion of the master substrate during the deposition process.

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PWR 1차측 환경에서 Alloy 600 응력부식균열 선단 부근에서의 산화 거동 (Oxidation Behavior around the Stress Corrosion Crack Tips of Alloy 600 under PWR Primary Water Environment)

  • 임연수;김홍표;황성식
    • Corrosion Science and Technology
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    • 제11권4호
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    • pp.141-150
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    • 2012
  • Stress corrosion cracks in Alloy 600 compact tension specimens tested at $325^{\circ}C$ in a simulated primary water environment of pressurized water reactor were analyzed by analytical transmission electron microscopy and secondary ion mass spectroscopy (SIMS). From a fine-probe chemical analysis, oxygen was found on the grain boundary just ahead of the crack tip, and chromium oxides were precipitated on the crack tip and the grain boundary attacked by the oxygen diffusion, leaving a Cr/Fe depletion (or Ni enrichment) zone. The oxide layer inside the crack was revealed to consist of a double (inner and outer) layer. Chromium oxides existed in the inner layer, with NiO and (Ni,Cr) spinels in the outer layer. From the nano-SIMS analysis, oxygen was detected at the locations of intergranular chromium carbides ahead of the crack tip, which means that oxygen diffused into the grain boundary and oxidized the surfaces of the chromium carbides. The intergranular chromium carbide blunted the crack tip, thereby suppressing the crack propagation.

Raman spectroscopy of eutectic melting between boride granule and stainless steel for sodium-cooled fast reactors

  • Hirofumi Fukai;Masahiro Furuya;Hidemasa Yamano
    • Nuclear Engineering and Technology
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    • 제55권3호
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    • pp.902-907
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    • 2023
  • To understand the eutectic reaction mechanism and the relocation behavior of the core debris is indispensable for the safety assessment of core disruptive accidents (CDAs) in sodium-cooled fast reactors (SFRs). This paper addresses reaction products and their distribution of the eutectic melting/solidifying reaction of boron carbide (B4C) and stainless-steel (SS). The influence of the existence of carbon on the B4C-SS eutectic reaction was investigated by comparing the iron boride (FeB)-SS reaction by Raman spectroscopy with Multivariate Curve Resolution (MCR) analysis. The scanning electron microscopy with dispersive X-ray spectrometer was also used to investigate the elemental information of the pure metals such as Cr, Ni, and Fe. In the B4C-SS samples, a new layer was formed between B4C/SS interface, and the layer was confirmed that the formed layer corresponded to amorphous carbon (graphite) or FeB or Fe2B. In contrast, a new layer was not clearly formed between FeB and SS interface in the FeB-SS samples. All samples observed the Cr-rich domain and Fe and Ni-rich domain after the reaction. These domains might be formed during the solidifying process.

Evolution of Cube Texture in the Nickel-Silver-Stainless steel Multi-layer Sheet

  • Lee, Hee-Gyoun;Jung, Yang-Hong;Hong, Gye-Won
    • Progress in Superconductivity
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    • 제1권1호
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    • pp.51-55
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    • 1999
  • A Ni/Ag/Stainless steel 310S(SS310S) multi-layer sheet has been fabricated by a combination of vacuum brazing, cold rolling and texture annealing processes. After heat-treating the thin Ni/Ag/SS310S multi-layer sheet at $900^{\circ}C$ for 2h, development of (100)<001>cube texture on Ni surface was revealed by (111) pole figure. Quantitative chemical analysis was made by EPMA for the cross-section of the Ni/Ag/SS310S multi-layer sheet. EPMA results showed that Ag diffusion into the Ni layer, which may suppress the cube texture development, was negligible. A small amount of Cr atoms were detected in the Ni layer. It showed that Ag can be used as a chemical barrier of alloying element atoms in Ni layer for the Ni/Ag/SS310S multi-layer sheet and a strong cube texture was developed for the Ni layer in the Ni/Ag/SS310S multi-layer sheet.

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평판형 SOFC 스택의 밀봉재와 금속 분리판의 계면반응 및 보호층 효과 (Interfacial Reaction between seal and metal interconnect and effets of protecting layer in planar type SOFC stack)

  • 문지웅;김영우;성병근;김도형;전중환
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 추계학술대회 초록집
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    • pp.72.2-72.2
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    • 2010
  • 평판형 고체산화물 연료전지 스택의 고온 밀봉 구조에 대하여 설명하고 스택 운전 후 사후 분석을 통하여 밀봉재와 금속 분리판의 계면반응에 대하여 고찰하였다. 대표적인 고온 밀봉재인 Barium-Silicate 계 결정화 유리와 Fe-Cr 계 금속 분리판은 스택의 작동온도인 $700{\sim}850^{\circ}C$ 에서 고온 반응을 통하여 계면에 반응생성물을 형성하는 것이 확인되었다. 이러한 계면반응은 장기 운전시 SOFC 스택 성능 저하의 원인이 되고, 열 싸이클(작동온도${\leftrightarrow}$상온)을 가하면 계면반응 생성물이 delamination 되어 밀봉구조가 파괴되어 수명을 단축시키게 된다. 계면반응은 Fe-Cr 계 금속 분리판의 산화물인 Cr 산화물, Fe 산화물이 밀봉유리 소재와 반응을 일으키는 것이 주요 원인으로 판명되었다. SOFC 스택에서 열 싸이클시 계면반응에 의하여 기밀도가 감소하는 현상이 확인되었으며, 밀봉 구조의 어느 부분에서 계면반응이 진행되는지 관찰하였다. 이러한 계면반응을 막기 위해서는 금속 분리판과 밀봉유리 사이에 계면반응을 억제하는 보호층을 형성하는 방법이 효과적이다. 본 연구에서는 보호층으로서 밀봉유리 및 Fe-Cr 계 금속 분리판과의 계면반응성이 낮고 열팽창 계수가 비슷한 Yttria Stabilized Zirconia 층을 APS(Atmospheric Plasma Spray) 공정을 이용하여 형성하였다. 밀봉유리/YSZ 보호층/금속분리판은 gas-tight 한 밀봉 구조를 형성하였으며, YSZ 보호층은 밀봉유리와 Fe-Cr 계 금속 분리판 소재와 계면반응을 효과적으로 억제하는 것이 확인되었다.

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Fe-20Mn-12Cr-1Cu 제진합금의 고온가스 질화처리 (High Temperature Gas Nitriding of Fe-20Mn-12Cr-1Cu Damping Alloy)

  • 성지현;김영희;성장현;강창룡
    • 열처리공학회지
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    • 제26권3호
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    • pp.105-112
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    • 2013
  • The microstructural changes of Fe-20Mn-12Cr-1Cu alloy have been studied during high temperature gas nitriding (HTGN) at the range of $1000^{\circ}C{\sim}1150^{\circ}C$ in an atmosphere of nitrogen gas. The mixed microstructure of austenite and ${\varepsilon}$-martensite of as-received alloy was changed to austenite single phase after HTGN treatment at the nitrogen-permeated surface layer, however the interior region that was not affected nitrogen permeation remained the structure of austenite and ${\varepsilon}$-martensite. With raising the HTGN treatment temperature, the concentration and permeation depth of nitrogen, which is known as the austenite stabilizing element, were increased. Accordingly, the depth of austenite single phase region was increased. The outmost surface of HTGN treated alloy at $1000^{\circ}C$ appeared Cr nitride. And this was in good agreement with the thermodynamically calculated phase diagram. The grain growth was delayed after HTGN treatment temperature ranges of $1000^{\circ}C{\sim}1100^{\circ}C$ due to the grain boundary precipitates. For the HTGN treatment temperature of $1150^{\circ}C$, the fine grain region was shown at the near surface due to the grain boundary precipitates, however, owing to the depletion of grain boundary precipitates, coarse grain was appeared at the depth far from the surface. This depletion may come from the strong affinity between nitrogen and substitutional element of Al and Ti leading the diffusion of these elements from interior to surface. Because of the nitrogen dissolution at the nitrogen-permeated surface layer by HTGN treatment, the surface hardness was increased above 150 Hv compared to the interior region that was consisted with the mixed microstructure of austenite and ${\varepsilon}$-martensite.

Fe-2.3%Cr-1.6%W 합금의 고온산화 부식속도와 스케일 분석 (High-temperature Oxidation Kinetics and Scales Formed on Fe-2.3%Cr-1.6%W Alloy)

  • 박상환;김민정;이재호;봉성준;김슬기;이동복
    • 한국세라믹학회지
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    • 제48권1호
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    • pp.57-62
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    • 2011
  • The T23 steel, whose composition was Fe-2.3%Cr-1.6%W, was arc-melted, and oxidized between $600^{\circ}C$ and $900^{\circ}C$ in air for up to 7 months. The amount of precipitates in the arc-melted microstructure was as large as 11.4 vol.%. The precipitates increased the oxidation rate of the arc-melted T23 steel. Owing to the low amount of Cr in the T23 steel, breakaway oxidation occurred after a few hours during oxidation above $700^{\circ}C$ in both arc-melted and as-received T23 steels. The scales that formed on arc-melted and as-received T23 steels were similar to each other. They consisted primarily of the outer $Fe_2O_3$ layer and the inner ($Fe_2O_3$, $FeCr_2O_4$)-mixed layer. The precipitates increased the microhardness and the oxidation rates.

ZnS/$Na_3AlF_6$/ZnS/Cr 다층 박막의 광학적 두께 변화에 따른 광특성 (The optical properties of ZnS/$Na_3AlF_6$/ZnS/Cr multi-layered thin film with different optical thickness)

  • 김준식;장강재;장건익
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.535-536
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    • 2008
  • Multi-layered thin films of ZnS/$Na_3AlF_6$/ZnS/Cr were deposited on glass substrate by evaporation process. ZnS and $Na_3AlF_6$ were selected as high and low refractive index material, and additionally Cr was chosen as mid reflective layer respectively. The multi-layered thin films were prepared in terms of different optical thickness and different staking sequence and layers. The optical properties were systematically characterized with different optical thickness of $Na_3AlF_6$ especially $0.25\lambda$ and $0.5\lambda$. In order to expect the experimental result, the simulation program, the Essential Macleod Program(EMP) was adopted. Based on the results taken by spectrophotometer at viewing angle $45^{\circ}$, the ZnS/$Na_3AlF_6$/ZnS/Cr multi-layered thin film shows purple colour range in $0.25\lambda$, bluish green in $0.5\lambda$, red purple in $0.75\lambda$, and purple in $1.0\lambda$ respectively.

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Fabrication and Characterization of Ni-Cr Alloy Thin Films for Application to Precision Thin Film Resistors

  • Lee, Boong-Joo;Shin, Paik-Kyun
    • Journal of Electrical Engineering and Technology
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    • 제2권4호
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    • pp.525-531
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    • 2007
  • Ni(75 wt.%)-Cr(20 wt.%)-Al(3 wt.%)-Mn(4 wt.%)-Si(1 wt.%) alloy thin films were prepared using the DC magnetron sputtering process by varying the sputtering conditions such as power, pressure, substrate temperature, and post-deposition annealing temperature in order to fabricate a precision thin film resistor. For all the thin film resistors, sheet resistance, temperature coefficient of resistance (TCR), and crystallinity were analyzed and the effects of sputtering conditions on their properties were also investigated. The oxygen content and TCR of Ni-Cr-Al-Mn-Si resistors were decreased by increasing the sputtering pressure. Their sheet resistance, TCR, and crystallinity were enhanced by elevating the substrate temperature. In addition, the annealing of the resistor thin films in air at a temperature higher than $300^{\circ}C$ lead to a remarkable rise in their sheet resistance and TCR. This may be attributed to the improved formation of NiO layer on the surface of the resistor thin film at an elevated temperature.

Ni3Al-7.8%Cr-1.3%Zr-0.8%Mo-0.025%B 합금의 고온산화막분석 (Characterization of Oxide Scales Formed on Ni3Al-7.8%Cr-1.3%Zr-0.8%Mo-0.025%B)

  • 김기영;이동복
    • 한국재료학회지
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    • 제12권3호
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    • pp.220-224
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    • 2002
  • The oxide scales formed on $Ni_3Al$-7.8%Cr-1.3%Zr-0.8%Mo-0.025%B after oxidation at 900, 1000 and 110$0^{\circ}C$ in air were studied using XRD, SEM, EPMA and TEM. The oxide scales consisted primarily of $NiO,\; NiAl_2O_4,\;{\alpha}-Al_2O_3,\; monoclinic-ZrO_2,\; and \;tetragonal-ZrO_2$. The outer layer of the oxide scale was rich in Ni-oxides, whereas the internal oxide stringers were rich in Al-oxides and $ZrO_2$. Within the above oxide scales, Cr and Mo tended to exist as dissolved ions.