• Journal of Sensor Science and Technology
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• v.11 no.3
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• pp.163-170
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• 2002

This paper proposes a $10\;{\mu}m$ thick oxide air-bridge structure which can be used as a substrate for RF circuits. The structure was fabricated by anodic reaction, complex oxidation and micromachining technology using TMAH etching. High quality films were obtained by combining low temperature thermal oxidation ($500^{\circ}C$, 1 hr at $H_2O/O_2$) and rapid thermal oxidation (RTO) process ($1050^{\circ}C$, 2 min). This structure is mechanically stable because of thick oxide layer up to $10\;{\mu}m$ and is expected to solve the problem of high dielectric loss of silicon substrate in RF region. The properties of the transmission line formed on the oxidized porous silicon (OPS) air-bridge were investigated and compared with those of the transmission line formed on the OPS layers. The insertion loss of coplanar waveguide (CPW) on OPS air-bridge was (about 2dB) lower than that of CPW on OPS layers. Also, the return loss of CPW on OPS air-bridge was less than about -20 dB at measured frequency region for 2.2 mm. Therefore, this technology is very promising for extending the use of CMOS circuitry to higher RF frequencies.

• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.319-322
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• 1999

In this paper, we report characteristics of a internal chip of LiNbO$_3$ modulator with low-driving-voltage at 150nm wavelength. A Ti diffusion method for LiNbO$_3$ optical waveguide and a buffer layer for improving phase velocity mismatch between optical and microwave waves were employed. The traveling-wave coplanar waveguide electrode of 35mm is used for reducing the driving voltage. From this work, wideband modulation of 10㎓ and low-driving voltage of 3.9volts are realized.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.2
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• pp.110-117
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• 1998

An optical modulator with CPW(coplanar waveguide) electode on Ti:LiNbO$_{3}$ optical waveguide wasfabricated and characterized. The electrical-optical bandwidth measurement showed an optical response of -3dBat 10 GHzand S$_{11}$ lessthan -10dB upto 20GHz. The typeical specifications are : 5.6V of driving voltage, 4.2dB of insertion loss and 30dB of on/off extinction. The eye pattern proved that the optical meduator, fabricated in this work, has properties good enough for application.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.4
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• pp.40-46
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• 1998

Leakage phenomena of flip-chip structures on common GaAs and alumina main substrates are characterized using the spectral domain approach to reduce the possible chip-to-chip crosstald and transmission resonance. We have found taht the longitudinal section magnetic mode is dominant for the coplanar waveguide leakage andthe leakage can be suppreassed by properly managing the gap height and the main substrate thickness in addition to the dielectric constant. These calculation results will be helpful for designing and flip-chip packagaing of high-frequency integrated circuits.

• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.962-965
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• 1999

We designed and fabricated a travelingwave CPW(coplanar waveguide) electrode for LiNbO$_3$ optical modulator. To Investigate the variation of microwave refractive index of these electrodes, we prepared the CPW electrode samples as a function of electrode thickness and measured the TDR and S-parameter. From this results, we could know the electrode conditions of index matching to 2.20 for 1550nm optical wave index for applying LiNbO$_3$ optical modulator and described. Also, we discussed the some properties of CPW electrode for applying LiNbO$_3$ optical modulator.

• Proceedings of the Korean Magnestics Society Conference
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• 2004.06a
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• pp.190-191
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• 2004

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.16 no.8 s.99
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• pp.835-841
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• 2005

In this paper, a novel sized-reduced CPW(Coplanar Waveguide) balun is proposed. It has a crossing structure between signal line and ground planes of CPW transmission line for the $180^{\circ}$ phase inversion. The$3{\lambda}/4$ CPW transmission line is reduced to ${\lambda}/4$ in physical length while the electrical length is preserved to $270^{\circ}$ by the $180^{\circ}$ phase inverting structure, while the previous balun by Lim et at. has a long $3{\lambda}/4$ transmission section to from the Wilkinson divider structure having out of phase between output ports. In addition, the measured data which show the crossing structure has the wanted $180^{\circ}$ phase change is presented in this work.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.4
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• pp.131-136
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• 2008

Two Ka-band 3-stage power amplifiers were designed and fabricated using $0.18-{\mu}m$ CMOS technology. For low loss matching networks for the amplifiers, two substrate-shielded transmission line structures, having good modeling accuracy up to 40 GHz were used. The measured insertion loss of substrate-shielded microstrip-line (MSL) was 0.5 dB/mm at 27 GHz. A 3-stage CMOS amplifier using substrate-shielded MSL achieved a 14.7-dB small-signal gain and a 14.5-dBm output power at 27 GHz in a compact chip area of 0.83$mm^2$. The measured insertion loss of substrate-shielded coplanar waveguide (CPW) was 1.0 dB/mm at 27 GHz. A 3-stage amplifier using substrate-shielded CPW achieved a 12-dB small-signal gai and a 12.5-dBm output power at 26.5 GHz. This results shows a potential of CMOS technology for low cost short-range wireless communication components and system.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.42 no.11
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• pp.107-115
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• 2005

This paper presents the structure of a broadband coplanar waveguide(CPW) fed square slot antenna with a impedance bandwidth tuning patch. The designing method of the antenna suggests that two resonant frequencies are excited as a dual-frequency dipole antenna following the dimensions of the square slot. In other words, the lower resonant frequency mainly depends on the slot width and the higher one its length. A CPW fed square slot antenna with a impedance tuning patch was measured to $20GHz^\~33GHz$, $50\%$, VSWR=2 impedance bandwidth by adjusting the dimensions of the tuning patch when the slot length had $70\%$ of its width. This result shows that a medical CPW fed antenna is easily implemented with a simple square slot structure including a bandwidth tuning patch in the center.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.4 no.2 s.7
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• pp.81-87
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• 2005

In this paper, a VCDRO(Voltage Control Dielectirc Resonator Oscillator) for signal source of doppler radar system is designed and fabricated. The proposed VCDRO is made with new tuning mechanism using CPW line. The coplanar waveguide of $\lambda_{g}$/2 in length with varactor diode is placed on the metallization side under the dielectric resonator and coupled to it. Tuning varactor diode is mounted at one end of the CPW. The proposed circuit tuned by a CPW allows one more varactor diode to be mounted on the optimized CPW, where a greater sensitivity of frequency tuning is needed. With varying the biasing voltage for the varactor diode from 0 V to 15 V, output frequency tuning of 12 MHz is obtained. The PLDRO exhibits output power of 16.5 dBm with phase noise in the phase locked state characteristic of -115 dBc/Hz at 100 Hz, -105 dBc/Hz at the 10 kHz, and -102 dBc/Hz at 1 Hz offset from 10.525 GHz , respectively.