• Title/Summary/Keyword: Contaminated surface

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Post Ru CMP Cleaning for Alumina Particle Removal

  • Prasad, Y. Nagendra;Kwon, Tae-Young;Kim, In-Kwon;Park, Jin-Goo
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.34.2-34.2
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    • 2011
  • The demand for Ru has been increasing in the electronic, chemical and semiconductor industry. Chemical mechanical planarization (CMP) is one of the fabrication processes for electrode formation and barrier layer removal. The abrasive particles can be easily contaminated on the top surface during the CMP process. This can induce adverse effects on subsequent patterning and film deposition processes. In this study, a post Ru CMP cleaning solution was formulated by using sodium periodate as an etchant and citric acid to modify the zeta potential of alumina particles and Ru surfaces. Ru film (150 nm thickness) was deposited on tetraethylorthosilicate (TEOS) films by the atomic layer deposition method. Ru wafers were cut into $2.0{\times}2.0$ cm pieces for the surface analysis and used for estimating PRE. A laser zeta potential analyzer (LEZA-600, Otsuka Electronics Co., Japan) was used to obtain the zeta potentials of alumina particles and the Ru surface. A contact angle analyzer (Phoenix 300, SEO, Korea) was used to measure the contact angle of the Ru surface. The adhesion force between an alumina particle and Ru wafer surface was measured by an atomic force microscope (AFM, XE-100, Park Systems, Korea). In a solution with citric acid, the zeta potential of the alumina surface was changed to a negative value due to the adsorption of negative citrate ions. However, the hydrous Ru oxide, which has positive surface charge, could be formed on Ru surface in citric acid solution at pH 6 and 8. At pH 6 and 8, relatively low particle removal efficiency was observed in citric acid solution due to the attractive force between the Ru surface and particles. At pH 10, the lowest adhesion force and highest cleaning efficiency were measured due to the repulsive force between the contaminated alumina particle and the Ru surface. The highest PRE was achieved in citric acid solution with NaIO4 below 0.01 M at pH 10.

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Effects of Phosphorus and Iron on the Phytotoxicity of Lettuce (Lactuca sativa L.) in Arsenic-contaminated Soil

  • Kim, Min-Suk;Min, Hyun-Gi;Kim, Jeong-Gyu
    • Ecology and Resilient Infrastructure
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    • v.5 no.1
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    • pp.1-10
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    • 2018
  • We examined the effect of simultaneous application of phosphorus (P) and iron (Fe) on the phytotoxicity of lettuce in arsenic (As) contaminated soil using response surface methodology (RSM). To stabilize As and supply nutrient into soil, Fe and P were treated, respectively. Water soluble As and P was decreased by Fe application but increased by P application. Through phytotoxicity test, the result showed that only the addition of P affected lettuce root elongation even though both P and Fe were added. The correlation coefficients between root elongation and other indices indicated that the As content in the roots seemed to be the main reason that root growth was impeded. We could verify that the former result was not a passing phenomenon and Fe was necessarily needed to protect secondary pollution by exclusive usage of P fertilizer.

Remediation of Heavy Metal Contaminated Sediments (중금속 오염 퇴적저니의 복원방안)

  • 배우근;이창수;홍종철;장석규;김성진
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 1999.10a
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    • pp.34-38
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    • 1999
  • This paper investigated remediation options for contaminated sediments with heavy metals. Twenty three sediment samples were taken from three different depths of 0.5m, 1.5m and 2.5m. The concentration of Heavy metals Cu, Pb, and Hg were measured. The concentration of copper far exceeded the Sediment Quality Guideline in U.S.A and Interim Sediment Quality Guidelines in Canada. Therefore, remediation of the sediments is requried to protect the benthos. Two remediation options were suggested : dredging of the organic sediments as deep as about 85cm followed by surface covers with clean soil, and in-situ stabilization of tile sediments using lime or cement followed by surface cover with clean soil.

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Shear strength behavior of crude oil contaminated sand-concrete interface

  • Mohammadi, Amirhossein;Ebadi, Taghi;Eslami, Abolfazl
    • Geomechanics and Engineering
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    • v.12 no.2
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    • pp.211-221
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    • 2017
  • A laboratory investigation into crude oil contaminated sand-concrete interface behavior is performed. The interface tests were carried out through a direct shear apparatus. Pure sand and sand-bentonite mixture with different crude oil contents and three concrete surfaces of different textures (smooth, semi-rough, and rough) were examined. The experimental results showed that the concrete surface texture is an effective factor in soil-concrete interface shear strength. The interface shear strength of the rough concrete surface was found higher than smooth and semi-rough concrete surfaces. In addition to the texture, the normal stress and the crude oil content also play important roles in interface shear strength. Moreover, the friction angle decreases with increasing crude oil content due to increase of oil concentration in soil and it increases with increasing interface roughness.

Arcing and Quenching of the Contacts Contaminated with Sea Water (해수로 오염된 처점의 개간이-크의 발생과 소멸)

  • 조광현;박상길;박정후
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.34 no.4
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    • pp.135-143
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    • 1985
  • The failure and erosion of relay contacts mainly depend on the presence of particles deposited on the contact surface in various contaminated atmospheres. In this paper, the effects of sea water and circuit parameters on the arcing and quenching of magnet relay contacts are studied. The sea water pollutants of relay contact surface have led to increase the arcing numbers on making contact, and the mean arc durations on breaking contacts. Moreover, the maximum surge voltage and mean arc duration between relay contacts are also varied significantly by the circuit parameters. The effects of the spark quenching circuits using condenser of diode on the arcing of contacts are also discussed.

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Review on Application Progress of Carbon-Based Catalysts in Environmental Governance

  • Zheng, Xizhe;Huang, Yuming;Du, Changming
    • Journal of the Korean Chemical Society
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    • v.66 no.4
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    • pp.269-277
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    • 2022
  • In recent years, carbon-based catalysts have become a research hotspot in environmental governance applications. Carbon-based catalysts have large surface areas, porous structures, multi-surface functional groups and excellent electron transfer capabilities, and can synergistically exhibit adsorption and catalytic performance. This article reviews the research progress of carbon-based catalysts in environmental governance, mainly including its application in wastewater treatment, exhaust gas purification and soil remediation. In view of the current difficulties in the research of carbon-based catalysts, the development prospects are proposed. We hope that this review will provide convenience for new entrants and researchers intending to employ carbon-based catalysts for the remediation of contaminated environment.

Effect of Hybrid Inhibitor on the Mitigation of Corrosion Initiation in SCP Solution Contaminated 3.5 wt.% NaCl (3.5 wt.% NaCl로 오염된 SCP 용액의 부식 개시 완화에 대한 하이브리드 억제제의 효과)

  • Tran, Duc Thanh;Lee, Han-seung
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2021.11a
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    • pp.65-66
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    • 2021
  • In this study, the optimum amount of hybrid inhibitors i.e. L-Arginine (LA) and sodium phosphate tribasic dodecahydrate (SP), applied for carbon steel rebar in simulated pore concrete (SCP) solution contaminated with 3.5 wt.% NaCl, was discovered. The corrosion inhibition performance of hybrid inhibitors was investigated by open circuit potential (OCP), electrochemical impedance spectroscopy (EIS), and potentiodynamic polarization. The highest corrosion inhibition efficiency was found as 99.52% corresponding to 2% LA and 0.25% SP after 210 h exposure. Anodic type inhibition action was confirmed by potentiodynamic polarization study. Surface studies including scanning electron microscopy (SEM), and atomic force microscopy (AFM) were used to figure out the surface morphology of the steel rebar treated with hybrid inhibitors in order to collaborate with electrochemical studies.

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Cation Exchange Capacity and Zeta Potential Characteristics of Kaolinite Contaminated with Lead (납으로 오염된 카올리나이트의 양이온교환능력 및 계면동전위 특성)

  • 장경수;강병희
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2002.04a
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    • pp.38-43
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    • 2002
  • A series of tests were performed to investigate the effects of pH and contamination level on cation exchange capacity and zeta potential in kaolinite loaded with lead. Test results show that cation exchange capacity of kaolinite is found to be in the range from 4 to 20meq/100g and it increased with increasing pH up to the converged number about 20meq/100g over pH 8. And then CEC has a tendency to reduce and converge to zero with increasing the concentration of Pb in the kaolinite surface. Moreover, zeta potential of kaolinite contaminated with lead is found to be in the range from -10 to 5mV, and zero point of charge is measured at about pH 3.5. Zeta potential of kaolinite contaminated with lead decreases with increasing pH values and decreasing Pb concentration of kaolinite.

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Remediation of A DNAPL Contaminated Site Using Containment WALL (차단벽을 이용한 DNAPL 오염지역의 복구)

  • Lee, Kwang-Yeol;Joo, Wan-Ho
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 1998.11a
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    • pp.81-85
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    • 1998
  • In the present study, the design method of containment walls is proposed by utilizing an existing site. The selected remedy for the Source Area of Operable Unit 2 at Hill Air Force Base stipulated containment of the pure-phase trichloroethylene contamination. The in-place-mixed wall construction was selected because of the irregular topography, small area of the site, and the requirement to reach depths of greater than 90 feet below ground surface. Bench-scale compatibility studies were performed for the containment wall mix design on three commercial bentonite clays. The samples were subject to screening tests and long-term tests for evaluation of changed soil properties when exposed to the contaminated groundwater.

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The Effect of the Non Soluble Industrial Dust on the Electrical Properties of Distribution Porcelain Suspension Insulators (비용해성 산업용 분진이 배전용 자기제 현수애자의 전기적 특성에 미치는 영향)

  • Kim, Chan-Young;Song, Il-Keun;Kim, Ju-Yong;Han, Jae-Hong;Kim, Dong-Myung;Lee, Byung-Sung
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.50 no.4
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    • pp.182-189
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    • 2001
  • In this paper, the distribution suspension porecelain insulators which had been used for long periods in the contaminated area were evaluated. The contaminated area is close to the sea and in the high density of industries. The heavily contaminated domestic and imported insulators were investigated by using electrical characteristics, such as power-frequency dry flashover voltage, power-frequency wet, flahover voltage, and leakage current. Also, these electrical results were compared with the contaminants on the surface. From these analysis, we found that the contamination from the industrial dust, only slightly decreased flashover voltage and increased leakage current. Therefore, the electrical properties of insulators used for 30 years in the area of coast and industrial complex were not much changed.

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