• Journal of the Korean Vacuum Society
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• v.6 no.4
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• pp.326-336
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• 1997

From the concept that the ion implantation-induced defect is one of the major factors in determining source/drain junction characteristics, high quality ultra-shallow $p^+$-n junctions were formed through the control of ion implantation-induced defects in silicon substrate. In conventional process of the junction formation. $p^+$ source/drain junctions have been formed by $^{49}BF_2^+$ ion implantation followed by the deposition of TEOS(Tetra-Ethyl-Ortho-Silicate) and BPSG(Boro-Phospho-Silicate-Glass) films and subsequent furnace annealing for BPSG reflow. Instead of the conventional process, we proposed a series of new processes for shallow junction formation, which includes the additional low temperature RTA prior to furnace annealing, $^{49}BF_2^+/^{11}B^+$ mixed ion implantation, and the screen oxide removal after ion implantation and subsequent deposition of MTO (Medium Temperature CVD oxide) as an interlayer dielectric. These processes were suggested to enhance the removal of ion implantation-induced defects, resulting in forming high quality shallow junctions.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.97-97
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• 2016

Development of advanced Li-ion battery cells with high durability is critical for safe operation, especially in applications to electric vehicles and portable electronic devices. Understanding fundamental mechanism on the formation of a solid-electrolyte interphase (SEI) layer, which plays a substantial role in the electrochemical stability of the Li-ion battery, in a cathode was rarely reported unlike in an anode. Using first-principles density functional theory (DFT) calculations and ab-initio molecular dynamic (AIMD) simulations we demonstrate atomic-level process on the generation of the SEI layer at the interface of a carbonate-based electrolyte and a spinel $LiMn_2O_4$ cathode. To accomplish the object we calculate the energy band alignment between the work function of the cathode and frontier orbitals of the electrolyte. We figure out that a proton abstraction from the carbonate-based electrolyte is a critical step for the initiation of an SEI layer formation. Our results can provide a design concept for stable Li-ion batteries by optimizing electrolytes to form proper SEI layers.

• Journal of the Korean Chemical Society
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• v.58 no.6
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• pp.580-589
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• 2014

The concepts used to explain specific phenomenon can be influenced by context or coherent regardless of context. The purpose of this study is to understand middle school students' concept of particles in particular context and to investigate the effects of context on concept of particles. A conceptual questionnaire was developed to find out how students represented particles in two contexts: solid and solution states of electrolytes, and ion precipitation reaction. The questionnaire was administered to $9^{th}$ grade students after classes of 'electrolyte and ions' unit. The responses of students were analyzed using framework developed for categorization of students' concepts. The results are as follows: First, it was found that students used various concepts on particles when they explained solid and solution state of electrolytes, respectively. Second, we identified students' concepts of particles used to explain ion precipitation reaction. In addition, we recognized that majority of students failed to write correct chemical symbols. Third, approximately 79% of students showed coherent responses for explanation of particles in solution state of both electrolytes and ion precipitation reaction. About 57% of students had scientific concepts. Some suggestions were made based on results for acquisition of scientific concepts on particles in different contexts.

• Proceedings of the KIEE Conference
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• 2015.07a
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• pp.1219-1220
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• 2015

마이크로, 나노유체 (micro-, nanofluidics)을 이용한 종이 기반 분석 소자 (paper-based analytical devices, micro-PADs)에 대한 관심이 증가하고 있다. 종이 기반의 분석 소자는 초저가의 비용과 간단한 공정 방법으로 인하여 상용화 컨셉의 바이오센서로 각광받고 있다. 하지만, 종이 기반의 분석 소자는 낮은 검출 한계 (limit of detection, LOD)와 민감도 (sensitivity)의 제한이 있다. 그로 인해 우리는 이온 선택적 투과층 (ion permselective membrane, i.e. Nafion)을 종이 기반의 분석 소자와 결합하여 이온 농도 분극 (ion concentration polarization, ICP) 현상을 구현하여 낮은 검출한계와 민감도를 개선할 수 있었다. 접착력이 있는 테이프 표면에 이온 선택적 투과층을 패터닝 (patterning)하여 종이 기반 분석 소자와 결합하여 매우 간단하게 소자를 제작할 수 있었다. 따라서 종이 기반의 채널 양단에 직류 전압을 인가했을 때 발생하는 ICP 현상으로 인하여 형광 물질 (fluorescence dye)이 농축(preconcentration)되는 것을 확인할 수 있었다. 구체적으로, 초기 농도가 1.55 nM인 형광 물질을 이용하여 200 V의 외부전압을 인가했을 때, 500 초 이내에 1000 배 이상의 농축비를 얻을 수 있었다. 따라서, 외부 전압을 상용화된 건전지 출력값으로 낮출 수 있다면 다양한 종이 기반 분석 소자와 간단한 결합 방법을 통해 상용화 컨셉의 바이오센서로도 구현이 가능할 것이다.

• Membrane Journal
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• v.32 no.1
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• pp.1-12
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• 2022

Graphene oxide (GO) has been considered as a promising membrane material, because of its easy processability and distinct properties, including controllable pore size distribution and diffusion channels. Particularly, the feasibility has been proposed a number of simulation results and proof-of-concept experimental approaches towards GO membranes. That is, GO already shows many outstanding intrinsic properties suitable for promising membrane platforms, such as the minimum membrane thickness and the ability to generate nanopores in the two-dimensional lattices or to create slit-like nanochannels between adjacent sheets. This review will be addressed the important experimental development in GO-based membranes for gas and ion separations, emphasizing on intrinsic transport phenomena, and critical issues for practical applications.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.472-477
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• 2004

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modem products are becoming smaller and smaller. The direct write FIB technology has several advantages over contemporary micromachining technology, including better feature resolution with low lateral scattering and capability of mastless fabrication. Therefore, the application of focused ion beam(FIB) technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}{\textrm}{m}$. It is not unsuitable to the sputtering and the deposition to make the high-precision structure in micro or macro scale. Our research is the development of nano stage of 200mm strokes and l0nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about 1$\times$10$^{-5}$ pa. This paper presents the concept of nano stages and the discussion of the material treatment for ultra tush vacuum.

• Journal of the Korean institute of surface engineering
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• v.27 no.3
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• pp.143-148
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• 1994

Effects of process variables of HCD ion plating on the film composition of Ti(C, N) were analyzed. The mole ratio of carbon to nitrogen and that of non-metal to titanium in the film primarily depend on the partial pressure ratio of ($C-2H_2$/ $N_2$) and total reactive gas pressure, respectively. The amount of nonmetallic com-ponents increases in nonlinear fashion as the total gas pressure due to the different reactivity of $C-2H_2$ and $N_2$ gases with Ti. The nonmetallic components was saturated dwith nitrogen when the nitrogen gas was more than 60% of total reactive gas. These two process variables could be related systematically using the concept of effective pressure in which the difference of reactivity of each gas was normalized.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.583-588
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• 2008

A spacecraft propulsion system utilizing the energy of the solar wind was reviewed. The first plasma sail concept was proposed by Prof. Winglee in 2000, and that was called M2P2(mini-magnetospheric plasmapropulsion). However, the first M2P2 design adopting a small(20-cm-diamter) coil and a small helicon plasma source design was criticized by Dr. Khazanov in 2003. He insisted that: 1) MHD is not an appropriate approximation to describe the M2P2 design by Winglee, and with ion kinetic simulation, it was shown that the M2P2 design could provide only negligible thrust; 2) considerably larger sails(than that Winglee proposed) would be required to tap the energy of the solar wind. We started our plasma ssail study in 2003, and it is shown that moderately sized magnetic sails can produce sub-Newton-class thrust in the ion inertial scale(${\sim}70$ km). Currently, we are continuing our efforts to make a feasibly sized plasma sail(Magnetoplasma sail) by optimizing the magnetic field inflation process Winglee proposed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.844-847
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• 2001

The application of laser direct etching has been discussed, and believed that the process is a very powerful method for micro machining. This study is focused on the micro patterning technology using laser direct etching process with no chemical damage of the material surface. A new introduced concept of energy synergy effect for surface micro machining is the combination of chemically ion reaction and laser thermal process. The etchant can't etch the material in room temperature, and used Ar laser has not power enough to machine. But, the machining is occurred in local area of the material by the combined energy. Using this process, the material is especially prevented from chemical damage for electric property. We have tested this new concept, and achieved a line with $1{mu}m$ width. The Ar laser with 488nm wavelength was used. The material was Si(100) wafer, and etchant is KOH solution. The application and flexibility of this process is in great hopes for MEMS structures and fabrication of the micro electric device parts.

• Journal of the Korean Ceramic Society
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• v.31 no.4
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• pp.420-426
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• 1994

A new method is proposed for the oxide lattice energy calculation. It is consisted of (1) setting a central and a computation domains in a real lattice, (2) calculation of inter-ionic potential producted by the associated portion of each ion to the relative domain, and (3) summing up the potential energies. Even with a slight expansion of the domain, the lattice energy converges to the published data. The method is superior than any other reported due to the simple and clear concept and the reduced computing.