• JSTS:Journal of Semiconductor Technology and Science
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• v.17 no.1
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• pp.86-93
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• 2017

In this paper, we propose a novel defect detection method using component tree representations of scanning electron microscopy (SEM) images. The component tree contains rich information about the topological structure of images such as the stiffness of intensity changes, area, and volume of the lobes. This information can be used effectively in detecting suspicious defect areas. A quasi-linear algorithm is available for constructing the component tree and computing these attributes. In this paper, we modify the original component tree algorithm to be suitable for our defect detection application. First, we exclude pixels that are near the ground level during the initial stage of component tree construction. Next, we detect significant lobes based on multiple attributes and edge information. Our experiments performed with actual SEM wafer images show promising results. For a $1000{\times}1000$ image, the proposed algorithm performed the whole process in 1.36 seconds.

• Proceedings of the KIEE Conference
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• 2005.10b
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• pp.273-275
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• 2005

Active thermography is being used since several years for remote non-destructive testing. It provides thermal images for remote detection and imaging of damages. Also, it is based on propagation and reflection of thermal waves which are launched from the surface into the inspected component by absorption of modulated radiation. For energy deposition, it use external heat sources (e.g., halogen lamp or convective heating) or internal heat generation (e.g., microwaves, eddy current, or elastic wave). Among the external heat sources, the ultrasound is generally used for energy deposition because of defect selective heating up. The heat source generating a thermal wave is provided by the defect itself due to the attenuation of amplitude modulated ultrasound. A defect causes locally enhanced losses and consequently selective heating up. Therefore amplitude modulation of the injected ultrasonic wave turns a defect into a thermal wave transmitter whose signal is detected at the surface by thermal infrared camera. This way ultrasound thermography(UT) allows for selective defect detection which enhances the probability of defect detection in the presence of complicated intact structures. In this paper the applicability of UT for fast defect detection is described. Examples are presented showing the detection of defects in PCB material. Measurements were performed on various kinds of typical defects in PCB materials (both Cu metal and non-metal epoxy). The obtained thermal image reveals area of defect in row of thick epoxy material and PCB.

• Journal of KIISE:Software and Applications
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• v.34 no.5
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• pp.447-454
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• 2007

TFT-LCD(Thin Film transistor liquid crystal display) has become actively used front panel display technology with increasing market. Intrinsically there is region of non uniformity with low contrast that to human eye is perceived as defect. As the gray level difference between the defect and the background is hardly distinguishable, conventional thresholding and edge detection techniques cannot be applied to detect the defect. Between the patterned and un-patterned LCD defects, this paper deals with un-patterned LCD defects by using independent component analysis, adaptive thresholding and skewness. Our method showed strong results even on noised LCD images and worked successfully on the manufacturing line.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.55 no.2
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• pp.68-71
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• 2006

Active thermography has been used for several years in the field of remote non-destructive testing. It provides thermal images for remote detection and imaging of damages. Also, it is based on propagation and reflection of thermal waves which are launched from the surface into the inspected component by absorption of modulated radiation. For energy deposition, it use external heat sources (e.g., halogen lamp or convective heating) or internal heat generation (e.g., microwaves, eddy current, or elastic wave). Among the external heat sources, the ultrasound is generally used for energy deposition because of defect selective heating up. The heat source generating a thermal wave is provided by the defect itself due to the attenuation of amplitude modulated ultrasound. A defect causes locally enhanced losses and consequently selective heating up. Therefore amplitude modulation of the injected ultrasonic wave turns a defect into a thermal wave transmitter whose signal is detected at the surface by thermal infrared camera. This way ultrasound thermography(UT) allows for selective defect detection which enhances the probability of defect detection in the presence of complicated intact structures. In this paper the applicability of UT for fast defect detection is described. Examples are presented showing the detection of defects in PCB material. Measurements are performed on various kinds of typical defects in PCB materials (both Cu metal and non-metal epoxy). The obtained thermal image reveals area of defect in row of thick epoxy material and PCB.

• Journal of the Korean Institute of Navigation
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• v.22 no.4
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• pp.59-67
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• 1998

A quick and automatic detection with no harm to the goods is very important task for improving quality control, process control and labour reduction. In real fields of industry, defect detection is mostly accomplished by skillful workers. A narrow band eliminating spatial filter having characteristics of removing the specified spatial frequency is developed by the author, and it is proved that the filter has an excellent ability for on-line and real time detection of surface defect. By the way,. this spatial filter shows a ripple phenominum in filtering characteristics. So, it is necessary to remove the ripple component for the improvement of filter gain, moreover efficiency of defect detection. The spatial filtering method has a remarkable feature which means that it is able to set up weighting function for its own sake, and which can to obtain the best signal relating to the purpose of the measurement. Hence, having an eye on such feature, theoretical analysis is carried out at first for optimal design of narrow band eliminating spatial filter, and secondly, on the basis of above results spatial filter is manufactured, and finally advanced effectiveness of spatial filter is evaluated experimentally.

• Journal of Welding and Joining
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• v.13 no.2
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• pp.42-52
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• 1995

In the evaluation of aging degradation on the structural materials based on the fracture mechanics, the detection and size prediction of defect are very important. Aiming at nondestructive detection and size prediction ol defect with high accuracy and resolution, therefore, an lnduced Current Focusing Potential Drop(ICFPD) technique has been developed. The principle of this technique is to induce a focusing current at an exploratory region by an induction wire flowing an alternating current(AC) that is a constant ampere and frequency. Defects are assessed with the potential drops that are measured the induced current on the surface of metallic material by the potential pick-up pins. In this study, the lCFPD technique was applied for evaluating the location and size of the surface crack and blind crack made in plate specimens, and also for detecting the defects existing in valve, a field component, that were developed by SCC etc. during the service. The results of this present study show that surface crack and blind crack are able to defect with potential drop. these cracks are distinguished with the distribution of potential drop, and the crack depths can be estimated with each normalized potential drop that are parameters estimating the depth of each type crack. In the field component, the defects estimated by experiment result correspond with those in the cutting face of the measuring point within a higher sensitivity.

• Journal of Advanced Navigation Technology
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• v.18 no.4
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• pp.304-311
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• 2014

In this paper, we propose a ultra sound inspection technique for automatic defect detection and classification in aircraft composite materials. Using local maximum values of ultra sound wave, we choose peak values for defect detection. Distance data among peak values are used to construct histogram and to determine surface and back-wall echo from the floor of composite materials. C-scan image is then composed through this method. A threshold value is determined by average and variance of the peak values, and defects are detected by the values. PCA(principal component analysis) and QDA(quadratic discriminant analysis) are carried out to classify the types of defects. In PCA, 512 dimensional data are converted into 30 PCs(Principal Components), which is 99% of total variances. Computational cost and misclassification rate are reduced by limiting the number of PCs. A decision boundary equation is obtained by QDA, and defects are classified by the equation. Experimental result shows that our proposed method is able to detect and classify the defects automatically.

• Journal of KIISE:Computing Practices and Letters
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• v.14 no.6
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• pp.604-608
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• 2008

The TFT-LCD image allows non-uniform illumination variation and that is one of main difficulties of finding defect region. The SQI (self quotient image) has the HPF (high pass filter) shape and is used to reduce low frequency-lightness component. In this paper, we proposed the TFT-LCD defect-enhancement algorithm using characteristics of the SQI, that is the SQI has low-frequency flattening effect and maintains local variation. The proposed method has superior flattening effect and defect-enhancement effect compared with previous the TFT-LCD image preprocessing.

• Journal of the Korean Ceramic Society
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• v.43 no.4 s.287
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• pp.259-263
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• 2006

The applicability of UPT (Ultrasound Pulse Thermography) for real-time defect detection of the ceramic heating plate is described. The ceramic heating plate with superior insulation and high radiation is used to control the water temperature in underwater environment. The underwater temperature control system can be damaged owing to the short circuit, which resulted from the defect of the ceramic heating plate. A high power ultrasonic energy with pulse duration of 280 ms was injected into the ceramic heating plate in the vertical direction. The ultrasound excited vibration energy sent into the component propagate inside the sample until they were converted to the heat in the vicinity of the defect. Therefore, an injection of the ultrasound pulse wave which results in heat generation, turns the defect into a local thermal wave transmitter. Its local emission is monitored and recorded via the thermal infrared camera at the surface which is processed by image recording system. Measurements were Performed on 4 kinds of samples, composed of 3 intact plates and the defect plate. The observed thermal image revealed two area of crack in the defective ceramic heating plate.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.5
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• pp.606-613
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• 2011

In this paper, patterns of laser scattering and detection of micro defects have been investigated based on Rayleigh criterion for silicon wafer in solar cell. Also, a new laser scattering mechanism is designed using characteristics of light scattering against silicon wafer surfaces. Its parameters are to be optimally selected to obtain effective and featured patterns of laser scattering. The optimal parametric ranges of laser scattering are determined using the mean intensity of laser scattering. Scattering patterns of micro defects are investigated at the extracted parameter region. Among a lot of pattern features, both maximum connected area and number of connected component in patterns of laser scattering are regarded as the important information for detecting micro defects. Their usefulness is verified in the experiment.