• Title/Summary/Keyword: Co-sputter

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Performance Assessment of Sputter-Coating-Colored BIPV Modules Through Field Test (현장 실험을 통한 Sputter Coating 컬러 BIPV 모듈의 발전성능 평가)

  • Lee, Hyo-Mun;Yoon, Jong-Ho;Kim, Hyun-Il;Lee, Gun-Hwan
    • Journal of the Korean Solar Energy Society
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    • v.40 no.5
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    • pp.1-12
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    • 2020
  • To assess the performance and characteristics of colored building-integrated photovoltaic (BIPV) modules, a comparative assessment of empirical performance was conducted on colored BIPV modules (gray, blue, and orange) and general BIPV module. These modules were installed on the south-facing slope (30°) for comparative assessment through a field test. Monitoring data were collected every 10 min from December 20, 2019 to January 21, 2020 and used to performance and characteristics analysis. Performance ratio and module efficiency were utilized during performance indexing for comparative assessment. For general BIPV modules, the operational efficiency was analyzed at 16.63%, whereas for colored BIPV modules, 13.70% (gray), 15.12 % (blue), and 14.49% (orange) were analyzed. It was discovered that the efficiency reduction caused by transmission losses owing to the application of colored cover glasses were 17.74% (gray), 9.05% (blue), and 9.86 % (orange), under field testing conditions. These values turned on an additional 7% reduction in efficiency for gray BIPV modules, compared to the degradation resulting from transmission drop (gray: 10.87%, blue: 8.99%, and orange: 9.02%) calculated using the efficiency of each module in standard test conditions (STC). Performance ratio analysis resulted in the following values: 0.92 for general BIPV modules, and 0.85 (gray), 0.91 (blue), and 0.91 (orange) for colored BIPV modules. As demonstrated by the above results, modules with a colored cover glass may differ in their operational performance depending on their color, unlike general modules. Therefore, in addition to the performance evaluation under STC, additional factors of degradation require consideration through field test.

The Electrical Properties of Sputtered GDC Thim Film for Solid Oxide Fuel Cells (고체산화물 연료전지 박막의 전기적 특성 연구)

  • Lee, Ki-Seong;Lee, Jai-Moon;Shim, Su-Man;Kim, Dong-Min
    • Transactions of the Korean hydrogen and new energy society
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    • v.22 no.3
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    • pp.319-325
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    • 2011
  • The electrical properties of sputtered GDC thin films on $Al_2O_3$ substrates was studied. The electrical properties of the films were measured to evaluate the ion conductivity of GDC thin films for co-planar SOFC electrolytes. The impedance of the GDC thin films on $Al_2O_3$ substrates was affected by the film thickness and the impedance of thin film exhibited higher value than thick films. Similarly, the conductivity of the thick film showed much higher value than thin films. It indicated that the film thickness is the main factor affecting the conductivity and impedance of the GDC electrolyte for the co-planar SOFC.

The Effect of Energy-absorbing layers on Micro-patterning of Magnetic Metal Films using Nd:YAG Laser (Nd:YAG Laser를 이용한 자성금속막의 패턴 식각에 있어서 에너지 흡수층이 미치는 영향)

  • 이주현;채상훈;서영준;송재성;민복기;안승준
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.6
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    • pp.538-544
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    • 2000
  • The laser patterning of sputter-deposited CoNdZr/Cu/CoNbZr multi-layered films had been tried using Nd:YAG laser. However generally it is very difficult to remove metal films because of their high reflectance of the laser on the surfaces. As a counterproposal for this problem authors for the first time tried to deposit energy-absorbing layers on the metal films and then irradiated the laser on the surfaces of energy-absorbing layers. Here the energy-absorbing layers consisted of laser energy-absorbing fine powders and binding polymers. Three kinds of powders for the energy-absorbing layers had been used to see the difference in the pattern formation with the degree of laser energy absorption. They were electrically conductive silver powders insulating BaTiO$_3$powder and semiconducting carbon powder. Remarkable difference in width of the formed pattern and the roughness of pattern edge were observed with the characteristic of the powder for the energy-absorbing layer. The pattern width using carbon paste was about three times larger than that using BaTiO$_3$paste. It was observed that the energy-absorbing layer with carbon was the most effective on this micro-patterning.

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Preparation of ATO Thin Films by DC Magnetron Sputtering (II)Electrical Properties (DC Magnetron Sputtering에 의한 ATO 박막의 제조(II)전기적 특성)

  • Yoon, C.;Lee, H.Y.;Chung, Y.J.;Lee, K.H.
    • Journal of the Korean Ceramic Society
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    • v.33 no.5
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    • pp.514-518
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    • 1996
  • Sb doped SnO2(ATO: Antinomy doped Tin Oxide) thin films were prepared by a DC magnetron spttuering method using an oxide target and the electrical characteristics of ATO films were investigated. The experimen-tal conditions are as follows :Ar flow rate ; 0~100 sccm deposition tempera-ture ; 250~40$0^{\circ}C$ DC sputter powder ; 150~550W and sputteing pressure ; 2~7 mTorr, The thickness of depositied ATO films were 600$\AA$~1100 $\AA$ ranges. The resistivity of ATO films was decreased due to the increase of the crystallinity of ATO films with deposition temperature. The decrease of carrier concentration of films with the increase of oxygen flow rate and working pressure is responsible for the increase of resistivity. Increasing of sputtering power raised the resistivity of films by decreasing the carrier mobility.

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Effect of Vacuum Annealing on the Properties of IGZO Thin Films (진공열처리에 따른 IGZO 박막의 특성 변화)

  • Kim, So-Young;Kim, Sun-Kyung;Kim, Seung-Hong;Jeon, Jae-Hyun;Gong, Tae-Kyung;Son, Dong-Il;Choi, Dong-Hyuk;Kim, Daeil
    • Journal of the Korean Society for Heat Treatment
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    • v.27 no.4
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    • pp.175-179
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    • 2014
  • IGZO thin films were prepared by radio frequency (RF) magnetron sputtering on glass substrates and then annealed in vacuum for 30 minutes at 100, 200 and $300^{\circ}C$, respectively. The thickness of films kept at 100 nm by controlling the deposition rate. While the optical transmittance and sheet resistance of as deposited films were 91.9% and $901{\Omega}/{\Box}$, respectively, the films annealed at $300^{\circ}C$ show the optical transmittance of 95.4% and the sheet resistance of $383{\Omega}/{\Box}$. The experimental results indicate that vacuum-annealed IGZO film at $300^{\circ}C$ is an attractive candidate for the transparent thin film transistor (TTFT) in large area electronic applications.

Effect of DC Bias on the Deposition of Nanocrystallin Diamond Film over Ti/WC-Co Substrate (Ti/WC-Co 기판위에 나노결정 다이아몬드 박막 증착 시 DC 바이어스 효과)

  • Kim, In-Seop;Na, Bong-Gwon;Gang, Chan-Hyeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2011.05a
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    • pp.117-118
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    • 2011
  • 초경합금 위에 RF Magnetron Sputter를 이용하여 Ti 중간층을 증착 후 MPECVD(Microwave Plasma Enhanced Chemical Vapor Deposition) 시스템을 이용하여 나노결정 다이아몬드 박막을 증착 하였다. 공정압력, 마이크로웨이브 전력, Ar/$CH_4$ 조성비, 기판온도를 일정하게 놓고 직류 bias의 인가 여부를 변수로 하고 증착시간을 0.5, 1, 2시간으로 변화시켜 박막을 제작하였다. 제작된 시편은 FE-SEM과 AFM을 이용하여 다이아몬드 박막의 표면과 다이아몬드 박막의 표면 거칠기 등을 측정하였고, Raman spectroscopy와 XRD를 이용하여 다이아몬드 결정성을 확인하였다. Automatic Scratch �岵謙�ter를 이용하여 복합박막의 층별 접합력을 측정하였다. 바이어스를 인가하지 않고 다이아몬드 박막을 증착할 경우 증착 시간이 증가할수록 다이아몬드 입자의 평균 크기가 증가하며 입자들이 차지하는 면적이 증가하는 것을 확인하였다. 그러나 1시간이 경과해도 아직 완전한 박막은 형성되지 못하고 2시간 이상 증착 시 완전한 박막을 이루는 것이 확인되었다. 이에 비해서 바이어스 전압을 인가할 경우 1시간 내에 완전한 박막을 이루었다. 표면 거칠기는 바이어스를 인가한 경우가 그렇지 않은 경우에 비해서 조금 높은 것으로 나타났다. 이러한 바이어스 효과는 표면에서의 핵생성 밀도 증가와 재핵생성 속도 증가에 기인하는 것으로 해석된다.

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Characteristics of Ta-Ti alloy Metal for NMOS Gate Electrodes (NMOS 게이트 전극에 사용될 Ta-Ti 합금의 특성)

  • Kang, Young-Sub;Lee, Chung-Keun;Kim, Jae-Young;Hong, Shin-Nam
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.15-18
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    • 2003
  • Ta-Ti metal alloy is proposed for alternate gate electrode of ULSI MOS device. Ta-Ti alloy was deposited directly on $SiO_2$ by a co-sputtering method and good interface property was obtained. The sputtering power of each metal target was 100W. Thermal and chemical stability of the electrode was studied by annealing at $500^{\circ}C$ and $600^{\circ}C$ in Ar ambient. X-ray diffraction was measured to study interface reaction and EDX(energy dispersive X-ray) measurement was performed to investigate composition of Ta and Ti element. Electrical properties were evaluated on MOS capacitor, which indicated that the work function of Ta-Ti metal alloy was ${\sim}4.1eV$ compatible with NMOS devices. The measured sheet resistance of alloy was lower than that of poly silicon.

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The Fabrication of the Cu(In,Ga)Se2 Absorber Layer Using Binary Precursor Films Deposited by Chemical Vapor Deposition (화학기상증착된 이원계 화합물 프리커서를 이용한 Cu(In,Ga)Se2 흡수층의 제조)

  • Lee, Gyeong A;Kim, A Hyun;Cho, Sung Wook;Lee, Kang-Yong;Jeon, Chan-Wook
    • Current Photovoltaic Research
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    • v.9 no.4
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    • pp.137-144
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    • 2021
  • In this study, the microstructure of the CVD-fabricated Cu(In,Ga)Se2 (CIGSe) absorber layer by simulating the stacking sequence used in a co-evaporation method, and changes solar cell performance were investigated. The absorber layer prepared by stacking CuSe and (In,Ga)Se between InSe is separated into Ga-free CuInSe2 and Ga-rich CIGSe, and transformed to CIGSe by selenization heat treatment with slight improvement in the the solar cell efficiency. However, in CVD, since the supply of liquid Cu-Se is not as active as in the co-evaporation method, the nanoocrystalline layer containing a large amount of Ga remained independently in the absorption layer, which acted as a cause of the loss of JSC and FF. Therefore, by using a precursor structure in which CuGa is sputter-deposited on a single layer of InSe deposited by CVD, performance parameters of VOC, JSC, and FF could be greatly improved.

Effect of Pb Content on the Phase Transformation of Sputter-Deposited PZT Thin Film During RTA (PZT 박막의 급속열처리시 Pb 함량이 상변태에 미치는 영향)

  • 주재현;길덕신;주승기
    • Journal of the Korean Ceramic Society
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    • v.30 no.10
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    • pp.803-810
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    • 1993
  • PbxZr0.4Ti0.6O3 thin films were prepared by reactive co-sputtering and annealed by RTA(Rapid Thermal Annealing) process. Effect of Pb content in PbxZr0.4Ti0.6O3 films on the phase transformation was intensively studied. It has been found out that depending on the Pb content as well as RTA temperature, crystal structure of PbxZr0.4Ti0.6O3 films change greatly. It turned out that transformation temperature for perovskite can be lowered and the width of transition temperature region was reduced by increasing Pb content in the film. And the lattice was expanded with increasing Pb content. With increasing RTA temperature, as-deposited phase was transformed into perovskite through three different transformation paths depending on Pb content. It was confirmed that activation energies for nucleation of perovskite structure are much larger than those of its growth.

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TEM sample preparation of thin film multilayer disks for analytical electron microscopy (분석전자현미경용 다층박막 디스크의 시편준비법)

  • 김명룡
    • Electrical & Electronic Materials
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    • v.8 no.4
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    • pp.464-471
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    • 1995
  • 메그네트론 스퍼터링으로 제작한 고밀도 다층박막($Co_75{{Pt_12}{Cr_13}}$합금) 디스크를 투과전자현미경을 이용해 단면 및 평면의 미세조직의 조사 혹은 미소부위 성분분석을 할 경우, 선행되어야하는 시편준비 경로와 각 단계별 구체적방법 및 그 효과를 연구하였다. Ion밀링시간이 증가함에 따라 시료가 얇게 되는과정에서 스퍼터링된 물질이 관찰될 시편부위의 다른 표면에 증착되므로써 미세조직의 선명도를 해칠 수 있고, 이로인한 해석상의 오류가능성이 시사되었다. 또한, 자기박막 디스크와 같이 다층으로 구성된 단면분석용 시료에서는 서로 맞붙인 실리콘 단결정 접착면을 따라 밀링속도가 선택적으로 커서 우선축이 생김으로써 양질의 시편을 얻기 어려운 문제점이 제기되었다. 이같은 문제를 포함한 전자현미경 시료준비과정에서 생길 수 있는 문제를 해결할 수 있는 실마리와 이를 이용해 수행한 전자현미경 분석결과 및 효과적인 시편준비방법이 본 논문에서 언급되었다.

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